公开(公告)号：US20100231923A1

公开(公告)日：2010-09-16

申请号：US12721084

申请日：2010-03-10

申请人： Zongtao GE ,  Masaaki Tomimizu ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi ,  Seiji Mochitate ,  Shigeyuki Takano ,  Hiroyuki Iwazaki

发明人： Zongtao GE ,  Masaaki Tomimizu ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi ,  Seiji Mochitate ,  Shigeyuki Takano ,  Hiroyuki Iwazaki

IPC分类号： G01B11/25

CPC分类号： G01B11/2441 ,  G01M11/0221 ,  G01M11/025 ,  G01M11/0271

摘要： A process of measuring a shape while changing the relative posture of an microscopic interferometer to a sample lens which is rotated about a rotation axis is divided into a process of measuring a top surface in a state where the sample lens is supported from a back surface and a process of measuring a back surface in a state where the sample lens is supported from the top surface. By combining first shape information of a flange side surface acquired by the process of measuring the top surface and second shape information of the flange side surface acquired by the process of measuring the back surface, the relative positional relation between the sample top surface and the sample back surface is calculated.

摘要翻译： 在将微型干涉仪相对于相对于旋转轴线旋转的样本透镜的相对姿势变化的同时测量形状的处理被划分为从背面支撑样本透镜的状态下测量顶面的处理， 在从上表面支撑样本透镜的状态下测量背面的处理。 通过组合通过测量上表面获得的凸缘侧表面的第一形状信息和通过测量背面的处理获得的凸缘侧表面的第二形状信息，样本顶表面和样本之间的相对位置关系 计算背面。

公开(公告)号：US08059278B2

公开(公告)日：2011-11-15

申请号：US12578997

申请日：2009-10-14

申请人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/02

CPC分类号： G01M11/0271 ,  G01M11/025

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light composed of a plane wave is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 由平面波构成的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置中的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US07982882B2

公开(公告)日：2011-07-19

申请号：US12571993

申请日：2009-10-01

申请人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01M11/025 ,  G01M11/0271

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light that travels while being converged by a Mirau objective interference optical system is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 在由Mirau物镜干涉光学系统会聚的同时行进的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US20100091299A1

公开(公告)日：2010-04-15

申请号：US12578997

申请日：2009-10-14

申请人： Zongtao GE ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao GE ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/24

CPC分类号： G01M11/0271 ,  G01M11/025

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light composed of a plane wave is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 由平面波构成的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置中的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US06297916B1

公开(公告)日：2001-10-02

申请号：US09523694

申请日：2000-03-13

申请人： Hideo Kanda ,  Noboru Koizumi

发明人： Hideo Kanda ,  Noboru Koizumi

IPC分类号： G02B912

CPC分类号： G02B9/12

摘要： An imaging lens having three lens groups is designed so that image aberrations of an object at infinity (i.e, a collimated beam) and of an object at a finite distance are very well-corrected so that the imaging lens is particularly suitable for use imaging interference patterns formed on a screen by a grazing incidence interferometer. The imaging lens is composed of the following lens components, in successive order from the most object side: a first lens component having an overall meniscus shape with its concave surface on the object side, a second lens component having negative or positive refractive power, and a third lens component of positive or negative refractive power. The refractive power of the second lens component and the third lens component are always of opposite sign, and specified conditions are satisfied in order to assure high quality imaging. Each lens component may be formed of a single lens element or of multiple lens elements.

摘要翻译： 具有三个透镜组的成像透镜被设计成使得无限远（即，准直光束）的物体和有限距离处的物体的图像像差被非常好地校正，使得成像透镜特别适合于使用成像干涉 通过掠入射干涉仪在屏幕上形成的图案。 成像透镜从最物体侧依次顺序地由以下的透镜部件构成：第一透镜部件，其具有整体弯月面形状，其物体侧具有凹面，具有正或正屈光力的第二透镜部件，以及 具有正或负屈光力的第三透镜部件。 第二透镜部件和第三透镜部件的屈光力总是相反的，并且为了确保高质量的成像而满足规定的条件。 每个透镜部件可以由单个透镜元件或多个透镜元件形成。

公开(公告)号：US07092104B2

公开(公告)日：2006-08-15

申请号：US10779599

申请日：2004-02-18

申请人： Masatoshi Hizuka ,  Hideo Kanda ,  Takayuki Saito

发明人： Masatoshi Hizuka ,  Hideo Kanda ,  Takayuki Saito

IPC分类号： G01B11/02

CPC分类号： G01B9/02022 ,  G01B9/02007 ,  G01B9/02069 ,  G01B9/02095 ,  G01B9/02096 ,  G01B11/162

摘要： In a speckle interferometer apparatus 2, an optical member mounting device 10 mounted with optical members including a pair of luminous flux outputting devices 9a, 9b, 9c, 9d is disposed on the object side of a main unit of an imaging device 3 while being separated from the imaging device 3. A light-transmitting area 14 is formed between the pair of luminous flux outputting devices 9a, 9b, 9c, 9d so as to transmit therethrough interference light from an object surface.

摘要翻译： 在散斑干涉仪装置2中，安装有包括一对光束输出装置9a，9b，9c，9d的光学构件的光学构件安装装置10设置在成像装置的主单元的物体侧 同时与成像装置3分离。 在一对光束输出装置9a，9b，9c，9d之间形成透光区域14，以便透射来自物体表面的干涉光。

公开(公告)号：US06798585B2

公开(公告)日：2004-09-28

申请号：US10347319

申请日：2003-01-21

申请人： Hideo Kanda

发明人： Hideo Kanda

IPC分类号： G02B934

CPC分类号： G02B9/62 ,  G02B9/60 ,  G02B13/00

摘要： A reference lens for an interferometer is constructed so that light transmitted by a partially reflecting reference spherical surface may be converged, toward a focal point that coincides with the center of curvature of the reference spherical surface, and reflected from a subject spherical surface that also has its center of curvature at the focal point. Measurement of the shape of the subject spherical surface is possible based on the interference of two light beams, one reflected by the subject spherical surface and one reflected by the reference spherical surface. The reference lens, which may include five or six lens components or lens elements, includes a negative meniscus lens component, a positive lens group, and a positive lens component. Specified conditions are satisfied to provide a reference lens that has favorable correction of aberrations, is compact, and can measure the surface accuracy of a wide range of convex spherical surfaces.

摘要翻译： 用于干涉仪的参考透镜被构造成使得由部分反射的参考球面传输的光可以朝着与参考球面的曲率中心一致的焦点会聚，并且从也具有 其焦点的曲率中心。 基于两个光束的干涉可以测量目标球面的形状，一个被目标球面反射的光束和由参考球面反射的光束的干涉。 可以包括五个或六个透镜部件或透镜元件的参考透镜包括负弯月透镜部件，正透镜组和正透镜部件。 满足规定的条件以提供具有良好的像差校正的参考透镜，紧凑，并且可以测量宽范围的凸球面的表面精度。

公开(公告)号：US06912055B2

公开(公告)日：2005-06-28

申请号：US10387562

申请日：2003-03-14

申请人： Nobuaki Ueki ,  Hideo Kanda

发明人： Nobuaki Ueki ,  Hideo Kanda

IPC分类号： G01B11/24 ,  G01B9/02

CPC分类号： G01M11/005 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02085 ,  G01M11/025 ,  G01M11/0271

摘要： Respective regional form information items obtained from regional interference fringe images corresponding to partial regions of a spherical surface to be inspected are transformed into regional synthesis form information items corresponding to a common coordinate system set for aperture synthesis by using a relationship among a polar coordinate system of the spherical surface, a plane coordinate system of an imaging plane, and the common coordinate system. Thus obtained regional synthesis form information items are subjected to aperture synthesis processing, so as to determine the overall form information of the spherical surface.

摘要翻译： 从对应于要检查的球面的部分区域的区域干涉条纹图像获得的各个区域形式信息项目被转换成与用于孔隙合成设置的公共坐标系对应的区域合成形式信息项， 球面，成像平面坐标系和公共坐标系。 对这样获得的区域综合形式信息项进行孔径合成处理，以确定球面的整体形式信息。

公开(公告)号：US06744523B2

公开(公告)日：2004-06-01

申请号：US10105371

申请日：2002-03-26

申请人： Nobuaki Ueki ,  Hideo Kanda

发明人： Nobuaki Ueki ,  Hideo Kanda

IPC分类号： G01B902

CPC分类号： G01B9/02041 ,  G01B9/02022 ,  G01B9/02082 ,  G01B2290/30

摘要： An imaging optical system for an oblique incidence interferometer comprises first and second optical systems and an intermediate imaging surface therebetween. Each of the first and second imaging optical systems comprises two telecentric lenses, arranged afocal to each other, having respective focal lengths different from each other. A first image of a surface to be inspected having a deformed aspect ratio with respect to this surface is formed on the intermediate imaging surface by way of the first imaging optical system. The second imaging optical system is arranged such that the first image is focused onto the imaging surface of the interferometer as a second image corrected so as to have substantially the same aspect ratio as that of the surface to be inspected.

摘要翻译： 用于倾斜入射干涉仪的成像光学系统包括第一和第二光学系统以及它们之间的中间成像表面。 第一成像光学系统和第二成像光学系统中的每一个包括两个远心透镜，彼此无关联，具有彼此不同的焦距。 通过第一成像光学系统在中间成像表面上形成具有相对于该表面的变形纵横比的被检查表面的第一图像。 第二成像光学系统被布置成使得第一图像被聚焦到干涉仪的成像表面上，作为校正的第二图像，以便具有与待检查表面的纵横比大致相同的纵横比。

公开(公告)号：US06643026B2

公开(公告)日：2003-11-04

申请号：US09779634

申请日：2001-02-09

申请人： Hideo Kanda ,  Fumio Watanabe ,  Fumio Kobayashi

发明人： Hideo Kanda ,  Fumio Watanabe ,  Fumio Kobayashi

IPC分类号： G01B902

CPC分类号： G01B9/02022 ,  G01B2290/70

摘要： In an optical system for an oblique incidence interferometer, first and second prisms are used for luminous flux dividing and for luminous flux combining, respectively. Reference light and measurement light are separated from each other at a surface where collimated coherent light enters or exits from the first prism, whereas the reference light and measurement light are combined together at a surface where the measurement light enters or exits from the second prism.

摘要翻译： 在用于倾斜入射干涉仪的光学系统中，第一和第二棱镜分别用于光通量分配和光通量组合。 参考光和测量光在准直相干光从第一棱镜进入或离开的表面彼此分离，而参考光和测量光在测量光进入或离开第二棱镜的表面处组合在一起。