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US07092104B2 Speckle interferometer apparatus 失效
散斑干涉仪

Speckle interferometer apparatus
摘要:
In a speckle interferometer apparatus 2, an optical member mounting device 10 mounted with optical members including a pair of luminous flux outputting devices 9a, 9b, 9c, 9d is disposed on the object side of a main unit of an imaging device 3 while being separated from the imaging device 3. A light-transmitting area 14 is formed between the pair of luminous flux outputting devices 9a, 9b, 9c, 9d so as to transmit therethrough interference light from an object surface.
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