公开(公告)号：US20110304856A1

公开(公告)日：2011-12-15

申请号：US13149198

申请日：2011-05-31

申请人： Zongtao GE ,  Masaaki TOMIMIZU ,  Hideo KANDA ,  Hiroyuki IWAZAKI ,  Noboru KOIZUMI ,  Takayuki SAITO ,  Seiji MOCHITATE ,  Takeshi OGASAWARA ,  Takashi NAKAJIMA

发明人： Zongtao GE ,  Masaaki TOMIMIZU ,  Hideo KANDA ,  Hiroyuki IWAZAKI ,  Noboru KOIZUMI ,  Takayuki SAITO ,  Seiji MOCHITATE ,  Takeshi OGASAWARA ,  Takashi NAKAJIMA

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01M11/0207 ,  G01M11/025 ,  G01M11/0271

摘要： A microinterferometer applies low coherent measurement light, which travels along an optical axis in a converging manner, to a front surface of a flange. A part of the measurement light is reflected inside an interferometric optical system, and becomes reference light. Apart of the measurement light passed through the interferometric optical system is reflected from the front surface of the flange, and is incident again upon the interferometric optical system. By combining the reflected light with the reference light, interference light is obtained. While a sample rotating stage rotates a sample lens through 360 degrees, a first imaging camera having one-dimensional image sensor captures 3600 images of the interference light, i.e., the image of the interference light is captured every time the sample lens is rotated by 0.1 degrees. Based on the images of interference fringes, the shape of the front surface of the flange is analyzed.

摘要翻译： 微型干涉仪将以相聚的方式沿光轴行进的低相干测量光应用于凸缘的前表面。 测量光的一部分在干涉光学系统内反射，成为参考光。 除了通过干涉光学系统的测量光之外，还从法兰的前表面反射，并再次入射到干涉光学系统上。 通过将反射光与参考光组合，获得干涉光。 当样品旋转台将样品透镜旋转360度时，具有一维图像传感器的第一成像相机捕获干涉光的3600张图像，即每次将样品透镜旋转0.1次时捕获干涉光的图像 度。 基于干涉条纹的图像，分析法兰前表面的形状。

公开(公告)号：US20100246900A1

公开(公告)日：2010-09-30

申请号：US12730696

申请日：2010-03-24

申请人： Zongtao GE ,  Kenichi Takahashi

发明人： Zongtao GE ,  Kenichi Takahashi

IPC分类号： G06K9/62

CPC分类号： G01B11/272 ,  B23Q17/24

摘要： A measurement jig having a position indicator is set so as to rotate integrally with a sample, and a magnified image of the position indicator formed by a microscope is picked up by an imaging camera at plural time points during the rotation of the sample. A movement locus of the magnified images picked up is founded, and position variation amount of a rotation center line of the sample is calculated on the basis of the found movement locus.

摘要翻译： 将具有位置指示器的测量夹具设置成与样品一体旋转，并且在样品旋转期间，通过成像摄像机在多个时间点拾取由显微镜形成的位置指示器的放大图像。 建立拾取的放大图像的运动轨迹，并且基于找到的移动轨迹计算样本的旋转中心线的位置变化量。

公开(公告)号：US20100201992A1

公开(公告)日：2010-08-12

申请号：US12647091

申请日：2009-12-24

申请人： Zongtao GE

发明人： Zongtao GE

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B11/06 ,  G01B11/306

摘要： A test surface is rotatable around a rotation axis and an interferometer main unit is movable with respect to a test surface so that an observation area is moved on the test surface which is rotating. While the observation area is moved within the test surface, an interfering light beam is successively captured by a one-dimensional image sensor, straight belt form observation-position-specific interference fringes formed by the interfering light beam are successively imaged, and the shape information of the test surface is obtained based on the imaged observation-position-specific interference fringes.

摘要翻译： 测试面可以围绕旋转轴线旋转，并且干涉仪主单元可相对于测试表面移动，使得观察区域在正在旋转的测试表面上移动。 当观察区域在测试表面内移动时，干涉光束被一维图像传感器连续地捕获，直线形式由干涉光束形成的观察位置特定的干涉条纹被连续地成像，并且形状信息 基于成像的观察位置特定干涉条纹获得测试表面。

公开(公告)号：US20090073459A1

公开(公告)日：2009-03-19

申请号：US12193975

申请日：2008-08-19

申请人： Zongtao GE

发明人： Zongtao GE

IPC分类号： G01B9/02

CPC分类号： G01J9/02 ,  G01B9/02083 ,  G01B9/02084 ,  G11B7/22

摘要： A wavefront measuring apparatus for optical pickup includes: a beam splitting section; a wavefront shaping section; a beam combining section that generate interference light; an interference fringe image-acquiring section that acquires an interference fringe image including wavefront information of the light beam; and an analyzing section that analyzes a wavefront of the light beam on the basis of the interference fringe image. The analyzing section includes: an image processing section that performs a filtering process on the interference fringe image to eliminate a frequency component corresponding to the sub beam, so as to acquire the filtering-processed interference fringe image, and a wavefront analyzing section that analyzes a wavefront of the main beam on the basis of the filtering-processed interference fringe image.

摘要翻译： 一种用于光学拾取器的波前测量装置，包括：分束部分; 波前成形部分; 产生干涉光的光束组合部分; 干涉条纹图像获取部，其获取包括所述光束的波前信息的干涉条纹图像; 以及分析部，其基于干涉条纹图像分析光束的波前。 分析部分包括：图像处理部分，对干涉条纹图像执行滤波处理以消除与子光束相对应的频率分量，以获取滤波处理的干涉条纹图像;以及波前分析部分，其分析 基于滤波处理干涉条纹图像的主波束的波前。

公开(公告)号：US06707559B2

公开(公告)日：2004-03-16

申请号：US10021014

申请日：2001-12-19

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B902

CPC分类号： G01B11/26 ,  G01B11/02

摘要： A method of detecting a posture of an object comprises the steps of acquiring fringe image data carrying phase information of the object; subjecting the whole or part of fringe image data to arithmetic processing using Fourier transform so as to determine a tilt frequency of a fringe corresponding to an inclination of the object in the fringe image data; and detecting the inclination of the object according to the tilt frequency.

摘要翻译： 一种检测物体的姿势的方法包括以下步骤：获取携带物体的相位信息的条纹图像数据; 使用傅里叶变换对条纹图像数据的全部或部分进行算术处理，以便确定与条纹图像数据中的对象的倾斜度相对应的条纹的倾斜频率; 并根据倾斜频率检测物体的倾斜度。

公开(公告)号：US20110242545A1

公开(公告)日：2011-10-06

申请号：US13074052

申请日：2011-03-29

申请人： MASAAKI TOMIMIZU ,  ZONGTAO GE ,  HIROYUKI IWAZAKI

发明人： MASAAKI TOMIMIZU ,  ZONGTAO GE ,  HIROYUKI IWAZAKI

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B21/047 ,  G01M11/025 ,  G01M11/0271

摘要： An aspheric surface measuring apparatus includes a sample holder mechanism and an interferential optical mechanism, and performs optical interferometric measurement while rotating a sample every time a measurement angle is varied. The sample holder mechanism has a first air spindle for rotating the sample about a test surface axis and a first airslide. The first airslide carries the sample orthogonally or parallel to the test surface axis. The interference optical mechanism has an interference optical system, a first imaging system, and a second imaging system, a second air spindle, and a second airslide. The second spindle revolves or turns the interference optical system and the first and second imaging systems integrally to change a measurement angle between the measurement optical axis and the test surface axis. The second airslide carries the second air spindle orthogonally to the moving direction of the first airslide.

摘要翻译： 非球面测量装置包括样品保持器机构和干涉光学机构，并且每当测量角度变化时旋转样品，进行光学干涉测量。 样品保持器机构具有第一空气轴，用于使试样围绕测试表面轴线和第一滑动件旋转。 第一个滑动件将样本正交或平行于测试表面轴线运送。 干涉光学机构具有干涉光学系统，第一成像系统和第二成像系统，第二空气主轴和第二滑雪板。 第二主轴将干涉光学系统和第一和第二成像系统整体旋转或转动，以改变测量光轴和测试表面轴线之间的测量角度。 第二滑动件与第一滑动件的移动方向正交地承载第二空气轴。

公开(公告)号：US06947149B2

公开(公告)日：2005-09-20

申请号：US10435370

申请日：2003-05-12

申请人： Fumio Kobayashi ,  Zongtao Ge ,  Kunihiko Tanaka

发明人： Fumio Kobayashi ,  Zongtao Ge ,  Kunihiko Tanaka

IPC分类号： G01B11/26 ,  G01B11/00 ,  G01B11/27 ,  G01M11/00 ,  G02B6/36 ,  G02B6/38 ,  G01B9/02

CPC分类号： G02B6/3863 ,  G01B11/272 ,  G02B6/3807

摘要： While a ferrule held by a clamping apparatus is rotated by a predetermined angle, respective interference fringe images of a spherical leading end part of the ferrule are obtained at three or more rotational positions. Respective interference fringe center positions are obtained in thus obtained three or more interference fringe images. The center position of a circle passing near each of the interference fringe center positions is calculated and defined as a measured center position. Relative distance information between the measured center position and a position corresponding to the rotational center position of the spherical leading end part of the ferrule or the relative distance information and relative directional information thereof are outputted as an inclination error adjustment value for the axis of the ferrule.

摘要翻译： 当由夹持装置保持的套圈旋转预定角度时，在三个或更多个旋转位置处获得套圈的球形前端部的相应的干涉条纹图像。 在这样获得的三个或更多个干涉条纹图像中获得各干涉条纹中心位置。 通过靠近每个干涉条纹中心位置的圆的中心位置被计算并定义为测量的中心位置。 输出测量中心位置与对应于套圈的球形前端部分的旋转中心位置的位置或相对距离信息及其相对方向信息之间的相对距离信息作为套圈轴线的倾斜误差调整值 。

公开(公告)号：US06621579B2

公开(公告)日：2003-09-16

申请号：US09816113

申请日：2001-03-26

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B902

CPC分类号： G01J9/02

摘要： In a fringe analysis method using Fourier transform, fringe image data is determined in a state where a wavefront from an object and a wavefront from a reference are relatively inclined with respect to each other by a minute amount, and a carrier fringe occurring due to this inclination is superposed on a fringe occurring due to wavefront information of the object. The inclination is set such that the carrier frequency occurring due to the inclination is a predetermined multiple of the basic frequency determined by the wavefront information of the object and observing means.

摘要翻译： 在使用傅立叶变换的边缘分析方法中，在来自物体的波前和来自基准的波前相对于彼此相对倾斜微小量的状态下确定条纹图像数据，并且由于该原因而发生的载波边缘 由于物体的波前信息，斜率叠加在边缘上。 斜率被设定为使得由于倾斜而发生的载波频率是由对象和观察装置的波前信息确定的基本频率的预定倍数。

公开(公告)号：US08059278B2

公开(公告)日：2011-11-15

申请号：US12578997

申请日：2009-10-14

申请人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/02

CPC分类号： G01M11/0271 ,  G01M11/025

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light composed of a plane wave is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 由平面波构成的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置中的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US20100309458A1

公开(公告)日：2010-12-09

申请号：US12785639

申请日：2010-05-24

申请人： Zongtao GE ,  Ping Sun

发明人： Zongtao GE ,  Ping Sun

IPC分类号： G01B9/00

CPC分类号： G01M11/0242

摘要： Disclosed is an asphere measurement method capable of measuring the surface deviations and the surface tilts with high accuracy even when an asphere to be measured does not have the wedge-shaped flat portion.Provided is an asphere measurement method of measuring surface deviations and surface tilts of an asphere having a first detection target surface and a second detection target surface formed as aspheric surfaces which are rotationally symmetric. The method includes, in order of measurement: a first interference fringe acquisition step; a second interference fringe acquisition step; a first shape data acquisition step; a second shape data acquisition step; a first axis data acquisition step; a second axis data acquisition step; and a surface deviation/tilt analysis step.

摘要翻译： 公开了一种非球面测量方法，即使被测量的非球面不具有楔形平坦部分，也能够以高精度测量表面偏离和表面倾斜。 提供了一种测量具有第一检测目标表面的非球面的表面偏差和表面倾斜的非球面测量方法，以及形成为旋转对称的非球面的第二检测目标表面。 该方法按照测量顺序包括：第一干涉条纹获取步骤; 第二干涉条纹获取步骤; 第一形状数据获取步骤; 第二形状数据获取步骤; 第一轴数据采集步骤; 第二轴数据采集步骤; 和表面偏离/倾斜分析步骤。