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1.发明授权Signal processing method of multiple mirco-electro-mechanical system (MEMS) devices and combo MEMS device applying the method 有权多微电子机电系统（MEMS）器件的信号处理方法和应用该方法的组合MEMS器件公开(公告)号：US09563102B2
公开(公告)日：2017-02-07
申请号：US14676216
申请日：2015-04-01
Applicant: Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
Inventor： Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
IPC: G02F2/00 , G01C19/5712 , B81B7/00 , G01C19/5776
CPC classification number: G02F2/00 , B81B7/008 , G01C19/5776
Abstract: This invention provides a signal processing method of multiple micro-electro-mechanical system devices. The signal processing method includes: providing at least two MEMS devices; applying driving or modulating signals of different frequencies to the MEMS devices such that the MEMS devices generate respective MEMS signals with respective frequencies; and combining the MEMS signals with respective frequencies into one or more multi-frequency signals and outputting the multi-frequency signals, wherein a number of the multi-frequency signals is less than a number of the MEMS signals with respective frequencies. This invention also provides a combo MEMS device integrating two or more MEMS devices and two or more vibration sources.
Abstract translation: 本发明提供了一种多个微机电系统装置的信号处理方法。 信号处理方法包括：提供至少两个MEMS器件; 将不同频率的信号驱动或调制到MEMS器件，使得MEMS器件以相应的频率产生相应的MEMS信号; 以及将所述MEMS信号与各个频率组合成一个或多个多频信号并输出所述多频信号，其中所述多频信号的数目小于具有相应频率的多个MEMS信号。 本发明还提供集成两个或多个MEMS器件和两个或更多个振动源的组合MEMS器件。
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2.发明申请SIGNAL PROCESSING METHOD OF MULTIPLE MIRCO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND COMBO MEMS DEVICE APPLYING THE METHOD 有权多个微机电系统（MEMS）器件的信号处理方法和应用该方法的组合MEMS器件公开(公告)号：US20150355523A1
公开(公告)日：2015-12-10
申请号：US14676216
申请日：2015-04-01
Applicant: Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
Inventor： Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
CPC classification number: G02F2/00 , B81B7/008 , G01C19/5776
Abstract: This invention provides a signal processing method of multiple micro-electro-mechanical system devices. The signal processing method includes: providing at least two MEMS devices; applying driving or modulating signals of different frequencies to the MEMS devices such that the MEMS devices generate respective MEMS signals with respective frequencies; and combining the MEMS signals with respective frequencies into one or more multi-frequency signals and outputting the multi-frequency signals, wherein a number of the multi-frequency signals is less than a number of the MEMS signals with respective frequencies. This invention also provides a combo MEMS device integrating two or more MEMS devices and two or more vibration sources.
Abstract translation: 本发明提供了一种多个微机电系统装置的信号处理方法。 信号处理方法包括：提供至少两个MEMS器件; 将不同频率的信号驱动或调制到MEMS器件，使得MEMS器件以相应的频率产生相应的MEMS信号; 以及将所述MEMS信号与各个频率组合成一个或多个多频信号并输出所述多频信号，其中所述多频信号的数目小于具有相应频率的多个MEMS信号。 本发明还提供集成两个或多个MEMS器件和两个或更多个振动源的组合MEMS器件。
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公开(公告)号：US20130160544A1
公开(公告)日：2013-06-27
申请号：US13430685
申请日：2012-03-26
Applicant: Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
Inventor： Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
IPC: G01C19/56
CPC classification number: G01C19/5776
Abstract: A reading circuit of a gyroscope is provided. The reading circuit includes a driving unit, a high pass filter, a signal processing unit, and a low pass filter. The driving unit generates a resonance signal for a resonator of the gyroscope and generates a demodulation signal for the signal processing unit. The signal processing unit provides a modulation signal to a Coriolis accelerometer of the gyroscope. An input terminal of the high pass filter receives an output signal of the Coriolis accelerometer. The signal processing unit processes and demodulates an output of the high pass filter according to the demodulation signal and outputs a demodulation result to the low pass filter.
Abstract translation: 提供陀螺仪的读取电路。 读取电路包括驱动单元，高通滤波器，信号处理单元和低通滤波器。 驱动单元产生用于陀螺仪的谐振器的谐振信号，并产生信号处理单元的解调信号。 信号处理单元向陀螺仪的科里奥利加速度计提供调制信号。 高通滤波器的输入端接收科里奥利加速度计的输出信号。 信号处理单元根据解调信号对高通滤波器的输出进行处理和解调，并向低通滤波器输出解调结果。
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公开(公告)号：US20110101994A1
公开(公告)日：2011-05-05
申请号：US12645473
申请日：2009-12-22
Applicant: Yu-Wen Hsu , Lu-Po Liao , Chieh-Ling Hsiao , Yu-Chun Hsu
Inventor： Yu-Wen Hsu , Lu-Po Liao , Chieh-Ling Hsiao , Yu-Chun Hsu
Abstract: A calibration apparatus and method for a capacitive sensing device, in which a calibration capacitor device connects to the capacitive sensing device which is connected to an integration circuit that generates a voltage output and a latch output, a transforming circuit transforms a sensitivity calibration parameter into a pair of corresponding analog signal outputs, and an offset calibration parameter into a corresponding analog signal output, at least two first switches between the pair of corresponding analog signal outputs and a fixed potential according to system clock's levels, and at least a third switch switches between the corresponding analog signal output and another fixed potential according to the system clock's levels. The apparatus determines the switch between the pair of signal outputs according to the latch output.
Abstract translation: 一种用于电容感测装置的校准装置和方法，其中校准电容器装置连接到连接到产生电压输出和锁存输出的积分电路的电容感测装置，变换电路将灵敏度校准参数转换成 一对相应的模拟信号输出和偏移校准参数转换成对应的模拟信号输出，在对对应的模拟信号输出对之间的至少两个第一开关和根据系统时钟电平的固定电位，并且至少第三开关在 相应的模拟信号输出和另一个固定电位根据系统时钟的电平。 该装置根据锁存输出确定一对信号输出之间的切换。
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公开(公告)号：US08857259B2
公开(公告)日：2014-10-14
申请号：US13430685
申请日：2012-03-26
Applicant: Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
Inventor： Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
IPC: G01C19/56
CPC classification number: G01C19/5776
Abstract: A reading circuit of a gyroscope is provided. The reading circuit includes a driving unit, a high pass filter, a signal processing unit, and a low pass filter. The driving unit generates a resonance signal for a resonator of the gyroscope and generates a demodulation signal for the signal processing unit. The signal processing unit provides a modulation signal to a Coriolis accelerometer of the gyroscope. An input terminal of the high pass filter receives an output signal of the Coriolis accelerometer. The signal processing unit processes and demodulates an output of the high pass filter according to the demodulation signal and outputs a demodulation result to the low pass filter.
Abstract translation: 提供陀螺仪的读取电路。 读取电路包括驱动单元，高通滤波器，信号处理单元和低通滤波器。 驱动单元产生用于陀螺仪的谐振器的谐振信号，并产生信号处理单元的解调信号。 信号处理单元向陀螺仪的科里奥利加速度计提供调制信号。 高通滤波器的输入端接收科里奥利加速度计的输出信号。 信号处理单元根据解调信号对高通滤波器的输出进行处理和解调，并向低通滤波器输出解调结果。
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Patent Agency Ranking
公开(公告)号：US08242788B2
公开(公告)日：2012-08-14
申请号：US12645473
申请日：2009-12-22
Applicant: Yu-Wen Hsu , Lu-Po Liao , Chieh-Ling Hsiao , Yu-Chun Hsu
Inventor： Yu-Wen Hsu , Lu-Po Liao , Chieh-Ling Hsiao , Yu-Chun Hsu
Abstract: A calibration apparatus and method for a capacitive sensing device, in which a calibration capacitor device connects to the capacitive sensing device which is connected to an integration circuit that generates a voltage output and a latch output, a transforming circuit transforms a sensitivity calibration parameter into a pair of corresponding analog signal outputs, and an offset calibration parameter into a corresponding analog signal output, at least two first switches between the pair of corresponding analog signal outputs and a fixed potential according to system clock's levels, and at least a third switch switches between the corresponding analog signal output and another fixed potential according to the system clock's levels. The apparatus determines the switch between the pair of signal outputs according to the latch output.
Abstract translation: 一种用于电容感测装置的校准装置和方法，其中校准电容器装置连接到连接到产生电压输出和锁存输出的积分电路的电容感测装置，变换电路将灵敏度校准参数转换成 一对相应的模拟信号输出和偏移校准参数转换成对应的模拟信号输出，在对对应的模拟信号输出对之间的至少两个第一开关和根据系统时钟电平的固定电位，并且至少第三开关在 相应的模拟信号输出和另一个固定电位根据系统时钟的电平。 该装置根据锁存输出确定一对信号输出之间的切换。
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公开(公告)号：US20160131679A1
公开(公告)日：2016-05-12
申请号：US14535022
申请日：2014-11-06
Applicant: Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
Inventor： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
IPC: G01P15/08
CPC classification number: G01P15/125 , G01P2015/0845 , H01L29/84
Abstract: The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass.
Abstract translation: 本发明提供一种MEMS装置。 MEMS器件包括：衬底; 包括至少两个槽的检验质量块，每个槽包括内部空间和开口，所述内部空间比所述开口相对更靠近所述检验质量块的中心区域; 至少两个锚定件，位于相应的槽中并连接到基板上; 至少两个连杆位于相应的槽中并连接到相应的锚固件上; 以及用于辅助检测质量块的多维运动的多维弹簧结构，围绕证明物质的周边的多维弹簧结构，并且通过连接件和锚固件连接到基底。 该多维弹簧结构包括第一和第二弹簧，用于辅助防弹块的平面外移动和平面内移动。
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8.发明申请MIRCO-ELECTRO-MECHANICAL SYSTEM PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF 审中-公开微电子机械系统压力传感器及其制造方法公开(公告)号：US20150260593A1
公开(公告)日：2015-09-17
申请号：US14329111
申请日：2014-07-11
Applicant: Yu-Wen Hsu , Chia-Yu Wu , Shih-Chieh Lin , Shih-Ting Lin
Inventor： Yu-Wen Hsu , Chia-Yu Wu , Shih-Chieh Lin , Shih-Ting Lin
CPC classification number: G01L9/0072 , B81B2201/0264 , B81C1/00309 , G01L19/0618
Abstract: The invention provides a micro-electro-mechanical system pressure sensor. The micro-electro-mechanical system pressure sensor includes: a substrate, including at least one conductive wiring; a membrane disposed above the substrate to form a semi-open chamber between the membrane and the substrate, the semi-open chamber having an opening to receive an external pressure; and a cap, disposed above the membrane and forming an enclosed space with the membrane, the cap including a top electrode corresponding to the membrane and at least one portion of the membrane forming a bottom electrode, wherein the top and bottom electrodes form a sensing capacitor to sense the external pressure.
Abstract translation: 本发明提供一种微机电系统压力传感器。 微电子机械系统压力传感器包括：基板，包括至少一个导电布线; 膜，设置在所述基板上方以在所述膜和所述基板之间形成半开放室，所述半开放室具有用于接收外部压力的开口; 以及帽，其设置在所述膜的上方并与所述膜形成封闭空间，所述盖包括对应于所述膜的顶部电极和形成底部电极的所述膜的至少一部分，其中所述顶部和底部电极形成感测电容器 感觉外部压力。
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9.发明授权公开(公告)号：US09733269B2
公开(公告)日：2017-08-15
申请号：US14535022
申请日：2014-11-06
Applicant: Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
Inventor： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
IPC: G01P15/125 , H01L29/84 , G01P15/08
CPC classification number: G01P15/125 , G01P2015/0845 , H01L29/84
Abstract: The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass.
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公开(公告)号：US20120154068A1
公开(公告)日：2012-06-21
申请号：US13115112
申请日：2011-05-25
Applicant: Yu-Wen Hsu , Lung-Tai Chen , Tzung-Ching Lee , Chao-Ta Huang
Inventor： Yu-Wen Hsu , Lung-Tai Chen , Tzung-Ching Lee , Chao-Ta Huang
IPC: H03B5/32 , H01L21/822
CPC classification number: H03H9/0547 , H03H3/02
Abstract: A crystal oscillator includes a cover, a crystal blank and an Integrated Circuit (IC) chip. The cover has a surface, a cavity formed in the surface, a plurality of conductive contacts and a conductive sealing ring. The conductive contacts are disposed on the surface, and the conductive sealing ring is disposed on the surface and surrounds the conductive contacts. The IC chip is connected to the conductive contacts and the conductive sealing ring, and forms a hermetic chamber with the cover and the conductive sealing ring. The crystal blank is located in the hermetic chamber, and is electrically connected to the IC chip. Furthermore, a method for manufacturing a crystal oscillator is also provided.
Abstract translation: 晶体振荡器包括盖，晶体空白和集成电路（IC）芯片。 盖具有表面，形成在表面中的空腔，多个导电触点和导电密封环。 导电触点设置在表面上，并且导电密封环设置在表面上并且围绕导电触点。 IC芯片连接到导电触点和导电密封环，并与盖和导电密封环形成密封室。 晶体坯料位于密封室中，并与IC芯片电连接。 此外，还提供了一种用于制造晶体振荡器的方法。
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