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    Multi-substrate liquid metal high-frequency switching device
    1.
    发明授权
    Multi-substrate liquid metal high-frequency switching device 失效
    多基板液态金属高频开关装置

    公开(公告)号：US06927350B2

    公开(公告)日：2005-08-09

    申请号：US10738539

    申请日：2003-12-16

    申请人： You Kondoh ,  Tsutomu Takenaka

    发明人： You Kondoh ,  Tsutomu Takenaka

    IPC分类号： H01H11/02 ,  H01H1/00 ,  H01H29/02 ,  H01H29/28 ,  H01H29/30 ,  H01H61/01 ,  H01H61/02 ,  H01H29/00

    CPC分类号： H01H29/28 ,  H01H1/0036 ,  H01H61/02 ,  H01H2029/008 ,  H01H2061/006

    摘要： A device and manufacturing method are provided that comprises forming first and second substrates joined together and comprising a main channel provided in at least one of the substrates and a connecting channel provided in at least one of the substrates, the connecting channel connected to the main channel, and the main channel having spaced apart electrodes and at least partially filled with liquid metal. The method further comprises forming a heater substrate comprising a suspended heater element in fluid communication with the connecting channel, the suspended heater element operable to cause a fluid non-conductor to separate the liquid metal and selectively interconnect the electrodes, and providing a high-frequency signal loss reduction structure between the main channel and the heater substrate.

    摘要翻译： 提供了一种装置和制造方法，包括：形成连接在一起的第一和第二基板，并且包括设置在至少一个基板中的主通道和设置在至少一个基板中的连接通道，连接通道连接到主通道 ，并且主通道具有间隔开的电极并且至少部分地填充有液态金属。 该方法还包括形成加热器基板，该加热器基板包括与连接通道流体连通的悬置加热器元件，该悬挂加热器元件可操作以使流体非导体分离液态金属并选择性地互连电极，并提供高频 主通道和加热器基板之间的信号损失减小结构。

    Pressure-actuated bi-stable optical switching
    2.
    发明授权
    Pressure-actuated bi-stable optical switching 失效
    压力双稳态光开关

    公开(公告)号：US06674934B2

    公开(公告)日：2004-01-06

    申请号：US09992843

    申请日：2001-11-06

    申请人： Kent W. Carey ,  Tetsuya Hidaka ,  You Kondoh ,  Mitsuchika Saito ,  Tsutomu Takenaka

    发明人： Kent W. Carey ,  Tetsuya Hidaka ,  You Kondoh ,  Mitsuchika Saito ,  Tsutomu Takenaka

    IPC分类号： G02B635

    CPC分类号： G02B26/004 ,  G02B6/3538 ,  G02B6/3574 ,  G02B6/3576 ,  G02B6/358

    摘要： Pressure-actuated bi-stable optical switching is provided. In this regard, a pressure-actuated bi-stable optical switch includes an optical path and a cavity intersecting the optical path. The cavity defines a first position along the optical path and a second position displaced from the optical path. An index-matching liquid, which exhibits an index of refraction closer to an index of refraction of the optical path than to that of a vacuum, is arranged within the cavity. A pressure generator generates pressure that selective moves the liquid between the first and second positions. Additionally, a potential profile maintains the liquid in the one of the first and second positions to which it was most recently moved while the pressure generator is not generating pressure. Methods, systems and other switches also are provided.

    摘要翻译： 提供了压力致动的双稳态光开关。 在这方面，压力致动的双稳态光开关包括光路和与光路相交的空腔。 空腔限定沿着光路的第一位置和从光路移位的第二位置。 折射率匹配液体，其折射率比真空折射率更接近光路的折射率，设置在空腔内。 压力发生器产生选择性地在第一和第二位置之间移动液体的压力。 此外，当压力发生器不产生压力时，电位轮廓将液体保持在最近移动的第一和第二位置之一中的液体。 还提供了方法，系统和其他开关。

    Liquid metal micro-relay with suspended heaters and multilayer wiring
    3.
    发明授权
    Liquid metal micro-relay with suspended heaters and multilayer wiring 失效

    公开(公告)号：US06806431B2

    公开(公告)日：2004-10-19

    申请号：US10627308

    申请日：2003-07-25

    申请人： You Kondoh ,  Tsutomu Takenaka

    发明人： You Kondoh ,  Tsutomu Takenaka

    IPC分类号： H01H2900

    CPC分类号： H01H1/0036 ,  H01H29/28 ,  H01H2029/008 ,  H01H2061/006

    摘要： A micro-relay device is provided including a fluid non-conductor. A first substrate and a second substrate are bonded together. A channel is defined in at least one of the substrates, and has a liquid metal in the channel. Electrodes are spaced along the channel and selectively interconnectable by the liquid metal. An open via is defined in one of the substrates and contains the fluid non-conductor. A heater substrate includes a suspended heater element in fluid communication with the open via. The suspended heater element is operable to cause the fluid non-conductor to separate the liquid metal.

    Multi-pole conductive liquid-based switch device
    4.
    发明授权
    Multi-pole conductive liquid-based switch device 失效
    多极导电液体开关装置

    公开(公告)号：US06756552B2

    公开(公告)日：2004-06-29

    申请号：US10080648

    申请日：2002-02-21

    申请人： Tsutomu Takenaka ,  You Kondoh

    发明人： Tsutomu Takenaka ,  You Kondoh

    IPC分类号： H01H2922

    CPC分类号： H01H1/0036 ,  H01H29/28 ,  H01H2029/008

    摘要： The multi-pole, conductive liquid-based switch device includes an elongate passage, a first cavity, a second cavity, at least four electrodes disposed along the length of the passage, channels that extend from the passage, non-conductive fluid located the cavities and conductive liquid located in the passage. The channels are one fewer in number than the electrodes and are interleaved with the electrodes along the length of the passage. The channels are numbered in order from one end of the passage. Odd-numbered ones of the channels extend to the first cavity while even-numbered ones of the channels extend to the second cavity.

    摘要翻译： 多极导电液体开关装置包括细长通道，第一空腔，第二空腔，沿着通道长度设置的至少四个电极，从通道延伸的通道，位于空腔内的非导电流体 和位于通道中的导电液体。 通道数量比电极少一个，并且沿着通道的长度与电极交错。 通道从通道的一端开始按顺序编号。 通道中的奇数通道延伸到第一腔，而偶数通道延伸到第二腔。

    Photoconductive switch module
    5.
    发明授权
    Photoconductive switch module 失效
    光导开关模块

    公开(公告)号：US07009195B2

    公开(公告)日：2006-03-07

    申请号：US10616258

    申请日：2003-07-09

    申请人： Junichi Nakano ,  Hiroshi Miyajima ,  Daisuke Matsuo ,  Kenzi Murakami ,  Mitsuchika Saito ,  You Kondoh ,  Tsutomu Takenaka ,  Yasuhisa Kaneko

    发明人： Junichi Nakano ,  Hiroshi Miyajima ,  Daisuke Matsuo ,  Kenzi Murakami ,  Mitsuchika Saito ,  You Kondoh ,  Tsutomu Takenaka ,  Yasuhisa Kaneko

    IPC分类号： G02B27/00

    CPC分类号： H01L31/02005 ,  H01L31/0203 ,  H01L31/153

    摘要： The present invention is directed to a photoconductive switch module. The photoconductive switch module comprises a first substrate having light-emitting elements, and a second substrate having photoconductive switch elements, whose number is equal to that of the light-emitting elements. The light-emitting elements face the photoconductive switch elements, so that the photoconductive switch elements are turned on/off in accordance with lighting/extinction of the light-emitting elements. The photoconductive switch module further comprises a third substrate arranged between the first substrate and the second substrate. The third substrate has through holes, whose number is equal to that of the light-emitting elements. Each through hole is positioned between a light-emitting element and a photoconductive switch element facing each other. Drive light emitted from each light-emitting element travels to the photoconductive switch element via the through hole.

    摘要翻译： 本发明涉及光导开关模块。 光电导开关模块包括具有发光元件的第一基板和具有光导开关元件的第二基板，其数量等于发光元件的数量。 发光元件面对感光开关元件，使得光电开关元件根据发光元件的照明/消光而导通/截止。 光电导开关模块还包括布置在第一基板和第二基板之间的第三基板。 第三基板具有与发光元件的数量相等的通孔。 每个通孔位于彼此面对的发光元件和光电导开关元件之间。 从每个发光元件发出的驱动光通过通孔行进到感光开关元件。

    Surface joined multi-substrate liquid metal switching device
    6.
    发明授权
    Surface joined multi-substrate liquid metal switching device 失效
    表面接合多基板液态金属开关装置

    公开(公告)号：US06872903B2

    公开(公告)日：2005-03-29

    申请号：US10738665

    申请日：2003-12-16

    申请人： Tsutomu Takenaka ,  You Kondoh

    发明人： Tsutomu Takenaka ,  You Kondoh

    IPC分类号： H01H61/01 ,  H01H1/08 ,  H01H29/28 ,  H01H29/30 ,  H01H61/013 ,  H01H29/00

    CPC分类号： H01H29/28 ,  H01H2029/008

    摘要： A device and manufacturing method are provided comprising first and second substrates comprising a main channel provided in at least one of the substrates and a first connecting channel provided in at least one of the substrates and in fluid communication with the main channel. The main channel comprising spaced apart electrodes and filling the main channel at least partially with liquid metal. The method further comprising a first heater substrate comprising a first suspended heater element in fluid communication with the first connecting channel with the first suspended heater element operable to cause a fluid non-conductor to separate the liquid metal and selectively interconnect the electrodes and surface joining the first, second, and first heater substrates.

    摘要翻译： 提供了一种装置和制造方法，包括第一和第二基板，其包括设置在至少一个基板中的主通道和设置在至少一个基板中并与主通道流体连通的第一连接通道。 主通道包括间隔开的电极并且至少部分地用液体金属填充主通道。 该方法还包括第一加热器基板，其包括与第一连接通道流体连通的第一悬挂加热器元件，其中第一悬挂加热器元件可操作以使流体非导体分离液态金属并选择性地将电极和表面连接 第一，第二和第一加热器基板。

    Reticle, semiconductor exposure apparatus and method, and semiconductor device manufacturing method
    9.
    发明申请
    Reticle, semiconductor exposure apparatus and method, and semiconductor device manufacturing method 失效

    公开(公告)号：US20050042525A1

    公开(公告)日：2005-02-24

    申请号：US10886767

    申请日：2004-07-08

    申请人： Tsutomu Takenaka ,  Seiya Miura

    发明人： Tsutomu Takenaka ,  Seiya Miura

    IPC分类号： G03C5/00 ,  G03F1/46 ,  G03F7/22 ,  G03F9/00 ,  H01L21/027

    CPC分类号： G03F7/70941 ,  G03F1/38 ,  G03F1/46

    摘要： The invention disclosed herein concerns technology that ensures, in a projection exposure process using a transmission type reticle, exposure with an even finish size throughout the entire exposure region, without adverse influence of external disturbance light such as back-surface reflection, for example. Specifically, the invention provides a reticle, a semiconductor exposure apparatus and method, and a semiconductor device manufacturing method, wherein a reticle used there includes a pattern region in which a circuit pattern is formed, a light blocking region of a width d formed at an outside periphery of the pattern region, and an anti-reflection film formed on a surface of the reticle remote from the pattern region, wherein the width d of the light blocking film satisfies a relation d ≤ 2 ⁢ t · tan ⁢ { sin - 1 ⁡ ( n 1 n 2 ⁢   ⁢ sin ⁢   ⁢ θ ) } where n1 is a refractive index of a medium at a light entrance side of the reticle, n2 is a refractive index of the reticle, t is a thickness of the reticle, and θ is an incidence angle of light upon the reticle.

    EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
    10.
    发明申请
    EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD 失效
    曝光装置，曝光方法和装置制造方法

    公开(公告)号：US20090066927A1

    公开(公告)日：2009-03-12

    申请号：US12203442

    申请日：2008-09-03

    申请人： Tsutomu Takenaka

    发明人： Tsutomu Takenaka

    IPC分类号： G03B27/54

    CPC分类号： G03B27/54 ,  G03F9/7026 ,  G03F9/7065 ,  G03F9/7088

    摘要： An exposure apparatus comprises an illumination optical system configured to illuminate an original with exposure light from an exposure light source, a projection optical system configured to project a pattern of the original onto a substrate, and a measuring unit configured to measure a relative position between the original and the substrate via the projection optical system using the exposure light as measurement light. The exposure apparatus exposes the substrate using the exposure light with a plurality of wavelengths or a broadband wavelength upon aligning the original and the substrate based on the measurement result obtained by the measuring unit, and the measuring unit switches a wavelength of the exposure light as the measurement light to a specific wavelength or a narrow-band wavelength in measuring the relative position between the original and the substrate.

    摘要翻译： 曝光装置包括照明光学系统，被配置为利用来自曝光光源的曝光光来照射原稿;投影光学系统，被配置为将原稿的图案投影到基板上;以及测量单元，被配置为测量原稿的相对位置 原稿和基板通过投影光学系统使用曝光光作为测量光。 曝光装置基于由测量单元获得的测量结果对准原稿和基板，利用多个波长或宽带波长的曝光光曝光基板，并且测量单元将曝光光的波长切换为 在测量原始和基板之间的相对位置时测量光到特定波长或窄带波长。