Capacitance humidity sensor
    1.
    发明授权
    Capacitance humidity sensor 失效
    电容湿度传感器

    公开(公告)号:US4393434A

    公开(公告)日:1983-07-12

    申请号:US323586

    申请日:1981-11-20

    CPC分类号: G01N27/225 G01R27/2605

    摘要: A capacitance humidity sensor according to the disclosure a non-conductive base plate, electrodes oppositely arranged on the base plate, a metal compound membrane formed by ion-plating independently on the electrodes, the metal compound membrane being roughened on its surface by plasma etching and being active to the humidity, and a moisture permeable metal skin formed on the metal compound membrane. The metal compound is preferably an oxide or nitride of aluminum or magnesium.

    摘要翻译: 根据本发明的电容式湿度传感器是非导电基板,在基板上相对布置的电极,通过在电极上独立地进行离子电镀而形成的金属化合物膜,金属化合物膜通过等离子体蚀刻在其表面上粗糙化, 对湿度有影响,并且在金属化合物膜上形成透湿的金属表皮。 金属化合物优选为铝或镁的氧化物或氮化物。