公开(公告)号：US08835195B2

公开(公告)日：2014-09-16

申请号：US13552721

申请日：2012-07-19

Applicant: Yonglin Xie ,  Weibin Zhang

Inventor： Yonglin Xie ,  Weibin Zhang

IPC: H01L21/00

CPC classification number: B41J2/1601 ,  B41J2/1607 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1645 ,  B81B2201/032 ,  B81B2201/052 ,  B81C1/00158

Abstract: A MEMS device fabrication method includes providing a substrate and a chamber wall material layer on a first surface of the substrate, the chamber wall material layer including a chamber cavity having a sacrificial material located therein. A mask material is deposited on the chamber wall material layer and the sacrificial material and patterned to form a mask pattern including a plurality of discrete portions. The mask material and some of the sacrificial material are removed to transfer the mask pattern including the plurality of discrete portions to the sacrificial material. A membrane material layer is deposited on the chamber wall material layer and the sacrificial material that includes the transferred mask pattern including the plurality of discrete portions. Some of the substrate and the sacrificial material are removed to release the membrane material layer using at least one process initiated from a second surface of the substrate.

Abstract translation: MEMS器件制造方法包括在衬底的第一表面上提供衬底和室壁材料层，室壁材料层包括具有位于其中的牺牲材料的腔室腔。 掩模材料沉积在室壁材料层和牺牲材料上并被图案化以形成包括多个离散部分的掩模图案。 去除掩模材料和一些牺牲材料以将包括多个离散部分的掩模图案转移到牺牲材料。 膜材料层沉积在室壁材料层和牺牲材料上，该牺牲材料包括包含多个离散部分的转印掩模图案。 使用从衬底的第二表面引发的至少一种工艺，去除一些衬底和牺牲材料以释放膜材料层。

公开(公告)号：US20140024147A1

公开(公告)日：2014-01-23

申请号：US13552721

申请日：2012-07-19

Applicant: Yonglin Xie ,  Weibin Zhang

Inventor： Yonglin Xie ,  Weibin Zhang

IPC: H01L21/308

CPC classification number: B41J2/1601 ,  B41J2/1607 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1645 ,  B81B2201/032 ,  B81B2201/052 ,  B81C1/00158

Abstract: A MEMS device fabrication method includes providing a substrate and a chamber wall material layer on a first surface of the substrate, the chamber wall material layer including a chamber cavity having a sacrificial material located therein. A mask material is deposited on the chamber wall material layer and the sacrificial material and patterned to form a mask pattern including a plurality of discrete portions. The mask material and some of the sacrificial material are removed to transfer the mask pattern including the plurality of discrete portions to the sacrificial material. A membrane material layer is deposited on the chamber wall material layer and the sacrificial material that includes the transferred mask pattern including the plurality of discrete portions. Some of the substrate and the sacrificial material are removed to release the membrane material layer using at least one process initiated from a second surface of the substrate.

Abstract translation: MEMS器件制造方法包括在衬底的第一表面上提供衬底和室壁材料层，室壁材料层包括具有位于其中的牺牲材料的腔室腔。 掩模材料沉积在室壁材料层和牺牲材料上并被图案化以形成包括多个离散部分的掩模图案。 去除掩模材料和一些牺牲材料以将包括多个离散部分的掩模图案转移到牺牲材料。 膜材料层沉积在室壁材料层和牺牲材料上，该牺牲材料包括包含多个离散部分的转印掩模图案。 使用从衬底的第二表面引发的至少一种工艺，去除一些衬底和牺牲材料以释放膜材料层。

公开(公告)号：US08919930B2

公开(公告)日：2014-12-30

申请号：US12767836

申请日：2010-04-27

Applicant: Michael F. Baumer ,  Yonglin Xie ,  Ali G. Lopez

Inventor： Michael F. Baumer ,  Yonglin Xie ,  Ali G. Lopez

IPC: B41J2/05 ,  B41J2/03 ,  B41J2/175 ,  B41J2/14

CPC classification number: B41J2/03 ,  B41J2002/031 ,  B41J2002/14403

Abstract: A jetting module includes a nozzle plate, a thermal stimulation membrane, and an enclosure. Portions of the nozzle plate define a nozzle. The thermal stimulation membrane includes a plurality of pores. The enclosure extends from the nozzle towards the thermal stimulation membrane to define a liquid chamber positioned between the nozzle and the thermal stimulation membrane. The liquid chamber is in fluid communication with each of the nozzle and the plurality of pores. The liquid chamber is spanned by a portion of the thermal stimulation membrane. A source provides a liquid under pressure through the thermal stimulation member with the pressure being sufficient to jet a stream of the liquid through the nozzle after the liquid flows through the thermal stimulation membrane.

Abstract translation: 喷射模块包括喷嘴板，热刺激膜和外壳。 喷嘴板的一部分限定一个喷嘴。 该热刺激膜包括多个孔。 外壳从喷嘴延伸到热刺激膜，以限定位于喷嘴和热刺激膜之间的液体室。 液体室与喷嘴和多个孔中的每一个流体连通。 液体室被热刺激膜的一部分所跨越。 源在压力下通过热刺激构件提供液体，其压力足以在液体流过热​​刺激膜之后通过喷嘴喷射液体流。

公开(公告)号：US20140307035A1

公开(公告)日：2014-10-16

申请号：US13860553

申请日：2013-04-11

Applicant: Yonglin Xie ,  Qing Yang ,  John A. Lebens

Inventor： Yonglin Xie ,  Qing Yang ,  John A. Lebens

IPC: B41J2/14

CPC classification number: B41J2/14008 ,  B41J2/02 ,  B41J2/055 ,  B41J2002/14419 ,  B41J2202/13

Abstract: A printhead includes a nozzle plate including a plurality of nozzles and a plurality of liquid chambers. Each liquid chamber is in fluid communication with a respective one of the plurality of nozzles. An acoustic dampening structure includes a plurality of sets of air pockets and liquid flow restrictors. Each liquid chamber is in fluid communication with one of the sets of air pockets and liquid flow restrictors. A common liquid supply manifold is in fluid communication with each liquid chamber through the liquid flow restrictor associated with the liquid chamber.

Abstract translation: 打印头包括具有多个喷嘴和多个液体室的喷嘴板。 每个液体室与多个喷嘴中的相应一个流体连通。 声阻尼结构包括多组气囊和液体流量限制器。 每个液体室与气囊和液体流量限制器中的一组流体连通。 常见的液体供应歧管通过与液体室相关联的液体限流器与每个液体室流体连通。

公开(公告)号：US08806751B2

公开(公告)日：2014-08-19

申请号：US12767828

申请日：2010-04-27

Applicant: Yonglin Xie ,  John A. Lebens ,  Charles F. Faisst

Inventor： Yonglin Xie ,  John A. Lebens ,  Charles F. Faisst

IPC: B21D53/76 ,  B23P17/00

CPC classification number: B41J2/175 ,  B41J2/03 ,  B41J2/09 ,  B41J2/105 ,  B41J2002/031 ,  B41J2002/14403

Abstract: A method of manufacturing a printhead includes providing a substrate and a filter membrane structure. A first portion of the substrate defines a plurality of nozzles and a second portion of the substrate defines a plurality of liquid chambers. Each liquid chamber of the plurality of liquid chambers is in fluid communication with a respective one of the plurality of nozzles. The filter membrane structure is adhered, for example, laminated, to the second portion of the substrate. Each liquid chamber of the plurality of liquid chambers is in fluid communication with a distinct portion of the filter membrane structure. Pores are formed in the filter membrane structure using a photo-lithography process.

Abstract translation: 打印头的制造方法包括提供基板和滤膜结构。 衬底的第一部分限定多个喷嘴，并且衬底的第二部分限定多个液体室。 多个液体室中的每个液体室与多个喷嘴中的相应一个流体连通。 过滤膜结构例如层叠在基板的第二部分上。 多个液体室的每个液体室与过滤膜结构的不同部分流体连通。 使用光刻工艺在滤膜结构中形成孔。

公开(公告)号：US20140022307A1

公开(公告)日：2014-01-23

申请号：US13552743

申请日：2012-07-19

Applicant: Zhanjun Gao ,  Yonglin Xie

Inventor： Zhanjun Gao ,  Yonglin Xie

IPC: B41J2/04

CPC classification number: B41J2/14209 ,  B41J2/14 ,  B41J2002/14346

Abstract: A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. The second chamber is in fluid communication with a liquid supply channel and a liquid return channel. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber from each other. The flexible membrane includes a bimorph actuator that causes the flexible membrane to move from a first position to a second position to eject liquid through the nozzle of the first liquid chamber. In one example embodiment, a liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply during a drop dispensing operation.

Abstract translation: 液体分配器包括第一液体室和第二液体室。 第一液体室包括喷嘴。 第二室与液体供应通道和液体返回通道流体连通。 定位柔性膜以将第一液体室和第二液体室彼此分离并流体密封。 柔性膜包括双压电晶片致动器，其使柔性膜从第一位置移动到第二位置，以将液体喷射通过第一液体室的喷嘴。 在一个示例性实施例中，液体供应提供液体，其在液滴分配操作期间通过液体返回通道从液体供应通过液体供应通道连续流过第二液体室并返回到液体供应。

公开(公告)号：US20140022306A1

公开(公告)日：2014-01-23

申请号：US13552735

申请日：2012-07-19

Applicant: Yonglin Xie ,  Qing Yang

Inventor： Yonglin Xie ,  Qing Yang

IPC: B41J2/04

CPC classification number: B41J2/14064 ,  B41J2002/14177

Abstract: A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. A liquid supply channel is in fluid communication with the second chamber. A liquid return channel is in fluid communication with the second chamber. A heater is associated with the second liquid chamber. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber relative to each other. A liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply.

Abstract translation: 液体分配器包括第一液体室和第二液体室。 第一液体室包括喷嘴。 液体供应通道与第二腔室流体连通。 液体返回通道与第二腔室流体连通。 加热器与第二液体室相连。 定位柔性膜以相对于彼此分离并流体地密封第一液体室和第二液体室。 液体供应提供从液体供应通过液体供应通道通过第二液体室通过液体返回通道连续流动并返回到液体供应的液体。

公开(公告)号：US08632149B2

公开(公告)日：2014-01-21

申请号：US13763630

申请日：2013-02-09

Applicant: Yonglin Xie

Inventor： Yonglin Xie

IPC: B41J29/38 ,  B41J2/205

CPC classification number: B41J2/14 ,  B41J2/07 ,  B41J2/2121 ,  B41J2/2125 ,  B41J2/2128

Abstract: A printhead and a method of ejecting liquid droplets are provided. The method includes providing a printhead operable to eject liquid drops having a plurality of drop volumes Vi, for i equal to 1 through n, where n≧2, with Vj>Vi when j>i. One of the plurality of drop volumes is a minimum drop volume Vmin, and a difference in drop volumes between successively larger drops equals (Vk+1−Vk) which is less than Vmin, for k equal to 1 through n−1. The method also includes ejecting liquid drops through the printhead.

Abstract translation: 提供打印头和喷射液滴的方法。 该方法包括提供打印头，其可操作以喷射具有多个液滴体积的液滴Vi，对于i等于1至n，其中n> = 2，当j> i时，Vj> Vi。 多个液滴体积中的一个是最小液滴体积Vmin，对于k等于1至n-1，连续较大液滴之间的液滴体积差异等于（Vk + 1-Vk）小于Vmin。 该方法还包括将液滴喷射通过打印头。

公开(公告)号：US08328334B2

公开(公告)日：2012-12-11

申请号：US12911750

申请日：2010-10-26

Applicant: Yonglin Xie ,  Joseph Jech, Jr. ,  Qing Yang ,  Carolyn R. Ellinger

Inventor： Yonglin Xie ,  Joseph Jech, Jr. ,  Qing Yang ,  Carolyn R. Ellinger

IPC: B41J2/04

CPC classification number: B41J2/14112 ,  B41J2002/14387 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12

Abstract: Each liquid dispensing element of an array includes liquid supply, dispensing, and return channels positioned on a substrate. The liquid dispensing channel, in communication with the supply and return channels, includes an outlet opening and is associated with a diverter member. Liquid supply and return passages, in communication with liquid supply and return channels, respectively, extend through the substrate. Liquid supply and return ducts of a liquid manifold are in communication with each liquid supply passage and liquid return passage, respectively. Liquid flows from the liquid supply duct through each liquid dispensing element to the liquid return duct. A liquid drop is ejected from the outlet opening of the liquid dispensing channel of one of the liquid dispensing elements by selectively actuating the associated diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract translation: 阵列的每个液体分配元件包括位于基底上的液体供应，分配和返回通道。 与供应和返回通道连通的液体分配通道包括出口开口并与分流器构件相关联。 与液体供应和返回通道分开的液体供应和返回通道分别延伸通过基板。 液体歧管的液体供应和返回管道分别与每个液体供应通道和液体返回通道连通。 液体从液体供应管道通过每个液体分配元件流到液体返回管道。 通过选择性地致动相关联的分流器构件将液滴从其中一个液体分配元件的液体分配通道的出口开口排出，以使一部分流动的液体通过液体分配通道的出口开口。

公开(公告)号：US08308275B2

公开(公告)日：2012-11-13

申请号：US12911776

申请日：2010-10-26

Applicant: Yonglin Xie ,  Qing Yang

Inventor： Yonglin Xie ,  Qing Yang

IPC: B41J2/04

CPC classification number: B41J2/1404 ,  B41J2/1433 ,  B41J2002/14403 ,  B41J2202/12

Abstract: A liquid dispenser includes an array of liquid dispensing elements positioned on a substrate. Each liquid dispensing element includes a liquid dispensing channel positioned on the substrate. The liquid dispensing channel includes an outlet opening positioned on a wall opposite the substrate. A diverter member is associated with the liquid dispensing channel. A liquid return channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply passage extends through the substrate in fluid communication with the liquid supply channel. A liquid return passage extends through the substrate in fluid communication with the liquid return channel. A liquid supply provides liquid that flows from each liquid supply channel through each liquid dispensing element to each liquid return channel. Each diverter member is selectively activated to divert a portion of the liquid flowing through the associated liquid dispensing channel through the outlet opening of the associated liquid dispensing channel to dispense a drop of the liquid.

Abstract translation: 液体分配器包括定位在基底上的液体分配元件阵列。 每个液体分配元件包括位于基底上的液体分配通道。 液体分配通道包括位于与衬底相对的壁上的出口。 分流器构件与液体分配通道相关联。 液体返回通道定位在与液体分配通道流体连通的基板上。 液体供应通道定位在与液体分配通道流体连通的基板上。 液体供应通道延伸穿过衬底与液体供应通道流体连通。 液体返回通道延伸穿过衬底与液体返回通道流体连通。 液体供应源提供从每个液体供应通道流过每个液体分配元件到每个液体返回通道的液体。 选择性地激活每个分流器构件以使流过相关联的液体分配通道的液体的一部分通过相关联的液体分配通道的出口开口转移以分配一滴液体。