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1.再颁专利Rotational stage for high speed, large area scanning in focused beam systems 有权旋转舞台用于高速，大面积扫描聚焦光束系统公开(公告)号：USRE43757E1
公开(公告)日：2012-10-23
申请号：US11824466
申请日：2007-06-28
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20228
摘要： A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
摘要翻译： 一种用于聚焦光束系统中高速图像采集的机械扫描阶段。 机械扫描阶段优选地是四个阶段的组合。 第一阶段提供线性运动。 在第一阶段以上的第二阶段提供旋转定位。 旋转台上方的第三级可在第一线性方向上移动，并且第三级以上的第四级可在与第一方向正交的第二线性方向上定位。 四个阶段响应来自用极坐标像素寻址方法编程的控制器的输入，用于定位安装在机械平台上的样本，以允许施加的静态聚焦光束照射所选择的感兴趣区域，从而通过收集来自样本的信号 使用极坐标像素寻址方法。
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2.发明授权Rotational stage for high speed, large area scanning in focused beam systems 有权旋转舞台用于高速，大面积扫描聚焦光束系统公开(公告)号：US06911656B2
公开(公告)日：2005-06-28
申请号：US10884698
申请日：2004-07-01
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20228
摘要： A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
摘要翻译： 一种用于聚焦光束系统中高速图像采集的机械扫描阶段。 机械扫描阶段优选地是四个阶段的组合。 第一阶段提供线性运动。 在第一阶段以上的第二阶段提供旋转定位。 旋转台上方的第三级可在第一线性方向上移动，并且第三级以上的第四级可在与第一方向正交的第二线性方向上定位。 四个阶段响应来自用极坐标像素寻址方法编程的控制器的输入，用于定位安装在机械平台上的样本，以允许施加的静态聚焦光束照射所选择的感兴趣区域，从而通过收集来自样本的信号 使用极坐标像素寻址方法。
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3.发明授权Rotational stage for high speed, large area scanning in focused beam systems 失效旋转舞台用于高速，大面积扫描聚焦光束系统公开(公告)号：US06777688B2
公开(公告)日：2004-08-17
申请号：US10245865
申请日：2002-09-16
IPC分类号： H01J3720
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20228
摘要： A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
摘要翻译： 一种用于聚焦光束系统中高速图像采集的机械扫描阶段。 机械扫描阶段优选地是四个阶段的组合。 第一阶段提供线性运动。 在第一阶段以上的第二阶段提供旋转定位。 旋转台上方的第三级可在第一线性方向上移动，并且第三级以上的第四级可在与第一方向正交的第二线性方向上定位。 四个阶段响应来自用极坐标像素寻址方法编程的控制器的输入，用于定位安装在机械平台上的样本，以允许施加的静态聚焦光束照射所选择的感兴趣区域，从而通过收集来自样本的信号 使用极坐标像素寻址方法。
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公开(公告)号：US20110304857A1
公开(公告)日：2011-12-15
申请号：US12796940
申请日：2010-06-09
申请人： Yong Yu Liu , Choon Leong Lou , Lai Peng Chew
发明人： Yong Yu Liu , Choon Leong Lou , Lai Peng Chew
CPC分类号： G01N21/01 , G01N21/9501 , G01N21/95607
摘要： One aspect of the present disclosure provides a probing apparatus with on-probe device-mapping function. A probing apparatus according to this aspect of the present disclosure comprises a housing, at least one probe stage positioned on the housing and configured to retain at least one probe, a device holder positioned in the housing and configured to receive at least one semiconductor device under test, and an inspection module having a predetermined field of view configured to capture an image showing at least the semiconductor device, wherein the probe stage includes a driving unit configured to move the probe out of focus of the inspection module in a mapping phase while keeping the device under test in the field of view of the optical inspection module.
摘要翻译： 本公开的一个方面提供了具有探测器设备映射功能的探测设备。 根据本公开的该方面的探测装置包括壳体，至少一个探针台，其定位在壳体上并且被配置为保持至少一个探针，定位在壳体中并被配置为接收至少一个半导体器件的探针台 测试和具有预定视场的检查模块，其被配置为捕获至少显示半导体器件的图像，其中所述探针台包括驱动单元，所述驱动单元被配置为在保持测绘阶段的同时将所述探针离开所述检查模块的焦点 在光学检测模块的视场中被测设备。
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5.发明授权High speed probing apparatus for semiconductor devices and probe stage for the same 有权用于半导体器件和探针台的高速探测装置相同公开(公告)号：US07986157B1
公开(公告)日：2011-07-26
申请号：US12874563
申请日：2010-09-02
申请人： Yong Yu Liu
发明人： Yong Yu Liu
IPC分类号： G01R31/20
CPC分类号： G01R1/07392 , G01R31/2891
摘要： A probing apparatus for semiconductor devices includes a housing configured to define a testing chamber, a device holder positioned in the housing and configured to receive at least one device under test, and at least one probe stage positioned in the housing. In one embodiment of the present disclosure, the probe stage includes a base, a retaining arm pivotally coupled with the base and having a retaining portion configured to retain at least one probe, and a stepper positioned on the base. In one embodiment of the present disclosure, the stepper is configured in response to an electric signal to move the probe downward through the retaining arm to contact a device under test and to move the probe upward through the retaining arm to separate from the device under test such that the up-and-down movement of the probe can be performed at relatively high frequency of typically greater than six cycles per second. In one embodiment of the present disclosure, the stepper further equipped with a contact sensor configured to sense the contact of the probe to the device under test.
摘要翻译： 用于半导体器件的探测装置包括被配置为限定测试室的壳体，位于壳体中并且被配置为容纳至少一个待测器件的器件保持器，以及定位在壳体中的至少一个探针台。 在本公开的一个实施例中，探针台包括基座，保持臂与基座枢转地联接并具有被配置为保持至少一个探针的保持部分和位于基座上的步进器。 在本公开的一个实施例中，步进器被配置为响应于电信号将探针向下移动通过保持臂以接触待测设备并且将探针向上移动通过保持臂以与被测器件分离 使得探针的上下移动可以以通常大于每秒六个周期的相对高的频率执行。 在本公开的一个实施例中，步进器还配备有接触传感器，该接触传感器被配置为感测探针与被测器件的接触。
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公开(公告)号：US08279451B2
公开(公告)日：2012-10-02
申请号：US12796940
申请日：2010-06-09
申请人： Yong Yu Liu , Choon Leong Lou , Lai Peng Chew
发明人： Yong Yu Liu , Choon Leong Lou , Lai Peng Chew
CPC分类号： G01N21/01 , G01N21/9501 , G01N21/95607
摘要： One aspect of the present disclosure provides a probing apparatus with on-probe device-mapping function. A probing apparatus according to this aspect of the present disclosure comprises a housing, at least one probe stage positioned on the housing and configured to retain at least one probe, a device holder positioned in the housing and configured to receive at least one semiconductor device under test, and an inspection module having a predetermined field of view configured to capture an image showing at least the semiconductor device, wherein the probe stage includes a driving unit configured to move the probe out of focus of the inspection module in a mapping phase while keeping the device under test in the field of view of the optical inspection module.
摘要翻译： 本公开的一个方面提供了具有探测器设备映射功能的探测设备。 根据本公开的该方面的探测装置包括壳体，至少一个探针台，其定位在壳体上并且被配置为保持至少一个探针，定位在壳体中并被配置为接收至少一个半导体器件的探针台 测试和具有预定视场的检查模块，其被配置为捕获至少显示半导体器件的图像，其中所述探针台包括驱动单元，所述驱动单元被配置为在保持测绘阶段的同时将所述探针离开所述检查模块的焦点 在光学检测模块的视场中被测设备。
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7.发明申请MICROSCOPE HAVING MULTIPLE IMAGE- OUTPUTTING DEVICES AND PROBING APPARATUS FOR INTEGRATED CIRCUIT DEVICES USING THE SAME 审中-公开具有多个图像输出装置的微型计算机和使用其的集成电路装置的探测装置公开(公告)号：US20090128897A1
公开(公告)日：2009-05-21
申请号：US12015775
申请日：2008-01-17
申请人： Yong Yu Liu , Choon Leong Lou
发明人： Yong Yu Liu , Choon Leong Lou
CPC分类号： G02B21/18 , G02B21/025 , G02B21/06 , H04N7/183
摘要： A microscope comprises an object splitter and a plurality of image-outputting devices configured to receive object images. The object splitter includes a first beam splitter configured to direct an illumination light to an object, a positive lens configured to collect a reflected light from the object and focus the reflected light on the first beam splitter, a second beam splitter configured to split the reflected light into a plurality of optical paths and a plurality of negative lenses positioned on the optical paths to render object images. A probing apparatus for an integrated circuit device comprises at least one probe pin configured to contact a pad of the integrated circuit device and a microscope including an object splitter and a plurality of image-outputting devices configured to receive images from the object splitter.
摘要翻译： 显微镜包括对象分离器和被配置为接收对象图像的多个图像输出装置。 对象分离器包括：第一分束器，其被配置为将照明光引导到物体;正透镜，被配置为收集来自物体的反射光并将反射光聚焦在第一分束器上;第二分束器，被配置为将反射 将光转换成多个光路和位于光路上的多个负透镜以渲染对象图像。 用于集成电路装置的探测装置包括至少一个探针，其被配置为接触集成电路装置的焊盘和包括对象分离器的显微镜和被配置为从对象分离器接收图像的多个图像输出装置。
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8.发明授权Integrated emission microscope for panchromatic imaging, continuous wavelength spectroscopy and selective area spectroscopic mapping 失效用于全色成像，连续波长光谱和选择性区域光谱映射的集成放射显微镜
公开(公告)号：US5724131A
公开(公告)日：1998-03-03
申请号：US511351
申请日：1995-08-04
IPC分类号： H01J37/244 , G01N21/71
CPC分类号： H01J37/244 , H01J37/228 , H01J2237/2445 , H01J2237/2808
摘要： An integrated emission microscope with an emitted radiation detection system for collecting and analyzing radiation from a device under test. A semi-ellipsoidal mirror of high ellipticity directs emitted radiation from the device under test through an aperture to a radiation guide, Which transmits the radiation to spectral analyzer. The device under test may be mounted on a scanning stage. The system permits high spatial resolution selected area spectroscopic analysis, panchromatic imaging, and spectroscopic mapping of the emitted radiation from the device under test.
摘要翻译： 一种具有发射辐射检测系统的集成放射显微镜，用于收集和分析来自被测器件的辐射。 高椭圆率的半椭球镜将被测器件的辐射通过孔径引导到辐射导向器，辐射导向器将辐射传输到光谱分析仪。 被测设备可以安装在扫描台上。 该系统允许高空间分辨率选择的区域光谱分析，全色成像和来自被测器件的发射辐射的光谱映射。
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