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公开(公告)号：US20210202240A1
公开(公告)日：2021-07-01
申请号：US17134783
申请日：2020-12-28
IPC分类号： H01L21/02 , H01L29/16 , H01L27/088 , H01L21/8258 , G02B5/30 , H01L21/3065 , H01L21/027
摘要： Methods for fabricating thin, high-aspect-ratio Ge nanostructures from high-quality, single-crystalline Ge substrates are provided. Also provided are grating structures made using the methods. The methods utilize a thin layer of graphene between a surface of a Ge substrate, and an overlying resist layer. The graphene passivates the surface, preventing the formation of water-soluble native Ge oxides that can result in the lift-off of the resist during the development of the resist.
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公开(公告)号：US09324804B2
公开(公告)日：2016-04-26
申请号：US14222163
申请日：2014-03-21
IPC分类号： H01L29/16 , H01L29/161 , H01L21/18
CPC分类号： H01L29/1606 , H01L21/185 , H01L29/161
摘要： Electrically conductive material structures, analog electronic devices incorporating the structures and methods for making the structures are provided. The structures include a layer of graphene on a semiconductor substrate. The graphene layer and the substrate are separated by an interfacial region that promotes transfer of charge carriers from the surface of the substrate to the graphene.
摘要翻译： 提供了导电材料结构，结合结构的模拟电子装置和用于制造结构的方法。 该结构包括在半导体衬底上的一层石墨烯。 石墨烯层和基底由促进载流子从基底表面转移到石墨烯的界面区域分离。
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公开(公告)号：US12091746B2
公开(公告)日：2024-09-17
申请号：US17507034
申请日：2021-10-21
发明人： Max G. Lagally , Matthew McLean Dwyer , Francesca Cavallo , Daniel Warren van der Weide , Abhishek Bhat
CPC分类号： C23C16/06 , C23C16/04 , H01J9/14 , H01J23/165 , H01J25/44 , H03F3/58 , H01J2209/012
摘要： Traveling-wave tube amplifiers for high-frequency signals, including terahertz signals, and methods for making a slow-wave structure for the traveling-wave tube amplifiers are provided. The slow-wave structures include helical conductors that are self-assembled via the release and relaxation of strained films from a sacrificial growth substrate.
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公开(公告)号：US20210367573A1
公开(公告)日：2021-11-25
申请号：US16882591
申请日：2020-05-25
发明人： Max G. Lagally , Matthew McLean Dwyer , Daniel Warren van der Weide , Abhishek Bhat , Francesca Cavallo , Divya Jyoti Prakash
摘要： Traveling-wave tube amplifiers and methods for making slow-wave structures for the amplifiers are provided. The SWSs include helical conductors that are self-assembled via the release of stressed electrically conductive strips from a sacrificial material. The helical conductors can be electroplated post-self-assembly to fortify the helix, reduce losses, and tailor the dimensions and operating parameters of the helix.
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公开(公告)号：US20190279834A1
公开(公告)日：2019-09-12
申请号：US15918159
申请日：2018-03-12
IPC分类号： H01J25/02
摘要： A self-assembling element fabricated using integrated circuit techniques may provide a small diameter helical conductor surrounding an electron beam for the construction of a vacuum electronic device such as a traveling-wave tube for terahertz scale signal.
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公开(公告)号：US09059335B2
公开(公告)日：2015-06-16
申请号：US13778770
申请日：2013-02-27
CPC分类号： H01L31/00 , H01L21/02381 , H01L21/02532 , H01L29/1606 , H01L49/00
摘要： Electronic devices for the generation of electromagnetic radiation are provided. Also provided are methods for using the devices to generate electromagnetic radiation. The radiation sources include an anisotropic electrically conducting thin film that is characterized by a periodically varying charge carrier mobility in the plane of the film. The periodic variation in carrier mobility gives rise to a spatially varying electric field, which produces electromagnetic radiation as charged particles pass through the film.
摘要翻译： 提供了用于产生电磁辐射的电子装置。 还提供了使用这些装置产生电磁辐射的方法。 辐射源包括各向异性导电薄膜，其特征在于膜的平面中周期性变化的载流子迁移率。 载流子迁移率的周期性变化产生空间变化的电场，当带电粒子通过膜时，电场产生电磁辐射。
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公开(公告)号：US10930490B1
公开(公告)日：2021-02-23
申请号：US16727201
申请日：2019-12-26
IPC分类号： H01L21/02 , H01L21/308 , B82Y20/00 , H01L21/027 , H01L21/3065 , H01L21/8258 , H01L29/16 , H01L27/088 , G02B5/30 , B82Y40/00
摘要： Methods for fabricating thin, high-aspect-ratio Ge nanostructures from high-quality, single-crystalline Ge substrates are provided. Also provided are grating structures made using the methods. The methods utilize a thin layer of graphene between a surface of a Ge substrate, and an overlying resist layer. The graphene passivates the surface, preventing the formation of water-soluble native Ge oxides that can result in the lift-off of the resist during the development of the resist.
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公开(公告)号：US20150270350A1
公开(公告)日：2015-09-24
申请号：US14222163
申请日：2014-03-21
IPC分类号： H01L29/16 , H01L21/18 , H01L29/161
CPC分类号： H01L29/1606 , H01L21/185 , H01L29/161
摘要： Electrically conductive material structures, analog electronic devices incorporating the structures and methods for making the structures are provided. The structures include a layer of graphene on a semiconductor substrate. The graphene layer and the substrate are separated by an interfacial region that promotes transfer of charge carriers from the surface of the substrate to the graphene.
摘要翻译： 提供了导电材料结构，结合结构的模拟电子装置和用于制造结构的方法。 该结构包括在半导体衬底上的一层石墨烯。 石墨烯层和基底由促进载流子从基底表面转移到石墨烯的界面区域分离。
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公开(公告)号：US11201028B2
公开(公告)日：2021-12-14
申请号：US16589348
申请日：2019-10-01
发明人： Max G. Lagally , Matthew McLean Dwyer , Francesca Cavallo , Daniel Warren van der Weide , Abhishek Bhat
摘要： Traveling-wave tube amplifiers for high-frequency signals, including terahertz signals, and methods for making a slow-wave structure for the traveling-wave tube amplifiers are provided. The slow-wave structures include helical conductors that are self-assembled via the release and relaxation of strained films from a sacrificial growth substrate.
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公开(公告)号：US20210099142A1
公开(公告)日：2021-04-01
申请号：US16589348
申请日：2019-10-01
发明人： Max G. Lagally , Matthew McLean Dwyer , Francesca Cavallo , Daniel Warren van der Weide , Abhishek Bhat
摘要： Traveling-wave tube amplifiers for high-frequency signals, including terahertz signals, and methods for making a slow-wave structure for the traveling-wave tube amplifiers are provided. The slow-wave structures include helical conductors that are self-assembled via the release and relaxation of strained films from a sacrificial growth substrate.
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