公开(公告)号：US20170113918A1

公开(公告)日：2017-04-27

申请号：US15293147

申请日：2016-10-13

Applicant: Vmicro ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

Inventor： Benjamin WALTER ,  Marc FAUCHER

IPC: B81B3/00

CPC classification number: B81B3/0045 ,  B81B3/0021 ,  B81B3/0024 ,  B81B3/0086 ,  B81B2201/02 ,  B81B2201/031 ,  B81B2203/0118 ,  G01P15/123 ,  G01Q10/045 ,  G01Q20/04

Abstract: A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.

公开(公告)号：US20210293850A1

公开(公告)日：2021-09-23

申请号：US16325127

申请日：2017-08-01

Applicant: VMICRO ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE ,  UNIVERSITE LILLE-1

Inventor： Benjamin WALTER ,  Marc FAUCHER ,  Estelle MAIRIAUX

IPC: G01Q60/38 ,  G01Q20/02

Abstract: A micromechanical sensor includes a movable micromechanical element and an optical resonator of disk or ring type, wherein the optical resonator has at least one interruption; and in that the movable micromechanical element is mechanically coupled to the optical resonator in such a way that a movement of the movable micromechanical element induces a modification of the width of the interruption of the optical resonator by moving at least one edge of the interruption in a direction substantially parallel to a direction of propagation of the light in the resonator at the interruption.

公开(公告)号：US20180203037A1

公开(公告)日：2018-07-19

申请号：US15744033

申请日：2016-07-12

Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE ,  VMICRO

Inventor： Benjamin WALTER ,  Marc FAUCHER

IPC: G01Q10/04 ,  G01Q70/10 ,  G01Q60/40 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/14 ,  G01Q70/06

Abstract: A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a direction referred to as the longitudinal direction and protrudes from an edge of a substrate in the longitudinal direction, wherein the tip is arranged at one end of a shuttle attached to the substrate at least via a first and via a second structure, which structures are referred to as support structures, at least the first support structure being a flexible structure, extending in a direction referred to as the transverse direction, perpendicular to the longitudinal direction and anchored to the substrate by at least one mechanical linkage in the transverse direction, the support structures being suitable for allowing the shuttle to be displaced in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

公开(公告)号：US20180113149A1

公开(公告)日：2018-04-26

申请号：US15788689

申请日：2017-10-19

Applicant: VMICRO ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE ,  UNIVERSITE LILLE-1

Inventor： Benjamin WALTER ,  Marc FAUCHER ,  Estelle MAIRIAUX-MAGE

IPC: G01Q20/02 ,  G01Q60/38

CPC classification number: G01Q20/02 ,  G01Q10/045 ,  G01Q20/04 ,  G01Q60/38 ,  G01Q70/10

Abstract: A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a longitudinal direction, wherein: the tip is arranged at one end of a sensitive part of the probe, which is movable or deformable and linked to a support structure, which is anchored to the main surface of the substrate; the sensitive portion and the support structure are planar elements, extending mainly in planes that are parallel to the main surface of the substrate; the sensitive portion is linked to the support structure via at least one element allowing the sensitive portion to be displaced or to be extended in this direction; and the tip, the sensitive part and the support structure protrude from an edge of the substrate in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

公开(公告)号：US20220276149A1

公开(公告)日：2022-09-01

申请号：US17310242

申请日：2020-01-27

Applicant: UNIVERSITEIT GENT ,  IMEC VZW ,  VMICRO SAS ,  CNRS ,  ISEN YNCRÉA HAUTS-DE-FRANCE ,  UNIVERSITÉ DE LILLE ,  ECOLE CENTRALE DE LILLE ,  UNIVERSITÉ POLYTECHNIQUE HAUTS-DE-FRANCE

Inventor： Bart KUYKEN ,  Mathias VANWOLLEGHEM ,  Mattias VERSTUYFT ,  Benjamin WALTER ,  Jean-Francois LAMPIN

IPC: G01N21/17

Abstract: An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species in a fluid such that the integrated photoacoustic transducer includes a waveguide structure. The waveguide structure has an optical resonance spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer includes at least one acoustic cavity formed in a portion of the waveguide structure and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity has an acoustic resonance spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion is included in the photoacoustic transducer. The deformable mechanical portion is in direct acoustic communication with the at least one acoustic cavity and has an adjustable mechanical resonance, which can be brought into spectral overlap with an acoustic resonance of the least one acoustic cavity.

公开(公告)号：US20230184809A1

公开(公告)日：2023-06-15

申请号：US17909740

申请日：2020-10-28

Applicant: VMICRO

Inventor： Benjamin WALTER

IPC: G01Q70/16 ,  G01Q70/02 ,  G01Q70/08

CPC classification number: G01Q70/16 ,  G01Q70/02 ,  G01Q70/08

Abstract: A detection device to be inserted in a holder of a scanning probe microscope is provided. The detection device comprises a probe comprising a support, a lever extending from the support, a tip positioned at one end of the lever, opposite from said support. The probe has dimensions that are small in comparison with the holder and the detection device comprises an adapter secured to the probe so as to adapt said probe to fit the holder. The adapter is secured to the probe by bonding comprising at least one adhesive or by assembly comprising a filler material used to secure said adapter to said probe during a brazing operation.