Vacuum pump
    2.
    发明申请
    Vacuum pump 有权
    真空泵

    公开(公告)号:US20090162220A1

    公开(公告)日:2009-06-25

    申请号:US12316292

    申请日:2008-12-11

    IPC分类号: F04D19/04 H02P6/18

    摘要: A vacuum pump having a vacuum pumping mechanism mounted for rotation by a shaft and a brushless motor for rotating the shaft where the vacuum pumping mechanism comprises a turbo pumping mechanism comprising pumping stages, and a molecular drag pumping mechanism comprising at least one pumping stage, and a shaft supported for rotation by bearings, and where the motor comprises a permanent magnet rotor fixed relative to the shaft and the rotor has four poles and a stator has non-overlapping stator coils.

    摘要翻译: 一种真空泵,其具有安装为用于由轴旋转的真空泵机构和用于旋转轴的无刷电动机,其中真空泵送机构包括包括泵送级的涡轮泵送机构,以及包括至少一个泵送级的分子拖动泵送机构,以及 支撑轴承旋转的轴,其中电动机包括相对于轴固定的永磁体转子,转子具有四个极,并且定子具有非重叠的定子线圈。

    Vibration isolator
    3.
    发明授权
    Vibration isolator 有权
    隔振器

    公开(公告)号:US08322694B2

    公开(公告)日:2012-12-04

    申请号:US12311515

    申请日:2007-10-18

    IPC分类号: F16F1/00 F16M13/00 F04B37/14

    摘要: A vibration isolator is described for inhibiting transfer of vibration to an apparatus during evacuation thereof by a pump. The isolator comprising a bellows for isolating from the ambient atmosphere fluid drawn from the apparatus by the pump. A first flange is connected to one end of the bellows for mounting the isolators the apparatus, and a second flange is connected to the other end of the bellows for mounting the isolator to the pump. The bellows surrounds a resilient element, preferably a helical tension spring, which is substantially co-axial with the bellows. The resilient element has a first end located proximate to the first flange and connected to the second flange, and a second end located proximate to the second flange and connected to the first flange.

    摘要翻译: 描述了一种隔振器,用于在通过泵抽空的过程中抑制振动传递给设备。 隔离器包括用于与环境大气隔离的波纹管,由泵从设备抽出的流体。 第一凸缘连接到波纹管的一端,用于将隔离器安装在设备上,第二凸缘连接到波纹管的另一端,用于将隔离器安装到泵上。 波纹管围绕弹性元件,优选地是与波纹管基本上同轴的螺旋拉伸弹簧。 弹性元件具有位于第一凸缘附近并连接到第二凸缘的第一端,以及靠近第二凸缘并连接到第一凸缘的第二端。

    VIBRATION ISOLATOR
    4.
    发明申请
    VIBRATION ISOLATOR 有权
    振动隔离器

    公开(公告)号:US20100065995A1

    公开(公告)日:2010-03-18

    申请号:US12311515

    申请日:2007-10-18

    IPC分类号: F16F15/04

    摘要: A vibration isolator is described for inhibiting transfer of vibration to an apparatus during evacuation thereof by a pump. The isolator comprising a bellows for isolating from the ambient atmosphere fluid drawn from the apparatus by the pump. A first flange is connected to one end of the bellows for mounting the isolators the apparatus, and a second flange is connected to the other end of the bellows for mounting the isolator to the pump. The bellows surrounds a resilient element, preferably a helical tension spring, which is substantially co-axial with the bellows. The resilient element has a first end located proximate to the first flange and connected to the second flange, and a second end located proximate to the second flange and connected to the first flange.

    摘要翻译: 描述了一种隔振器,用于在通过泵抽空的过程中抑制振动传递给设备。 隔离器包括用于与环境大气隔离的波纹管,由泵从设备抽出的流体。 第一凸缘连接到波纹管的一端,用于将隔离器安装在设备上,第二凸缘连接到波纹管的另一端,用于将隔离器安装到泵上。 波纹管围绕弹性元件,优选地是与波纹管基本上同轴的螺旋拉伸弹簧。 弹性元件具有位于第一凸缘附近并连接到第二凸缘的第一端,以及靠近第二凸缘并连接到第一凸缘的第二端。

    Magnetic bearing assembly formed by measuring first and second order transverse stray magnetic fields
    5.
    发明授权
    Magnetic bearing assembly formed by measuring first and second order transverse stray magnetic fields 有权
    通过测量第一和第二级横向杂散磁场形成的磁性轴承组件

    公开(公告)号:US09464667B2

    公开(公告)日:2016-10-11

    申请号:US14112457

    申请日:2012-05-04

    摘要: Stray magnetic fields created by non-symmetrical magnetisation of the permanent magnets in a rotating magnet array of a magnetic bearing assembly, when used in turbo molecular pumps, can cause significant problems to devices such as scanning electron microscopes. In order to minimise the stray fields, at least the dipole and quadrupole moments of each magnet in the array is first measured. The magnets in the array are then arranged relative to one another such that both the dipole and quadrupole moments are minimised, thus minimising the stray magnetic field when the magnet array rotates in the turbomolecular pump.

    摘要翻译: 在涡轮分子泵中使用的磁轴承组件的旋转磁体阵列中的永磁体的非对称磁化产生的杂散磁场可能对诸如扫描电子显微镜的装置造成重大问题。 为了最小化杂散场,首先测量阵列中每个磁体的至少偶极和四极矩。 然后阵列中的磁体相对于彼此布置,使得偶极子和四极矩都被最小化,从而当磁体阵列在涡轮分子泵中旋转时最小化杂散磁场。

    VACUUM PUMP
    6.
    发明申请
    VACUUM PUMP 有权
    真空泵

    公开(公告)号:US20100296917A1

    公开(公告)日:2010-11-25

    申请号:US12663475

    申请日:2008-06-30

    IPC分类号: F04D29/08

    摘要: A vacuum pump (50) comprises a casing and a rotor located in the casing, the rotor comprising a shaft (52) supported by a bearing arrangement (64, 66) for rotation relative to the casing. A lubricant reservoir (82) is provided for storing lubricant for lubricating a rolling bearing (64) of the bearing arrangement, and a brush (84) comprising a set of bristles (86) held by the reservoir transfers lubricant from the reservoir to the rotor.

    摘要翻译: 真空泵(50)包括壳体和位于壳体中的转子,转子包括由轴承装置(64,66)支撑的轴(52),用于相对于壳体旋转。 提供润滑剂储存器(82),用于储存用于润滑轴承装置的滚动轴承(64)的润滑剂,并且包括由储存器保持的一组刷毛(86)的刷子(84)将润滑剂从储存器转移到转子 。