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公开(公告)号：US20210293730A1
公开(公告)日：2021-09-23
申请号：US16908982
申请日：2020-06-23
发明人： KE ZHANG , KAI-LI JIANG , SHOU-SHAN FAN
IPC分类号： G01N23/2251
摘要： A method for measuring secondary electron emission coefficient comprising: providing a device including a first collecting plate and a second collecting plate, and measuring an injection current. Short-circuiting the first collecting plate and the second collecting plate; placing a sample and applying a 50 volt positive voltage between the sample and the first collecting plate, ISE is 0; measuring a current I1 between the sample and the first collecting plate, and ignoring IBG1; and according to formula I1=IBG1+Iothers+ISE, obtaining a current of other electrons. Applying a positive voltage between the first collecting plate and the sample; measuring a current I2 between the first collecting plate and the sample, and ignoring IBG2; and obtaining ISE formed by the secondary electrons according to formula I2=IBG2+Iothers+ISE. Obtaining the secondary electron emission coefficient according to formula δ = I SE I injection current .
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公开(公告)号：US20220196854A1
公开(公告)日：2022-06-23
申请号：US17225721
申请日：2021-04-08
发明人： KE ZHANG , GUO CHEN , PENG LIU , KAI-LI JIANG , SHOU-SHAN FAN
摘要： An electron blackbody material is provided. The electron blackbody material is a porous carbon layer. The porous carbon layer consists of a plurality of carbon material particles and a plurality of micro gaps, the plurality of micro gaps are located between the plurality of carbon material particles. An electron detector using the electron blackbody material is also provided.
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公开(公告)号：US20220397498A1
公开(公告)日：2022-12-15
申请号：US17679646
申请日：2022-02-24
发明人： XIN-YU GAO , GUO CHEN , KE ZHANG , LIN CONG , KAI-LI JIANG , SHOU-SHAN FAN
IPC分类号： G01N1/36 , H01J37/28 , H01J37/244 , C01B32/168
摘要： A method for processing scanning electron microscope specimen is provided. The method comprises: providing a specimen to be observed; providing a carbon nanotube array comprising a plurality of carbon nanotubes; and pulling a carbon nanotube film from the carbon nanotube array, and laying the carbon nanotube film on a surface of the specimen, wherein the carbon nanotube film comprising a plurality of through holes.
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公开(公告)号：US20210293731A1
公开(公告)日：2021-09-23
申请号：US16908987
申请日：2020-06-23
发明人： KE ZHANG , KAI-LI JIANG , SHOU-SHAN FAN
IPC分类号： G01N23/2251
摘要： A device for measuring a secondary electron emission coefficient comprises a scanning electron microscope, a first collecting plate, a second collecting plate, a first galvanometer, a second galvanometer, a voltmeter, and a Faraday cup. The scanning electron microscope comprises an electron emitter and a chamber. A sample is located between the first collecting plate and the second collecting plate. The first galvanometer is used to test a current intensity of electrons escaping from the sample and hitting the first collecting plate and the second collecting plate. A high-energy electron beam emitted by the electron emitter passes through the first collecting plate and the second collecting plate, and enters the Faraday cup. The second galvanometer is used to test a current intensity of electrons entering the Faraday cup.
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公开(公告)号：US20200013972A1
公开(公告)日：2020-01-09
申请号：US16448086
申请日：2019-06-21
发明人： KE ZHANG , YANG WEI , SHOU-SHAN FAN
摘要： The present invention relates to a semiconductor structure. The semiconductor structure comprises a semiconductor layer, at least one metallic carbon nanotube, and at least one graphene layer. The semiconductor layer defines a first surface and a second surface opposite to the first surface. The at least one metallic carbon nanotube is located on the first surface of the semiconductor layer. The at least one graphene layer is located on the second surface of the semiconductor layer. The at least one metallic carbon nanotube, the semiconductor layer and the at least one graphene layer are stacked with each other to form at least one three-layered stereoscopic structure. The present invention also relates a semiconductor device, and a photodetector.
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公开(公告)号：US20220199279A1
公开(公告)日：2022-06-23
申请号：US17225702
申请日：2021-04-08
发明人： KE ZHANG , GUO CHEN , PENG LIU , KAI-LI JIANG , SHOU-SHAN FAN
IPC分类号： G21K1/10
摘要： A electronic blackbody cavity is provided. The electronic blackbody cavity comprises an inner surface; a chamber surrounded by the inner surface; an opening configured to make an electron beam enter the chamber; and a porous carbon material layer located on the inner surface. The porous carbon material layer consists of a plurality of carbon material particles and a plurality of micro gaps. The plurality of micro gaps are defined by the plurality of carbon material particles. A secondary electron detection device using the electronic blackbody cavity is also provided.
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公开(公告)号：US20210214226A1
公开(公告)日：2021-07-15
申请号：US16910378
申请日：2020-06-24
发明人： KE ZHANG , YUAN-QI WEI , KAI-LI JIANG , SHOU-SHAN FAN
IPC分类号： C01B32/16 , H01L21/02 , H01L21/306
摘要： A method for obtaining metallic carbon nanotubes is provided. An insulating substrate comprising hollow portions and non-hollow portions is provided. A plurality of electrodes is formed on a surface of the non-hollow portions. A plurality of carbon nanotubes is formed on a surface of the insulating substrate, and the carbon nanotubes stretch across the hollow portions. The insulating substrate, the plurality of electrodes and the carbon nanotubes are placed into a cavity, and the cavity is evacuated. A voltage is applied between any two electrodes, and photos of carbon nanotubes suspended between the two electrodes are taken. In the photo, darker ones are semiconducting carbon nanotubes, and brighter ones are metallic carbon nanotubes. Finally, the semiconducting carbon nanotubes are removed.
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公开(公告)号：US20190245484A1
公开(公告)日：2019-08-08
申请号：US16249308
申请日：2019-01-16
发明人： KE ZHANG , YANG WEI , SHOU-SHAN FAN
CPC分类号： H02S50/15 , G01R13/347 , G01R19/0092
摘要： A photocurrent scanning system comprises a laser generating device, a focusing device, a displacement adjustment device, a bias supply device, and a measuring device. The laser generating device is used to emit a laser. The focusing device is used to focus the laser to a surface of a sample. The displacement adjustment device is used to place the sample and adjust a position of the sample, to make the laser focused onto different parts of the surface of the sample. The bias supply device is used to supply a voltage to the sample. The measuring device is used to measure a photocurrent signal flowing through the sample.
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公开(公告)号：US20220392732A1
公开(公告)日：2022-12-08
申请号：US17679652
申请日：2022-02-24
发明人： XIN-YU GAO , GUO CHEN , KE ZHANG , LIN CONG , KAI-LI JIANG , SHOU-SHAN FAN
IPC分类号： H01J37/09
摘要： A method for processing scanning electron microscope specimen is provided. The method comprises: providing a specimen to be observed; providing a carbon nanotube array comprising a plurality of carbon nanotubes; and pulling a carbon nanotube film from the carbon nanotube array, and laying the carbon nanotube film on a surface of the specimen, wherein the carbon nanotube film comprising a plurality of through holes.
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公开(公告)号：US20220199361A1
公开(公告)日：2022-06-23
申请号：US17225707
申请日：2021-04-08
发明人： KE ZHANG , GUO CHEN , PENG LIU , KAI-LI JIANG , SHOU-SHAN FAN
IPC分类号： H01J37/28 , H01J37/244
摘要： A secondary electron probe is provided. The secondary electron probe comprises a porous carbon material layer. The porous carbon material layer consists of a plurality of carbon material particles and a plurality of micro gaps, the plurality of micro gaps are located between the plurality of carbon material particles. The porous carbon material layer is an electronic blackbody. A secondary electron detector and a scanning electron microscope probe using the secondary electron probe are also provided.
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