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公开(公告)号：US5668673A
公开(公告)日：1997-09-16
申请号：US456624
申请日：1995-06-01
CPC分类号： G02B17/0828 , G02B17/0892 , G03F7/70225
摘要： A first partial optical system including a first group of lenses having a positive refractive power, a first concave reflection mirror and a second group of lenses having a positive refractive power, for forming a primary reduced image of an object, a second partial optical system including a second concave reelection mirror and a third group of lenses having a positive refractive power, for further reducing the primary reduced image and refocusing it, and a reflection mirror arranged between the first partial optical system and the second partial optical system, for deflecting a light path are arranged in a sequence as viewed from the object. A good image-forming ability as a projection optical system for fabricating a semiconductor device is attained with a simple construction.
摘要翻译： 第一部分光学系统，包括具有正屈光力的第一组透镜，第一凹面反射镜和具有正折光力的第二组透镜，用于形成物体的初级缩小图像;第二部分光学系统，包括 具有正折射力的第二凹面重选镜和第三组透镜，用于进一步减小初级缩小图像并重新聚焦;以及反射镜，布置在第一部分光学系统和第二部分光学系统之间，用于偏转光 路径按照从对象观察的顺序排列。 作为用于制造半导体器件的投影光学系统，具有良好的成像能力，结构简单。
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公开(公告)号：US5592329A
公开(公告)日：1997-01-07
申请号：US187484
申请日：1994-01-28
申请人： Toshiro Ishiyama , Yutaka Suenaga
发明人： Toshiro Ishiyama , Yutaka Suenaga
CPC分类号： G02B17/0844 , G02B17/0812 , G02B17/0828 , G02B17/0892 , G03F7/70225
摘要： A catadioptric optical system includes, in succession from the object side, a first partial optical system having positive refractive power and for forming the primary image of an object, and a second partial optical system having positive refractive power and for forming a secondary image by light from the primary image, and at least one aperture stop may be provided in the optical path of the first partial optical system and at least one aperture stop may be provided in the optical path of the second partial optical system.
摘要翻译： 反射折射光学系统从物体侧连续地包括具有正折光力并用于形成物体的主图像的第一部分光学系统和具有正屈光力的第二部分光学系统，并且用于通过光形成二次图像 并且可以在第一部分光学系统的光路中设置至少一个孔径光阑，并且可以在第二部分光学系统的光路中设置至少一个孔径光阑。
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3.发明授权Catadioptric reduction projection optical system and exposure apparatus employing the same 失效折反射折射投影光学系统和采用其的曝光装置
公开(公告)号：US5694241A
公开(公告)日：1997-12-02
申请号：US577280
申请日：1995-12-22
申请人： Toshiro Ishiyama , Yutaka Suenaga
发明人： Toshiro Ishiyama , Yutaka Suenaga
IPC分类号： G02B17/08 , G03F7/20 , H01L21/027 , G02B17/00 , G02B21/00
CPC分类号： G02B17/0892 , G02B17/08 , G03F7/70225 , G03F7/70275
摘要： A catadioptric reduction projection optical system having a structure capable of increasing a numerical aperture without increasing the size of a beam splitter and achieves excellent performance of a semiconductor manufacturing apparatus. The catadioptric reduction projection optical system comprises a first partial optical system having a first lens group, the beam splitter, a lens element, and a concave reflecting mirror to form an intermediate image of a first object, a second partial optical system for forming a reduced image of the intermediate image on a second object, the second partial optical system having a second lens group of a positive refracting power and arranged in an optical path between a second object surface and a surface on which the intermediate image is formed, and a third lens group arranged in an optical path between the beam splitter and the third lens group. The first lens group is arranged in an optical path between the first object and the beam splitter. Light from the first object guided to the concave reflecting mirror through the first lens group, the beam splitter, and the second lens group in the order named. Light reflected by the concave reflecting mirror passes through the second lens group and the beam splitter in the order named and is guided to the surface on which the intermediate image is formed. At least a part of the fourth lens group is arranged in an optical path between the beam splitter and the surface.
摘要翻译： 一种反折射减小投影光学系统，其具有能够增加数值孔径而不增加分束器的尺寸并且实现半导体制造装置的优异性能的结构。 折反射折射投影光学系统包括具有第一透镜组，分束器，透镜元件和凹面反射镜的第一部分光学系统，以形成第一物体的中间图像;第二部分光学系统，用于形成缩小的 中间图像在第二物体上的图像，第二部分光学系统具有正折射率的第二透镜组，并且布置在第二物体表面和形成有中间图像的表面之间的光路中，并且第三透镜组 透镜组布置在分束器和第三透镜组之间的光路中。 第一透镜组布置在第一物体和分束器之间的光路中。 来自第一物体的光通过第一透镜组，分束器和第二透镜组以指定的顺序被引导到凹面反射镜。 由凹面反射镜反射的光以指定的顺序通过第二透镜组和分束器，并被引导到其上形成中间图像的表面。 第四透镜组的至少一部分被布置在分束器和表面之间的光路中。
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公开(公告)号：US5477388A
公开(公告)日：1995-12-19
申请号：US200459
申请日：1994-02-23
CPC分类号： G02B15/161
摘要： An inverse telescopic wide angle lens comprises a diaphragm; a front lens group of an integral positive or negative refractive power, positioned in the object side in front of the diaphragm and having a first lens group of a negative refractive power including a negative lens of which an image-side air-contacting surface is formed as an aspherical surface concave to the image side, and a second lens group of a positive refractive power positioned between the first lens group and the diaphragm; and a rear lens group of an integral positive refractive power, positioned behind the diaphragm and having plural lenses. The negative lens in the first lens group is so constructed that the absolute value of the refractive power of the concave surface on the optical axis is larger than that of the refractive power of the surface at the object side on the optical axis, that the curvature of the concave surface decreases monotonously with the distance from the optical axis, and that the form of the concave surface of the negative lens at the image side satisfies a particular condition. The effective diameter of the lens closest to the object in the first lens group is so constructed as to satisfy a particular condition.
摘要翻译： 反伸缩广角镜头包括隔膜; 位于隔膜前方的物体侧的具有整体的正或负折射光焦度的前透镜组，并且具有包括形成有图像侧空气接触表面的负透镜的负折射光焦度的第一透镜组 作为朝向像侧凹入的非球面，以及位于第一透镜组和隔膜之间的正折光力的第二透镜组; 以及位于隔膜后面并具有多个透镜的整体正屈光力的后透镜组。 第一透镜组中的负透镜被构造成使得光轴上的凹面的折射力的绝对值大于在光轴上的物体侧的表面的屈光力的绝对值，曲率 凹面的距离与光轴的距离单调减小，负透镜在像侧的凹面的形状满足特定条件。 第一透镜组中最靠近物体的透镜的有效直径被构造成满足特定条件。
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5.发明申请公开(公告)号：US20110032608A1
公开(公告)日：2011-02-10
申请号：US12920662
申请日：2009-03-05
申请人： Yutaka Suenaga
发明人： Yutaka Suenaga
摘要： In order to furnish an optical component and a phase contrast microscope which can indicate difference of phases of a specimen including information of frequency and color, at least two optical mediums are arranged side by side so that a constant difference of the phases is generated.
摘要翻译： 为了提供可以指示包括频率和颜色的信息的样本的相位差的光学部件和相差显微镜，至少两个光学介质并排布置，从而产生恒定的相位差。
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6.发明授权Catoptric reduction projection optical system and exposure apparatus and method using same 失效缩小投影光学系统和曝光装置及其使用方法公开(公告)号：US06302548B2
公开(公告)日：2001-10-16
申请号：US09760891
申请日：2001-01-17
申请人： Tomowaki Takahashi , Yutaka Suenaga
发明人： Tomowaki Takahashi , Yutaka Suenaga
IPC分类号： G02B510
CPC分类号： G03F7/70058 , G02B17/0657 , G03F7/70233 , G03F7/7025 , G03F7/70275
摘要： A catoptric reduction projection optical system (5) is provided with a first catoptric optical system (10) that images an object (R) in first (object) plane (OP) into a second plane (12) and forming an intermediate image (II) therein, and a second catoptric optical system (20) that images the intermediate image in the second plane onto a third (image) plane (IP), thereby forming a reduced image of the object in the first (object) plane onto the third (image) plane. The first catoptric optical system comprises a first mirror pair comprising two reflective mirrors (M1, M2). The second catoptric optical system comprises a second mirror pair comprising a convex mirror (M3) and a concave mirror (M4). The system also preferably satisfied a number of design conditions.
摘要翻译： 折射减少投影光学系统（5）设置有将第一（物体）平面（OP）中的物体（R）成像为第二平面（12）并形成中间图像（II）的第一反射光学系统（10） ）和第二反射光学系统（20），其将第二平面中的中间图像成像到第三（图像）平面（IP）上，从而在第一（对象）平面中形成对象的缩小图像到第三 （图像）飞机。 第一反射光学系统包括包括两个反射镜（M1，M2）的第一镜对。 第二反射光学系统包括包括凸面镜（M3）和凹面镜（M4）的第二镜对。 该系统还优选地满足多个设计条件。
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公开(公告)号：US6084723A
公开(公告)日：2000-07-04
申请号：US705079
申请日：1996-08-29
CPC分类号： G03F7/70216 , G02B13/14 , G02B13/143 , G02B13/22
摘要： The present invention relates to an exposure apparatus having a high-performance projection optical system having a relatively large numerical aperture and achieving bitelecentricity and superior correction of aberrations, particularly distortion, in a very wide exposure area. Particularly, the protection optical system according to the present invention is composed of a first lens group G.sub.1 with a positive refracting power, a second lens group G.sub.2 with a negative refracting power, a third lens group G.sub.3 with a positive refracting power, a fourth lens group G.sub.4 with a negative refracting power, and a fifth lens group G.sub.5 with a positive refracting power in order from the side of a first object R. The present invention is directed to finding of suitable ranges of focal lengths for the first to fifth lens groups G.sub.1 -G.sub.5, based on the above arrangement.
摘要翻译： 本发明涉及具有相当大的数值孔径的高性能投影光学系统的曝光装置，并且在非常宽的曝光区域中实现了偏心度和卓越的像差校正，特别是畸变。 特别地，根据本发明的保护光学系统由具有正折射力的第一透镜组G1，具有负折射力的第二透镜组G2，具有正折射力的第三透镜组G3，第四透镜 具有负折射率的组G4和从第一对象R侧起依次具有正折射率的第五透镜组G5.本发明旨在找到第一至第五透镜组的适合的焦距范围 G1-G5，基于上述安排。
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8.发明授权
公开(公告)号：US5940220A
公开(公告)日：1999-08-17
申请号：US958748
申请日：1997-10-31
申请人： Yutaka Suenaga , Masayuki Mizusawa
发明人： Yutaka Suenaga , Masayuki Mizusawa
CPC分类号： G02B27/0068 , G02B21/02
摘要： Microscope objective lenses are disclosed that comprise an axially movable second lens group for correcting aberrations that arise with changes in the thickness of a cover glass or other transparent body situated between the specimen and the objective lens. An objective lens according to one aspect of the invention comprises, in order from the specimen side, first, second, third, and fourth lens groups. The first lens group is positive and comprises a negative lens cemented to a positive lens, the positive lens having a convex surface facing the specimen side. The second lens group is positive and comprises a cemented lens having a cemented surface having negative refractive power. The third lens group is positive and causes a ray bundle from the specimen, propagating divergently from the specimen, to converge toward the optical axis. The fourth lens group is negative and comprises a positive lens cemented to a negative lens, the negative lens having a concave surface facing the image side. Moving the second lens group on the optical axis allows correction of aberrations imparted by a transparent body between the specimen and the objective lens. The objective lens satisfies one or more conditional expressions.
摘要翻译： 公开了一种显微镜物镜，其包括可轴向移动的第二透镜组，用于校正由位于样本和物镜之间的覆盖玻璃或其它透明体的厚度变化而产生的像差。 根据本发明的一个方面的物镜，从样本侧起依次包括第一，第二，第三和第四透镜组。 第一透镜组是正的并且包括胶合到正透镜的负透镜，正透镜具有面向样本侧的凸面。 第二透镜组是正的，并且包括具有负屈光力的胶合表面的胶合透镜。 第三透镜组是正的并且引起来自试样的光束，从试样分散地传播，朝向光轴会聚。 第四透镜组是负的并且包括胶合到负透镜的正透镜，负透镜具有面向图像侧的凹面。 在光轴上移动第二透镜组允许校正由样本和物镜之间的透明体赋予的像差。 物镜满足一个或多个条件表达式。
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公开(公告)号：US5781278A
公开(公告)日：1998-07-14
申请号：US901681
申请日：1997-07-28
CPC分类号： G03F7/70216 , G02B13/22
摘要： The present invention relates to a both-side telecentric projection optical system and an exposure apparatus equipped with this projection optical system. In particular, the projection optical system has a structure for quite favorably correcting various kinds of aberration such as distortion in particular, while securing a relatively broad exposure area and a large numerical aperture.
摘要翻译： 本发明涉及一种双侧远心投影光学系统和配备该投影光学系统的曝光装置。 特别地，投影光学系统具有在确保相对宽的曝光面积和大的数值孔径的同时特别地适当地校正诸如失真的各种像差的结构。
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公开(公告)号：US5712735A
公开(公告)日：1998-01-27
申请号：US670660
申请日：1996-06-26
申请人： Sumio Hashimoto , Yutaka Suenaga , Yutaka Ichihara
发明人： Sumio Hashimoto , Yutaka Suenaga , Yutaka Ichihara
CPC分类号： G02B17/08 , G02B17/0892 , G03F7/70225 , G03F7/70358 , G03F7/70566
摘要： A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.
摘要翻译： 一种反折射减小投影光学系统，具有具有负屈光力的第一透镜单元和来自光罩的光束，用于透射来自第一透镜单元的光束的棱镜型分束器，用于使光束返回的凹面反射镜 从分束器到分束器的同时会聚;以及第二透镜单元，其具有正折光力并且会聚返回到分束器并由分束器反射的光束，并且在分划板上形成图案的缩小图像 在晶圆上。
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