Lighting apparatus
    3.
    发明授权
    Lighting apparatus 失效
    照明设备

    公开(公告)号:US08482014B2

    公开(公告)日:2013-07-09

    申请号:US12582721

    申请日:2009-10-21

    Abstract: A lighting apparatus is provided with a plurality of light-emitting devices, a substrate, a blind member, and a reflector. The reflector is formed with a plurality of reflective surfaces corresponding to the light-emitting devices, individually. The shielding angle at which light emitted from that one of the light-emitting devices which is located on the outermost periphery is intercepted by the reflective surface corresponding to the outermost light-emitting device is greater than shielding angles at which light emitted from the light-emitting devices located inside the outermost light-emitting device is intercepted by the reflective surfaces corresponding to the inside light-emitting devices.

    Abstract translation: 照明装置设置有多个发光装置,基板,遮光部件和反射板。 反射器分别形成有与发光装置对应的多个反射面。 从位于最外侧的发光装置的一个发光装置发出的光被与最外侧的发光装置对应的反射面截取的遮蔽角度大于从发光装置发出的光的遮蔽角度, 位于最外侧的发光装置内的发光装置被对应于内部发光装置的反射面截取。

    Projection-exposure apparatus and method exhibiting reduced solarization
and radiation compaction
    6.
    发明授权
    Projection-exposure apparatus and method exhibiting reduced solarization and radiation compaction 失效
    投影曝光装置和减少日晒和辐射压实的方法

    公开(公告)号:US5880817A

    公开(公告)日:1999-03-09

    申请号:US760871

    申请日:1996-12-09

    Inventor: Sumio Hashimoto

    CPC classification number: G03F7/70041 G03F7/7005 G03F7/70241

    Abstract: Apparatus and methods for suppressing degradations in the transmissivity and refractive index of lenses used in an exposure unit of a projection-exposure apparatus in which a high-energy pulsed beam of light (such as an excimer laser) is used for the projection exposure. Pulsed-light beams from multiple pulsed-light sources are provided, the pulsed-light beams each having the same wavelength, pulse frequency P.sub.0, and fluence F.sub.0 but being phase-shifted relative to each other. The pulsed-light beams are each split by a beam splitter and integrated to produce at least one integrated light beam having a pulse frequency of P.sub.0 times the number of pulsed-light beams that are integrated but a fluence per pulse of F.sub.0 divided by the number of pulsed-light beams that are integrated. The integrated light beam is passed through the exposure unit. Multiple such integrated light beams can be produced, each propagating to a separate exposure unit.

    Abstract translation: 用于抑制投影曝光中使用高能量脉冲光束(例如准分子激光)的投影曝光装置的曝光单元中使用的透镜的透射率和折射率的降低的装置和方法。 提供来自多个脉冲光源的脉冲光束,脉冲光束各自具有相同的波长,脉冲频率P0和注量F0,但相对于彼此相移。 脉冲光束每个被分束器分开,并被集成以产生至少一个积分光束,其具有的脉冲频率为整数的脉冲光束的数量P0,而每个脉冲F0的注量除以数字 的集成的脉冲光束。 集成光束通过曝光单元。 可以产生多个这样的集成光束,每个传播到单独的曝光单元。

    Catadioptric reduction projection optical system
    8.
    发明授权
    Catadioptric reduction projection optical system 失效
    反射折射减光投影光学系统

    公开(公告)号:US5289312A

    公开(公告)日:1994-02-22

    申请号:US948327

    申请日:1992-09-22

    CPC classification number: G02B17/0892 G02B17/08 G03F7/70225

    Abstract: A catadioptric reduction projection optical system is of a construction in which an on-axis light beam is used in a catadioptric system, and is designed such that resolving power is not deteriorated and a stop can be disposed. The catadioptric reduction projection optical system has a first lens unit G1 having negative refractive power and diffusing a light beam from a reticle 1, a semi-transparent mirror 2 for transmitting therethrough or reflecting the light beam from the first lens unit G1, a second lens unit G2 having negative refractive power and widening the light beam reflected from the semi-transparent mirror 2, a concave reflecting mirror 4 for returning the light beam from the second lens unit G2 to the semi-transparent mirror 2 through the second lens unit G2 while converging that light beam, a third lens unit G3 having positive refractive power and converging the light beam returned to and transmitted through the semi-transmitted mirror 2 on a wafer 5, and a stop 6 disposed between the semi-transparent mirror 2 and the third lens unit G3.

    Abstract translation: 折反射折射投影光学系统是在反射折射系统中使用轴上光束的结构,并且被设计成使分辨能力不劣化并且可以设置停止。 折反射折射投影光学系统具有第一透镜单元G1,该第一透镜单元G1具有负折光力并且扩散来自标线片1的光束,用于透射的半透明反射镜2或反射来自第一透镜单元G1的光束;第二透镜 具有负屈光力并扩大从半透明反射镜2反射的光束的单元G2,用于将来自第二透镜单元G2的光束通过第二透镜单元G2将光束返回到半透明反射镜2的凹面反射镜4, 会聚该光束,具有正折光力的第三透镜单元G3,并且使通过半透射反射镜2返回并透射到晶片5的光束会聚;以及设置在半透明反射镜2和第三透镜 镜头单元G3。

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