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    MEMS TRANSDUCER DEVICE HAVING STRESS MITIGATION STRUCTURE AND METHOD OF FABRICATING THE SAME
    2.
    发明申请
    MEMS TRANSDUCER DEVICE HAVING STRESS MITIGATION STRUCTURE AND METHOD OF FABRICATING THE SAME 审中-公开
    具有应力缓解结构的MEMS传感器装置及其制造方法

    公开(公告)号：US20120025337A1

    公开(公告)日：2012-02-02

    申请号：US12844857

    申请日：2010-07-28

    Applicant: Timothy LECLAIR ,  David MARTIN

    Inventor： Timothy LECLAIR ,  David MARTIN

    IPC: H01L29/84 ,  H01L21/30

    CPC classification number: B81B7/0048

    Abstract: A micro-electromechanical systems (MEMS) transducer device mounted to a package substrate includes an active transducer having a resonator stack formed over a cavity through a transducer substrate, and a stress mitigation structure between the transducer substrate and the package substrate. The stress mitigation structure reduces stress induced on the transducer substrate due to mismatched coefficients of thermal expansion (CTEs) of the transducer substrate and the package substrate, respectively.

    Abstract translation: 安装到封装衬底的微机电系统（MEMS）传感器装置包括一个有源换能器，该有源换能器具有通过换能器基板在空腔上形成的谐振器叠层，以及在换能器基板和封装基板之间的应力消除结构。 应力减轻结构分别由于换能器基板和封装基板的热膨胀系数（CTE）分别减小了在换能器基板上的应力。

    MICROCAP ACOUSTIC TRANSDUCER DEVICE
    3.
    发明申请
    MICROCAP ACOUSTIC TRANSDUCER DEVICE 有权
    MICROCAP声学传感器设备

    公开(公告)号：US20100272310A1

    公开(公告)日：2010-10-28

    申请号：US12430966

    申请日：2009-04-28

    Applicant: Joel PHILLIBER ,  John CHOY ,  David MARTIN

    Inventor： Joel PHILLIBER ,  John CHOY ,  David MARTIN

    IPC: H04R1/02

    CPC classification number: H04R31/00

    Abstract: A device includes a first wafer, a second wafer, a gasket bonding the first wafer to the second wafer to define a cavity between the first wafer and the second wafer, and an acoustic transducer disposed on the first wafer and disposed within the cavity between the first wafer and the second wafer. One or more apertures are provided for communicating an acoustic signal between the acoustic transducer and an exterior of the device. An aperture may be formed in the cavity itself, or the cavity may be hermetically sealed. An aperture may be formed completely through the first wafer and located directly beneath at least a portion of the acoustic transducer.

    Abstract translation: 一种器件包括第一晶片，第二晶片，将第一晶片连接到第二晶片以在第一晶片和第二晶片之间限定空腔的垫圈，以及设置在第一晶片上并设置在第一晶片之间的空腔内的声换能器 第一晶片和第二晶片。 提供一个或多个孔，用于在声换能器和装置的外部之间传递声信号。 可以在空腔本身中形成孔，或者可以将空腔气密地密封。 孔可以完全穿过第一晶片形成，并且直接位于声换能器的至少一部分下方。

    TRANSDUCER DEVICES HAVING DIFFERENT FREQUENCIES BASED ON LAYER THICKNESSES AND METHOD OF FABRICATING THE SAME
    4.
    发明申请
    TRANSDUCER DEVICES HAVING DIFFERENT FREQUENCIES BASED ON LAYER THICKNESSES AND METHOD OF FABRICATING THE SAME 有权
    具有基于层厚度的不同频率的传感器件及其制造方法

    公开(公告)号：US20110291207A1

    公开(公告)日：2011-12-01

    申请号：US12789685

    申请日：2010-05-28

    Applicant: David MARTIN ,  John CHOY

    Inventor： David MARTIN ,  John CHOY

    IPC: H01L29/84 ,  H01L21/66

    CPC classification number: H01L41/253 ,  G10K9/125 ,  H01L27/20 ,  Y10T29/42

    Abstract: A transducer array on a common substrate includes a membrane and first and second transducer devices. The membrane is formed on the common substrate, and includes a lower layer and an upper layer. The first transducer device includes a first resonator stack formed on at least the lower layer in a first portion of the membrane, the upper layer having a first thickness in the first portion of the membrane. The second transducer device includes a second resonator stack formed on at least the lower layer in a second portion of the membrane, the upper layer having a second thickness in the second portion of the membrane, where the second thickness is different from the first thickness, such that a first resonant frequency of the first transducer device is different from a second resonant frequency of the second transducer device.

    Abstract translation: 公共衬底上的换能器阵列包括膜和第一和第二换能器装置。 膜形成在公共基板上，并且包括下层和上层。 第一换能器装置包括形成在膜的第一部分中的至少下层上的第一谐振器叠层，上层在膜的第一部分具有第一厚度。 第二换能器装置包括形成在膜的第二部分中的至少下层上的第二谐振器叠层，上层在膜的第二部分具有第二厚度，其中第二厚度不同于第一厚度， 使得第一换能器装置的第一谐振频率与第二换能器装置的第二共振频率不同。

    Method Of Determining The Suitability Of A Fuel For Use In An Engine And A Composition For Use In Such A Method
    5.
    发明申请
    Method Of Determining The Suitability Of A Fuel For Use In An Engine And A Composition For Use In Such A Method 有权
    确定在这种方法中使用的发动机和组合物中的燃料的适用性的方法

    公开(公告)号：US20160097720A1

    公开(公告)日：2016-04-07

    申请号：US14506495

    申请日：2014-10-03

    Applicant: David MARTIN

    Inventor： David MARTIN

    IPC: G01N21/64

    CPC classification number: G01N21/64 ,  G01N21/643 ,  G01N21/94 ,  G01N33/2835

    Abstract: A method for determining the suitability for use in an engine of a fuel e.g. a jet fuel that may contain particulate contaminants, such as organic and/or inorganic particulates, is disclosed. The method can be used to distinguish a known organic particulate contaminant from inorganic particulate contaminants in the fuel. A composition suitable for use in the method is also disclosed.

    Abstract translation: 一种用于确定在燃料的发动机中的适用性的方法。 公开了可能含有微粒污染物的喷气燃料，例如有机和/或无机颗粒。 该方法可用于将已知的有机颗粒污染物与燃料中的无机颗粒污染物区分开来。 还公开了适用于该方法的组合物。

    MICROMACHINED HORN
    7.
    发明申请
    MICROMACHINED HORN 有权

    公开(公告)号：US20100278368A1

    公开(公告)日：2010-11-04

    申请号：US12434092

    申请日：2009-05-01

    Applicant: David MARTIN ,  Joel PHILLIBER ,  John CHOY

    Inventor： David MARTIN ,  Joel PHILLIBER ,  John CHOY

    IPC: H04R1/20 ,  H01L21/3065

    CPC classification number: H04R1/30 ,  H01L27/20 ,  H04R17/005 ,  H04R2201/003 ,  Y10T29/42

    Abstract: An acoustic device includes a transducer formed on a first surface of a substrate and an acoustic horn formed in the substrate by a dry-etching process through an opposing second surface of the substrate. The acoustic horn is positioned to amplify sound waves from the transducer and defines a non-linear cross-sectional profile.

    Abstract translation: 声学装置包括通过基板的相对的第二表面的干蚀刻工艺形成在基板的第一表面上的换能器和形成在基板中的声喇叭。 声喇叭被定位成放大来自换能器的声波并且限定非线性横截面轮廓。

    MICROMACHINED HORN
    8.
    发明申请
    MICROMACHINED HORN 有权

    公开(公告)号：US20120269372A1

    公开(公告)日：2012-10-25

    申请号：US13536917

    申请日：2012-06-28

    Applicant: David MARTIN ,  Joel PHILLIBER ,  John CHOY

    Inventor： David MARTIN ,  Joel PHILLIBER ,  John CHOY

    IPC: H04R1/20 ,  H04R1/02

    CPC classification number: H04R1/30 ,  H01L27/20 ,  H04R17/005 ,  H04R2201/003 ,  Y10T29/42

    Abstract: An acoustic device includes a transducer formed on a first surface of a substrate and an acoustic horn formed in the substrate by a dry-etching process through an opposing second surface of the substrate. The acoustic horn is positioned to amplify sound waves from the transducer and defines a non-linear cross-sectional profile.

    Abstract translation: 声学装置包括通过基板的相对的第二表面的干蚀刻工艺形成在基板的第一表面上的换能器和形成在基板中的声喇叭。 声喇叭被定位成放大来自换能器的声波并且限定非线性横截面轮廓。

    INTEGRATED OPTICAL AND ACOUSTIC TRANSDUCER DEVICE
    9.
    发明申请
    INTEGRATED OPTICAL AND ACOUSTIC TRANSDUCER DEVICE 有权
    集成光学和声学传感器设备

    公开(公告)号：US20110203378A1

    公开(公告)日：2011-08-25

    申请号：US12711626

    申请日：2010-02-24

    Applicant: Osvaldo BUCCAFUSCA ,  David MARTIN

    Inventor： Osvaldo BUCCAFUSCA ,  David MARTIN

    IPC: G01H9/00

    CPC classification number: G01H9/00

    Abstract: An integrated transducer device includes an optical transducer and an acoustic transducer integrally joined with the optical transducer. The acoustic transducer includes a membrane responsive to acoustic signals, the membrane being aligned with the optical transducer such that optical signals emitted or received by the optical transducer pass through the membrane. A propagation direction of the acoustic signals emitted or received by the acoustic transducer is collinear with a propagation direction of the optical signals emitted or received by the optical transducer.

    Abstract translation: 集成换能器装置包括光学换能器和与光学换能器整体连接的声换能器。 声换能器包括响应于声信号的膜，膜与光学换能器对准，使得由光学换能器发射或接收的光信号通过膜。 由声换能器发射或接收的声信号的传播方向与由光学换能器发射或接收的光信号的传播方向共线。

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