-
公开(公告)号：US20170114449A1
公开(公告)日：2017-04-27
申请号：US14923348
申请日：2015-10-26
申请人： Tango Systems, Inc.
发明人： Ravi Mullapudi , Srikanth Dasaradhi , Lee LaBlanc , Suresh Palanisamy , Venkata Dora Chowdary Kakarla
CPC分类号： C23C14/505 , C23C14/08 , C23C14/352 , C23C14/541 , C23C14/562 , H01J37/32715 , H01J37/3405 , H01J37/3455
摘要： A circular PVD chamber has a plurality of sputtering targets mounted on a top wall of the chamber. A pallet in the chamber is coupled to a motor for rotating the pallet about its center axis. The pallet has a diameter less than the diameter of the circular chamber. The pallet is also shiftable in an XY direction to move the center of the pallet beneath any of the targets so all areas of a workpiece supported by the pallet can be positioned directly below any one of the targets. A scanning magnet is in back of each target and is moved, via a programmed controller, to only be above portions of the workpiece so that no sputtered material is wasted. For depositing a material onto small workpieces, a cooling backside gas volume is created between the pallet and the underside of sticky tape supporting the workpieces.
-
公开(公告)号：US09957606B2
公开(公告)日：2018-05-01
申请号：US14923348
申请日：2015-10-26
申请人： Tango Systems, Inc.
发明人： Ravi Mullapudi , Srikanth Dasaradhi , Lee LaBlanc , Suresh Palanisamy , Venkata Dora Chowdary Kakarla
IPC分类号： C23C14/34 , C23C14/50 , C23C14/54 , H01J37/34 , H01J37/32 , C23C14/35 , C23C14/56 , C23C14/08
CPC分类号： C23C14/505 , C23C14/08 , C23C14/352 , C23C14/541 , C23C14/562 , H01J37/32715 , H01J37/3405 , H01J37/3455
摘要： A circular PVD chamber has a plurality of sputtering targets mounted on a top wall of the chamber. A pallet in the chamber is coupled to a motor for rotating the pallet about its center axis. The pallet has a diameter less than the diameter of the circular chamber. The pallet is also shiftable in an XY direction to move the center of the pallet beneath any of the targets so all areas of a workpiece supported by the pallet can be positioned directly below any one of the targets. A scanning magnet is in back of each target and is moved, via a programmed controller, to only be above portions of the workpiece so that no sputtered material is wasted. For depositing a material onto small workpieces, a cooling backside gas volume is created between the pallet and the underside of sticky tape supporting the workpieces.
-
公开(公告)号：US20180202040A1
公开(公告)日：2018-07-19
申请号：US15921030
申请日：2018-03-14
申请人： Tango Systems, Inc.
CPC分类号： C23C14/352 , C23C14/50 , C23C14/505 , C23C14/541 , H01J37/32724 , H01J37/3405 , H01J37/3411 , H01J37/3455 , H01J37/3464 , H01J2237/006 , H01J2237/2001 , H01J2237/20214
摘要： A circular PVD chamber has a plurality of sputtering targets mounted on a top wall of the chamber. A pallet in the chamber is coupled to a motor for rotating the pallet about its center axis. The pallet has a diameter less than the diameter of the circular chamber. The pallet is also shiftable in an XY direction to move the center of the pallet beneath any of the targets so all areas of a workpiece supported by the pallet can be positioned directly below any one of the targets. A scanning magnet is in back of each target and is moved, via a programmed controller, to only be above portions of the workpiece so that no sputtered material is wasted. For depositing a material onto small workpieces, a cooling backside gas volume is created between the pallet and the underside of sticky tape supporting the workpieces.
-
公开(公告)号：US20170114448A1
公开(公告)日：2017-04-27
申请号：US14923357
申请日：2015-10-26
申请人： Tango Systems, Inc.
CPC分类号： C23C14/352 , C23C14/50 , C23C14/505 , C23C14/541 , H01J37/32724 , H01J37/3405 , H01J37/3411 , H01J37/3455 , H01J37/3464 , H01J2237/006 , H01J2237/2001 , H01J2237/20214
摘要： A circular PVD chamber has a plurality of sputtering targets mounted on a top wall of the chamber. A pallet in the chamber is coupled to a motor for rotating the pallet about its center axis. The pallet has a diameter less than the diameter of the circular chamber. The pallet is also shiftable in an XY direction to move the center of the pallet beneath any of the targets so all areas of a workpiece supported by the pallet can be positioned directly below any one of the targets. A scanning magnet is in back of each target and is moved, via a programmed controller, to only be above portions of the workpiece so that no sputtered material is wasted. For depositing a material onto small workpieces, a cooling backside gas volume is created between the pallet and the underside of sticky tape supporting the workpieces.
-
公开(公告)号：US10550464B2
公开(公告)日：2020-02-04
申请号：US15921030
申请日：2018-03-14
申请人： Tango Systems, Inc.
摘要： A circular PVD chamber has a plurality of sputtering targets mounted on a top wall of the chamber. A pallet in the chamber is coupled to a motor for rotating the pallet about its center axis. The pallet has a diameter less than the diameter of the circular chamber. The pallet is also shiftable in an XY direction to move the center of the pallet beneath any of the targets so all areas of a workpiece supported by the pallet can be positioned directly below any one of the targets. A scanning magnet is in back of each target and is moved, via a programmed controller, to only be above portions of the workpiece so that no sputtered material is wasted. For depositing a material onto small workpieces, a cooling backside gas volume is created between the pallet and the underside of sticky tape supporting the workpieces.
-
公开(公告)号：US09932668B2
公开(公告)日：2018-04-03
申请号：US14923357
申请日：2015-10-26
申请人： Tango Systems, Inc.
CPC分类号： C23C14/352 , C23C14/50 , C23C14/505 , C23C14/541 , H01J37/32724 , H01J37/3405 , H01J37/3411 , H01J37/3455 , H01J37/3464 , H01J2237/006 , H01J2237/2001 , H01J2237/20214
摘要： A circular PVD chamber has a plurality of sputtering targets mounted on a top wall of the chamber. A pallet in the chamber is coupled to a motor for rotating the pallet about its center axis. The pallet has a diameter less than the diameter of the circular chamber. The pallet is also shiftable in an XY direction to move the center of the pallet beneath any of the targets so all areas of a workpiece supported by the pallet can be positioned directly below any one of the targets. A scanning magnet is in back of each target and is moved, via a programmed controller, to only be above portions of the workpiece so that no sputtered material is wasted. For depositing a material onto small workpieces, a cooling backside gas volume is created between the pallet and the underside of sticky tape supporting the workpieces.
-
-
-
-
-
搜索结果
6 条记录 (耗时 0.015 秒)
