公开(公告)号：US08732628B1

公开(公告)日：2014-05-20

申请号：US13742689

申请日：2013-01-16

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Meng-Fan Wu ,  I-Fan Lin ,  Ke-Ying Su ,  Hsiao-Shu Chao ,  Yi-Kan Cheng

IPC: G06F17/50

CPC classification number: G03F1/70 ,  G03F1/38 ,  G03F7/70466

Abstract: A method comprises: selecting a circuit pattern or network of circuit patterns in a layout of an integrated circuit (IC) to be fabricating using double patterning technology (DPT). Circuit patterns near the selected circuit pattern or network are grouped into one or more groups. For each group, a respective expected resistance-capacitance (RC) extraction error cost is calculated, which is associated with a mask alignment error, for two different sets of mask assignments. The circuit patterns in the one or more groups are assigned to be patterned by respective photomasks, so as to minimize a total of the expected RC extraction error costs.

Abstract translation: 一种方法包括：在使用双重图案化技术（DPT）制造的集成电路（IC）的布局中选择电路图案的电路图案或网络。 所选择的电路图案或网络附近的电路图案被分组成一个或多个组。 对于每个组，对于两组不同的掩模分配，计算与掩模对准误差相关联的相应的预期电阻 - 电容（RC）提取误差成本。 一个或多个组中的电路图案被分配为通过相应的光掩模进行图案化，以便最小化预期RC提取误差成本的总和。

公开(公告)号：US20140282341A1

公开(公告)日：2014-09-18

申请号：US13906614

申请日：2013-05-31

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chia-Ming Ho ,  Te-Yu Liu ,  Austin Chingyu Chiang ,  Meng-Fan Wu ,  Ke-Ying Su

IPC: G06F17/50

CPC classification number: G06F17/5081

Abstract: The present disclosure relates to a method of RC extraction that provides for a fast development time and easy maintenance. In some embodiments, the method provides a graphical representation of an integrated chip layout having a plurality of integrated chip components. A plurality of pattern based graphical features are then determined. Respective pattern based graphical features define a structural aspect of an integrated chip component. One of the plurality of integrated chip components is defined as a pattern oriented function having inputs of one or more of the pattern based graphical features. The pattern oriented function determines a shape of the one of the plurality of integrated chip components based upon a relation between the plurality of inputs. By determining a shape of an integrated chip component using a pattern oriented function, the complexity of RC profiles can be reduced.

Abstract translation: 本公开涉及一种提供快速开发时间和易于维护的RC提取方法。 在一些实施例中，该方法提供具有多个集成芯片组件的集成芯片布局的图形表示。 然后确定多个基于图案的图形特征。 基于图案的图形特征定义了集成芯片组件的结构方面。 多个集成芯片组件中的一个被定义为具有基于图案的图形特征中的一个或多个的输入的具有图案的功能。 基于图案的功能基于多个输入之间的关系确定多个集成芯片组件中的一个的形状。 通过使用面向图案的功能确定集成芯片组件的形状，可以减小RC轮廓的复杂性。

公开(公告)号：US09003345B2

公开(公告)日：2015-04-07

申请号：US13925870

申请日：2013-06-25

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Meng-Fan Wu ,  Ke-Ying Su ,  Hsien-Hsin Sean Lee

IPC: G06F9/455 ,  G06F17/50

CPC classification number: G06F17/5072

Abstract: A method generally comprises arranging a plurality of layer combinations into a plurality of groups such that each of the layer combinations is assigned to at least one group. A shifting analysis is performed on a plurality of benchmark circuits for each of the groups. At least one tuning vector value is calculated based, at least in part, on a plurality of criteria vectors of the benchmark circuits. A shift is applied on each of the groups by the tuning vector value and a technology file, such as a 2.5 dimensional RC techfile, is regenerated.

Abstract translation: 方法通常包括将多个层组合布置成多个组，使得每个层组合被分配给至少一个组。 对于每个组的多个基准电路执行移位分析。 至少部分地基于基准电路的多个标准向量来计算至少一个调谐向量值。 通过调谐向量值对每个组应用偏移，并且再生出诸如2.5维RC技术文件的技术文件。

公开(公告)号：US08887116B2

公开(公告)日：2014-11-11

申请号：US13906614

申请日：2013-05-31

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chia-Ming Ho ,  Te-Yu Liu ,  Austin Chingyu Chiang ,  Meng-Fan Wu ,  Ke-Ying Su

IPC: G06F17/50

CPC classification number: G06F17/5081

Abstract: The present disclosure relates to a method of RC extraction that provides for a fast development time and easy maintenance. In some embodiments, the method provides a graphical representation of an integrated chip layout having a plurality of integrated chip components. A plurality of pattern based graphical features are then determined. Respective pattern based graphical features define a structural aspect of an integrated chip component. One of the plurality of integrated chip components is defined as a pattern oriented function having inputs of one or more of the pattern based graphical features. The pattern oriented function determines a shape of the one of the plurality of integrated chip components based upon a relation between the plurality of inputs. By determining a shape of an integrated chip component using a pattern oriented function, the complexity of RC profiles can be reduced.

Abstract translation: 本公开涉及一种提供快速开发时间和易于维护的RC提取方法。 在一些实施例中，该方法提供具有多个集成芯片组件的集成芯片布局的图形表示。 然后确定多个基于图案的图形特征。 基于图案的图形特征定义了集成芯片组件的结构方面。 多个集成芯片组件中的一个被定义为具有基于图案的图形特征中的一个或多个的输入的具有图案的功能。 基于图案的功能基于多个输入之间的关系确定多个集成芯片组件中的一个的形状。 通过使用面向图案的功能确定集成芯片组件的形状，可以减小RC轮廓的复杂性。