FLEXIBLE PATTERN-ORIENTED 3D PROFILE FOR ADVANCED PROCESS NODES
    1.
    发明申请
    FLEXIBLE PATTERN-ORIENTED 3D PROFILE FOR ADVANCED PROCESS NODES 有权
    用于高级过程节点的灵活的面向图形的3D配置文件

    公开(公告)号:US20140282341A1

    公开(公告)日:2014-09-18

    申请号:US13906614

    申请日:2013-05-31

    CPC classification number: G06F17/5081

    Abstract: The present disclosure relates to a method of RC extraction that provides for a fast development time and easy maintenance. In some embodiments, the method provides a graphical representation of an integrated chip layout having a plurality of integrated chip components. A plurality of pattern based graphical features are then determined. Respective pattern based graphical features define a structural aspect of an integrated chip component. One of the plurality of integrated chip components is defined as a pattern oriented function having inputs of one or more of the pattern based graphical features. The pattern oriented function determines a shape of the one of the plurality of integrated chip components based upon a relation between the plurality of inputs. By determining a shape of an integrated chip component using a pattern oriented function, the complexity of RC profiles can be reduced.

    Abstract translation: 本公开涉及一种提供快速开发时间和易于维护的RC提取方法。 在一些实施例中,该方法提供具有多个集成芯片组件的集成芯片布局的图形表示。 然后确定多个基于图案的图形特征。 基于图案的图形特征定义了集成芯片组件的结构方面。 多个集成芯片组件中的一个被定义为具有基于图案的图形特征中的一个或多个的输入的具有图案的功能。 基于图案的功能基于多个输入之间的关系确定多个集成芯片组件中的一个的形状。 通过使用面向图案的功能确定集成芯片组件的形状,可以减小RC轮廓的复杂性。

    Multi-patterning mask decomposition method and system
    2.
    发明授权
    Multi-patterning mask decomposition method and system 有权
    多图案掩模分解方法和系统

    公开(公告)号:US08954900B1

    公开(公告)日:2015-02-10

    申请号:US13955313

    申请日:2013-07-31

    CPC classification number: G03F7/70466 G03F7/70433

    Abstract: A portion of a layout of a single layer of an integrated circuit is to be multi-patterned. The patterns are divided into first and second groups, to be patterned on the single layer by a first mask or a second mask. For each portion of each pattern, a spacing relationship is determined between that portion and any adjacent pattern on either or both sides. A processor computes a first capacitance (C), resistance (R), or resistance-capacitance (RC) cost of assigning the first group to the first mask and the second group to the second mask, and a second cost of assigning the first group to the second mask and the second group to the first mask, based on the spacing relationships. The first group is assigned to the first mask and the second group to the second mask if the first cost is lower than the second cost.

    Abstract translation: 集成电路的单层布局的一部分是多图案化的。 图案被划分为第一和第二组,通过第一掩模或第二掩模在单层上图案化。 对于每个图案的每个部分,在该部分和任一侧或两侧上的任何相邻图案之间确定间隔关系。 处理器计算将第一组分配给第一屏蔽,将第二组分配给第二屏蔽的第一电容(C),电阻(R)或电阻 - 电容(RC)成本,以及分配第一组的第二成本 基于间隔关系将第二掩模和第二组移动到第一掩模。 如果第一个成本低于第二个成本,则第一组被分配给第一个掩码,第二个组分配给第二个掩码。

    Flexible pattern-oriented 3D profile for advanced process nodes
    3.
    发明授权
    Flexible pattern-oriented 3D profile for advanced process nodes 有权
    灵活的面向3D模型的高级流程节点

    公开(公告)号:US08887116B2

    公开(公告)日:2014-11-11

    申请号:US13906614

    申请日:2013-05-31

    CPC classification number: G06F17/5081

    Abstract: The present disclosure relates to a method of RC extraction that provides for a fast development time and easy maintenance. In some embodiments, the method provides a graphical representation of an integrated chip layout having a plurality of integrated chip components. A plurality of pattern based graphical features are then determined. Respective pattern based graphical features define a structural aspect of an integrated chip component. One of the plurality of integrated chip components is defined as a pattern oriented function having inputs of one or more of the pattern based graphical features. The pattern oriented function determines a shape of the one of the plurality of integrated chip components based upon a relation between the plurality of inputs. By determining a shape of an integrated chip component using a pattern oriented function, the complexity of RC profiles can be reduced.

    Abstract translation: 本公开涉及一种提供快速开发时间和易于维护的RC提取方法。 在一些实施例中,该方法提供具有多个集成芯片组件的集成芯片布局的图形表示。 然后确定多个基于图案的图形特征。 基于图案的图形特征定义了集成芯片组件的结构方面。 多个集成芯片组件中的一个被定义为具有基于图案的图形特征中的一个或多个的输入的具有图案的功能。 基于图案的功能基于多个输入之间的关系确定多个集成芯片组件中的一个的形状。 通过使用面向图案的功能确定集成芯片组件的形状,可以减小RC轮廓的复杂性。

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