公开(公告)号：US20190276698A1

公开(公告)日：2019-09-12

申请号：US16335129

申请日：2017-09-26

申请人： TOKYO OHKA KOGYO CO., LTD.

发明人： Takahiro DAZAI ,  Hitoshi YAMANO ,  Akiya KAWAUE ,  Ken MIYAGI

IPC分类号： C09D153/00

摘要： A method of producing a structure containing a phase-separated structure, including: a step of using a resin composition for forming a phase-separated structure including a block copolymer and an ion liquid containing a compound (IL) having a cation moiety and an anion moiety to form a BCP layer (3) containing a block copolymer on a substrate (1); and a step of vaporizing at least a part of the compound (IL), and phase-separating the BCP layer (3) to obtain a structure (3′) containing a phase-separated structure.

公开(公告)号：US20180171172A1

公开(公告)日：2018-06-21

申请号：US15843387

申请日：2017-12-15

申请人： TOKYO OHKA KOGYO CO., LTD.

发明人： Hitoshi YAMANO ,  Takahiro DAZAI ,  Tasuku MATSUMIYA

IPC分类号： C09D153/00 ,  C09D5/00 ,  C09D7/20 ,  C08J3/28 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

CPC分类号： C09D153/00 ,  C08J3/28 ,  C08J2353/00 ,  C09D5/00 ,  C09D7/20 ,  G03F7/0002 ,  G03F7/0048 ,  G03F7/16 ,  G03F7/2006 ,  G03F7/26

摘要： A resin composition for forming a phase-separated structure includes a block copolymer in which a hydrophilic block and a hydrophobic block are bonded to each other, and a solvent component (S) containing an organic solvent (S1) having a boiling point of 200° C. or higher.

公开(公告)号：US20180072564A1

公开(公告)日：2018-03-15

申请号：US15653318

申请日：2017-07-18

申请人： TOKYO OHKA KOGYO CO., LTD. ,  NATIONAL UNIVERSITY CORPORATION HOKKAIDO UNIVERSITY

发明人： Ken MIYAGI ,  Takehiro SESHIMO ,  Takaya MAEHASHI ,  Takahiro DAZAI ,  Hitoshi YAMANO ,  Toshifumi SATOH ,  Takuya ISONO

IPC分类号： B81C1/00 ,  B05D3/14 ,  B05D3/02 ,  B05D7/00 ,  C08F212/08 ,  C08F230/08 ,  C08F297/02

CPC分类号： B81C1/00031 ,  B05D3/02 ,  B05D3/148 ,  B05D7/56 ,  B81C1/00531 ,  B81C2201/0149 ,  C08F8/32 ,  C08F212/08 ,  C08F230/08 ,  C08F297/026 ,  G03F7/0002

摘要： A resin composition for forming a phase-separated structure includes a block copolymer having a block (b1) having a repeating structure of styrene units; a block (b2) having a repeating structure of methyl methacrylate units partially substituted with a constituent unit represented by general formula (h1); and a number average molecular weight of less than 28,000. In general formula (h1), Rh0 is a hydrophilic functional group.

公开(公告)号：US20170240767A1

公开(公告)日：2017-08-24

申请号：US15047520

申请日：2016-02-18

申请人： Tokyo Ohka Kogyo Co., Ltd. ,  The University of Chicago

发明人： Akiya KAWAUE ,  Takehiro SESHIMO ,  Takaya MAEHASHI ,  Tasuku MATSUMIYA ,  Ken MIYAGI ,  Hitoshi YAMANO ,  Xuanxuan CHEN ,  Paul Franklin NEALEY

IPC分类号： C09D153/00 ,  B05D3/10 ,  B05D1/00 ,  C09D5/00 ,  C09D7/12

CPC分类号： C09D153/00 ,  B05D1/005 ,  B05D3/107 ,  C08K5/43 ,  C09D5/00 ,  C09D7/63 ,  G03F7/0002

摘要： A resin composition for forming a phase-separated structure, including a block copolymer, and an ion liquid containing a compound having a cation moiety and an anion moiety, the anion moiety being represented by general formula (a1), (a2) or (a3), in which X″ represents an alkylene group of 2 to 6 carbon atoms in which at least one hydrogen atom is substituted with a fluorine atom; Y″ and Z″ each independently represents an alkyl group of 1 to 10 carbon atoms in which at least one hydrogen atom is substituted with a fluorine atom; R″ represents an alkyl group of 1 to 5 carbon atoms in which at least one hydrogen atom is optionally substituted with a fluorine atom, m represents an integer of 1 to 6, and n represents an integer of 0 to 5, provided that m+n=6.

公开(公告)号：US20160194751A1

公开(公告)日：2016-07-07

申请号：US14957922

申请日：2015-12-03

申请人： TOKYO OHKA KOGYO CO., LTD.

发明人： Masahito YAHAGI ,  Takaya MAEHASHI ,  Akiya KAWAUE ,  Issei SUZUKI ,  Tasuku MATSUMIYA ,  Tsuyoshi KUROSAWA ,  Hitoshi YAMANO

IPC分类号： C23C14/58 ,  C09D153/00

CPC分类号： B05D1/38 ,  B05D3/0254 ,  B05D7/52 ,  C09D153/00 ,  G03F7/0002

摘要： A brush composition used for phase-separation of a layer containing a block copolymer having plural kinds of blocks bonded formed on a substrate, the brush composition including a resin component, the resin component having a structural unit (u1) represented by genera formula (u1-1), and having a hydroxy group on at least one terminal portion of the main chain thereof: in formula (u1-1), R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; R1 represents a halogen atom, or a linear, branched or cyclic hydrocarbon group of 1 to 20 carbon atoms optionally containing an oxygen atom, a halogen atom or a silicon atom, or a combination of the linear, branched or cyclic hydrocarbon group; and p represents an integer of 1 to 5.

摘要翻译： 一种刷组合物，用于相分离含有在基材上形成的具有多种结块的嵌段共聚物的层，所述刷组合物包含树脂组分，所述树脂组分具有由式（u1）表示的结构单元（u1） -1），并且在其主链的至少一个末端部分具有羟基：在式（u1-1）中，R表示氢原子，1〜5个碳原子的烷基或卤代烷基 1至5个碳原子; R 1表示卤素原子或任选含有氧原子，卤素原子或硅原子的碳原子数1〜20的直链状，支链状或环状的烃基，或者直链状，支链状或环状的烃基的组合。 p表示1〜5的整数。

公开(公告)号：US20190204738A1

公开(公告)日：2019-07-04

申请号：US16222758

申请日：2018-12-17

申请人： TOKYO OHKA KOGYO CO., LTD.

发明人： Hitoshi YAMANO ,  Takahiro KOJIMA ,  Yoichi HORI ,  Yasuhiro YOSHII ,  Masahito YAHAGI

IPC分类号： G03F7/039 ,  C08F12/24 ,  C08F212/14 ,  C08F220/18 ,  C08F220/30

CPC分类号： G03F7/0397 ,  C08F12/24 ,  C08F212/14 ,  C08F220/18 ,  C08F220/30

摘要： A resist composition including a resin component whose solubility in a developing solution is changed due to the action of the acid, in which the resin component has a constitutional unit derived from a compound represented by Formula (a0-1) and a constitutional unit containing an acid decomposable group whose polarity is increased due to the action of the acid. In the formula, W represents a polymerizable group-containing group, Ya0 represents a carbon atom, Xa0 represents a group that forms a monocyclic aliphatic hydrocarbon group together with Ya0, some or all hydrogen atoms in the monocyclic aliphatic hydrocarbon group may be substituted with substituents, and Ra00 represents an aromatic hydrocarbon group which may have a substituent.

公开(公告)号：US20190196330A1

公开(公告)日：2019-06-27

申请号：US16220852

申请日：2018-12-14

申请人： TOKYO OHKA KOGYO CO., LTD.

发明人： Yoichi HORI ,  Yasuhiro YOSHII ,  Masahito YAHAGI ,  Hitoshi YAMANO ,  Takahiro KOJIMA

IPC分类号： G03F7/039 ,  G03F7/004

CPC分类号： G03F7/0397 ,  G03F1/20 ,  G03F1/22 ,  G03F7/0045 ,  G03F7/2004

摘要： A resist composition including a resin component whose solubility in a developing solution is changed due to an action of an acid, in which the resin composition has a constitutional unit derived from a compound containing a chain-like aliphatic acid dissociable group or a monocyclic aliphatic acid dissociable group and a constitutional unit derived from a compound containing an aromatic hydrocarbon group-containing acid dissociable group.

公开(公告)号：US20160194524A1

公开(公告)日：2016-07-07

申请号：US14957994

申请日：2015-12-03

申请人： TOKYO OHKA KOGYO CO., LTD.

发明人： Hitoshi YAMANO ,  Tasuku MATSUMIYA ,  Masahito YAHAGI ,  Tsuyoshi KUROSAWA ,  Ken MIYAGI

IPC分类号： C09J5/00 ,  B05D1/36 ,  B05D3/04 ,  C09J125/14 ,  B05D7/00

CPC分类号： B05D1/36 ,  B82Y40/00 ,  C09D125/14 ,  C09D153/00 ,  G03F7/0002 ,  C08F212/08 ,  C08F220/14 ,  C08F2220/281

摘要： A brush composition used for phase-separation of a layer containing a block copolymer on a substrate, the brush composition including a resin component (N), the resin component (N) containing a hydrophobic structural unit (Nx) and a hydrophilic structural unit (Ny), the amount of the structural unit (Ny) within the resin component (N) being 5 mol % or less.

摘要翻译： 一种刷组合物，用于在基材上相分离含有嵌段共聚物的层，所述刷组合物包括树脂组分（N），含有疏水结构单元（Nx）的树脂组分（N）和亲水结构单元 Ny），树脂成分（N）中的结构单元（Ny）的量为5摩尔％以下。

公开(公告)号：US20220301662A1

公开(公告)日：2022-09-22

申请号：US17638154

申请日：2020-08-14

申请人： Tokyo Ohka Kogyo Co., Ltd.

发明人： Hitoshi YAMANO ,  Ryohei EGUCHI ,  Makoto SATO ,  Hiroaki SHIMIZU

IPC分类号： G16C60/00 ,  G16C20/70

摘要： An information processing system includes a storage unit configured to store correspondence information in which material information indicating a material of a composition and a process condition in a process using the composition are associated with performance information of a composition obtained by the process, a performance estimation unit configured to acquire the performance information on the basis of the input material information and processing condition, and the correspondence information, and an output unit configured to output the performance information.

公开(公告)号：US20170362460A1

公开(公告)日：2017-12-21

申请号：US15185899

申请日：2016-06-17

申请人： TOKYO OHKA KOGYO CO., LTD. ,  The University of Chicago

发明人： Akiya KAWAUE ,  Takehiro SESHIMO ,  Takaya MAEHASHI ,  Tasuku MATSUMIYA ,  Ken MIYAGI ,  Hitoshi YAMANO ,  Xuanxuan CHEN ,  Paul Franklin NEALEY

IPC分类号： C09D153/00 ,  C09D5/00 ,  B05D3/10 ,  C09D7/12 ,  B05D1/00

CPC分类号： C09D153/00 ,  B05D3/107 ,  C08K5/17 ,  C08K5/3415 ,  C08K5/3435 ,  C09D5/00 ,  C09D7/63 ,  G03F3/00 ,  G03F7/00

摘要： A resin composition for forming a phase-separated structure, including: a block copolymer, and an ion liquid containing a compound (IL) having a cation moiety and an anion moiety, the energy of the LUMO of the cation moiety being −4.5 eV or more, and the energy difference between the LUMO and the HOMO of the cation moiety being 10.0 ev or more, or the Log P value of the anion moiety being 1 to 3.