RAW MATERIAL GAS SUPPLY APPARATUS, RAW MATERIAL GAS SUPPLY METHOD AND STORAGE MEDIUM

    公开(公告)号:US20170159175A1

    公开(公告)日:2017-06-08

    申请号:US15367096

    申请日:2016-12-01

    IPC分类号: C23C16/455 C23C16/52

    CPC分类号: C23C16/52 C23C16/4481

    摘要: In a raw material gas supply apparatus, a remaining amount of the raw material is calculated by subtracting, from an amount of the raw material filled in a new raw material, a cumulative consumption amount including a consumption amount of the raw material calculated based on an actual flow rate of the raw material gas obtained from an offset value, (m3−(m1+m2)), m1, m2 and m3 being respective measurement values of first and second mass controller, and a mass flow meter, obtained by supplying a carrier gas and a dilution gas in a state where the carrier gas flows through a bypass channel, and an actual flow rate measurement value of the raw material obtained by subtracting the offset value from a value of (m3−(m1+m2)) obtained by supplying the carrier gas and dilution gas in a state where the carrier gas flows through the inside of a raw material container.

    RAW MATERIAL GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS
    4.
    发明申请
    RAW MATERIAL GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS 审中-公开
    原料气供应装置和成膜装置

    公开(公告)号:US20160273101A1

    公开(公告)日:2016-09-22

    申请号:US15073513

    申请日:2016-03-17

    摘要: A raw material gas supply apparatus includes a raw material container, a carrier gas inlet line and a raw material gas line. The raw material container is configured to accommodate the solid raw material. The carrier gas inlet line is configured to discharge the carrier gas to the raw material gas originated from the solid raw material. The raw material gas is transferred to the consumption area together with the carrier gas through the raw material gas line. A flow rate of the carrier gas is set such that a variation rate of a gas flow rate of the raw material gas flowing in the raw material gas line obtained by subtracting a gas flow rate in the carrier gas inlet line from a gas flow rate in the raw material gas line becomes 10% or less.

    摘要翻译: 原料气体供给装置包括原料容器,载气进口管线和原料气体管路。 原料容器构造成容纳固体原料。 载气进口管线被配置为将载气排出到源自固体原料的原料气体。 原料气体通过原料气体管线与载气一起转移到消耗区域。 载气的流量被设定为使得通过从载气进口管线中的气体流量减去原料气体管线中流动的原料气体的气体流量的变化率从 原料气体管线为10%以下。