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公开(公告)号:US20170159175A1
公开(公告)日:2017-06-08
申请号:US15367096
申请日:2016-12-01
发明人: Hironori YAGI , Masayuki MOROI
IPC分类号: C23C16/455 , C23C16/52
CPC分类号: C23C16/52 , C23C16/4481
摘要: In a raw material gas supply apparatus, a remaining amount of the raw material is calculated by subtracting, from an amount of the raw material filled in a new raw material, a cumulative consumption amount including a consumption amount of the raw material calculated based on an actual flow rate of the raw material gas obtained from an offset value, (m3−(m1+m2)), m1, m2 and m3 being respective measurement values of first and second mass controller, and a mass flow meter, obtained by supplying a carrier gas and a dilution gas in a state where the carrier gas flows through a bypass channel, and an actual flow rate measurement value of the raw material obtained by subtracting the offset value from a value of (m3−(m1+m2)) obtained by supplying the carrier gas and dilution gas in a state where the carrier gas flows through the inside of a raw material container.
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公开(公告)号:US20180251894A1
公开(公告)日:2018-09-06
申请号:US15901075
申请日:2018-02-21
IPC分类号: C23C16/455 , H01L21/285 , C23C16/14
CPC分类号: C23C16/45527 , C23C16/14 , H01L21/28079 , H01L21/28088 , H01L21/28097 , H01L21/28518 , H01L21/28562 , H01L21/28568 , H01L21/32051
摘要: A gas supply device for vaporizing a raw material inside a raw material container and supplying a raw material gas into a processing container together with a carrier gas, which includes: a buffer tank provided between the raw material container and the processing container; an Evac line for exhausting interiors of the buffer tank and the raw material container; a memory part that stores a first internal pressure of the buffer tank when a process is performed by supplying the raw material gas into the processing container; and a control part configured to control a flow rate of a gas exhausted to the Evac line and a flow rate of the raw material gas and the carrier gas filled in the buffer tank, so that a second internal pressure of the buffer tank becomes equal to the first internal pressure before supplying the raw material gas into the processing container.
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公开(公告)号:US20170092549A1
公开(公告)日:2017-03-30
申请号:US15280634
申请日:2016-09-29
IPC分类号: H01L21/66 , H01L21/285 , H01L21/02 , C23C16/455 , C23C16/52
CPC分类号: H01L21/02271 , C23C16/14 , C23C16/4481 , C23C16/45544 , C23C16/52 , H01L21/0262 , H01L21/28506
摘要: In a raw material gas supply apparatus, a control unit obtains an offset value of (m3−(m1+m2)), m1, m2 and m3 being respective measurement values of first and second mass controllers, and a mass flow meter, by supplying a carrier gas and a dilution gas in a state where the carrier gas flows through a bypass channel. Further, the control unit obtains an actual measurement value of a flow rate of the raw material by subtracting the offset value from (m3−(m1+m2)) obtained by supplying the carrier gas and dilution gas in a state where the carrier gas flows through the inside of a raw material container and calculating a difference between a target value of the flow rate of the raw material and the actual measurement value, and adjusts a set value of the first mass flow controller such that the flow rate of the raw material becomes.
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公开(公告)号:US20160273101A1
公开(公告)日:2016-09-22
申请号:US15073513
申请日:2016-03-17
发明人: Eiichi KOMORI , Hironori YAGI
IPC分类号: C23C16/448 , C23C16/52 , C23C16/455
CPC分类号: C23C16/52 , C23C16/14 , C23C16/4481 , C23C16/45561
摘要: A raw material gas supply apparatus includes a raw material container, a carrier gas inlet line and a raw material gas line. The raw material container is configured to accommodate the solid raw material. The carrier gas inlet line is configured to discharge the carrier gas to the raw material gas originated from the solid raw material. The raw material gas is transferred to the consumption area together with the carrier gas through the raw material gas line. A flow rate of the carrier gas is set such that a variation rate of a gas flow rate of the raw material gas flowing in the raw material gas line obtained by subtracting a gas flow rate in the carrier gas inlet line from a gas flow rate in the raw material gas line becomes 10% or less.
摘要翻译: 原料气体供给装置包括原料容器,载气进口管线和原料气体管路。 原料容器构造成容纳固体原料。 载气进口管线被配置为将载气排出到源自固体原料的原料气体。 原料气体通过原料气体管线与载气一起转移到消耗区域。 载气的流量被设定为使得通过从载气进口管线中的气体流量减去原料气体管线中流动的原料气体的气体流量的变化率从 原料气体管线为10%以下。
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