公开(公告)号：US20170092549A1

公开(公告)日：2017-03-30

申请号：US15280634

申请日：2016-09-29

申请人： TOKYO ELECTRON LIMITED

发明人： Hironori YAGI ,  Kensaku NARUSHIMA ,  Atsunari MATSUYAMA

IPC分类号： H01L21/66 ,  H01L21/285 ,  H01L21/02 ,  C23C16/455 ,  C23C16/52

CPC分类号： H01L21/02271 ,  C23C16/14 ,  C23C16/4481 ,  C23C16/45544 ,  C23C16/52 ,  H01L21/0262 ,  H01L21/28506

摘要： In a raw material gas supply apparatus, a control unit obtains an offset value of (m3−(m1+m2)), m1, m2 and m3 being respective measurement values of first and second mass controllers, and a mass flow meter, by supplying a carrier gas and a dilution gas in a state where the carrier gas flows through a bypass channel. Further, the control unit obtains an actual measurement value of a flow rate of the raw material by subtracting the offset value from (m3−(m1+m2)) obtained by supplying the carrier gas and dilution gas in a state where the carrier gas flows through the inside of a raw material container and calculating a difference between a target value of the flow rate of the raw material and the actual measurement value, and adjusts a set value of the first mass flow controller such that the flow rate of the raw material becomes.