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公开(公告)号：US20220410944A1
公开(公告)日：2022-12-29
申请号：US17723187
申请日：2022-04-18
Applicant: T-Robotics Co., Ltd.
Inventor： Soo Jong Lee , Myung Jin Kim , Chang Seong Lee , Seung Young Baek , Chang Hyun Jee , Sang Hwi Ham , Moon Gi Hur , Jae Hyun Park , Tae Han Lee
IPC: B61B13/00 , B61B12/00 , H01L21/687
Abstract: A travel robot for moving a substrate transfer robot in a vacuum chamber, includes: a travel arm platform through which coupling holes are formed, wherein an elevating drive shaft is inserted into a lower space of one of the coupling holes; a first travel arm part including a (1_1)-st and a (1_2)-nd travel link arms; a second travel arm part including a (2_1)-st and a (2_2)-nd travel link arms, wherein travel driving motors and speed reducers are installed in the (1_1)-st and the (2_1)-st travel link arms; and a transfer robot coupling part engaged with the (1_2)-nd and the (2_2)-nd travel link arms, wherein a rotation driving motor built thereon is engaged with the substrate transfer robot by a rotation drive shaft.
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公开(公告)号：US20220380145A1
公开(公告)日：2022-12-01
申请号：US17723106
申请日：2022-04-18
Applicant: T-Robotics Co., Ltd.
Inventor： Soo Jong Lee , Myung Jin Kim , Chang Seong Lee , Seung Young Baek , Chang Hyun Jee , Sang Hwi Ham , Moon Gi Hur , Jae Hyun Park , Tae Han Lee
Abstract: A travel robot for moving a substrate transfer robot in a vacuum chamber, includes: an elevating part located in a lower outer region of a housing, sealing the vacuum chamber, wherein an elevating drive shaft moves through a vacuum chamber through-hole; a travel arm platform through which coupling holes are formed, wherein the elevating drive shaft is inserted into a lower space of one of the coupling holes; a first travel arm part including a (1_1)-st and a (1_2)-nd travel link arms; a second travel arm part including a (2_1)-st and a (2_2)-nd travel link arms, wherein travel driving motors and speed reducers are installed in the (1_1)-st and the (2_1)-st travel link arms; and a transfer robot coupling part engaged with the (1_2)-nd and the (2_2)-nd travel link arms, wherein a rotation driving motor built thereon is engaged with the substrate transfer robot by a rotation drive shaft.
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Patent Agency Ranking
公开(公告)号：US12080586B2
公开(公告)日：2024-09-03
申请号：US17723154
申请日：2022-04-18
Applicant: T-Robotics Co., Ltd.
Inventor： Soo Jong Lee , Myung Jin Kim , Chang Seong Lee , Seung Young Baek , Chang Hyun Jee , Sang Hwi Ham , Moon Gi Hur , Jae Hyun Park , Tae Han Lee
IPC: H01L21/687
CPC classification number: H01L21/68707
Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, each compartmentalized into a lower and an upper space, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, for each transfer arm part, drive shafts, interlocked with transfer driving motors or speed reducers installed on one of the transfer link arms, and output shafts interlocked with the drive shafts are installed on the transfer link arms.
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公开(公告)号：US12234106B1
公开(公告)日：2025-02-25
申请号：US18798435
申请日：2024-08-08
Applicant: T-Robotics Co., Ltd.
Inventor： Soo Jong Lee , Chang Seong Lee , Chang Hyun Jee , Sang Hwi Ham
IPC: H01L21/687 , B65G47/90 , H01L21/677
Abstract: A substrate transfer apparatus transfers a substrate in a vacuum chamber. The substrate transfer apparatus includes an elevating robot, a travel robot and a transfer robot. The elevating robot includes an elevating plate through which through-holes are formed, and hollow elevating shafts, wherein each central axis of the hollow elevating shafts corresponds to each center of the through-holes, wherein the elevating robot is sealably coupled with a vacuum chamber through-hole. The travel robot includes a travel arm platform through which coupling holes are formed, wherein each of the hollow elevating shafts is inserted into each lower space of each of the coupling holes, a first travel arm part including a (1_1)-st and a (1_2)-nd travel link arms, second travel arm parts including a (2_1)-st and a (2_2)-nd travel link arms, and a transfer robot coupling part coupled with the (1_2)-nd and the (2_2)-nd travel link arms.
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公开(公告)号：US20220410413A1
公开(公告)日：2022-12-29
申请号：US17723213
申请日：2022-04-18
Applicant: T-Robotics Co., Ltd.
Inventor： Soo Jong Lee , Myung Jin Kim , Chang Seong Lee , Seung Young Baek , Chang Hyun Jee , Sang Hwi Ham , Moon Gi Hur , Jae Hyun Park , Tae Han Lee
Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.
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公开(公告)号：US11820005B2
公开(公告)日：2023-11-21
申请号：US17723213
申请日：2022-04-18
Applicant: T-Robotics Co., Ltd.
Inventor： Soo Jong Lee , Myung Jin Kim , Chang Seong Lee , Seung Young Baek , Chang Hyun Jee , Sang Hwi Ham , Moon Gi Hur , Jae Hyun Park , Tae Han Lee
CPC classification number: B25J19/0075 , B25J9/042 , B25J11/0095 , B25J19/0025 , B25J21/005
Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.
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公开(公告)号：US20220384240A1
公开(公告)日：2022-12-01
申请号：US17723154
申请日：2022-04-18
Applicant: T-Robotics Co, Ltd.
Inventor： Soo Jong Lee , Myung Jin KIM , Chang Seong Lee , Seung Young Baek , Chang Hyun Jee , Sang Hwi Ham , Moon Gi Hur , Jae Hyun Park , Tae Han Lee
IPC: H01L21/687
Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, each compartmentalized into a lower and an upper space, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, for each transfer arm part, drive shafts, interlocked with transfer driving motors or speed reducers installed on one of the transfer link arms, and output shafts interlocked with the drive shafts are installed on the transfer link arms.
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