Frequency-modulating sensor array

    公开(公告)号:US11320329B2

    公开(公告)日:2022-05-03

    申请号:US15702717

    申请日:2017-09-12

    Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of a sensed property, such as regional contact forces, ambient conditions and/or environmental composition. The resonant MEMS sensors generate signals that oscillate at respective frequencies corresponding to the sensed property, increasing or decreasing in frequency in response to an increase or decrease in that property to effect a frequency-modulated digital output.

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