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公开(公告)号:US12000748B2
公开(公告)日:2024-06-04
申请号:US18350713
申请日:2023-07-11
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
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公开(公告)号:US11320329B2
公开(公告)日:2022-05-03
申请号:US15702717
申请日:2017-09-12
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of a sensed property, such as regional contact forces, ambient conditions and/or environmental composition. The resonant MEMS sensors generate signals that oscillate at respective frequencies corresponding to the sensed property, increasing or decreasing in frequency in response to an increase or decrease in that property to effect a frequency-modulated digital output.
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公开(公告)号:US20240353277A1
公开(公告)日:2024-10-24
申请号:US18649771
申请日:2024-04-29
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
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公开(公告)号:US20240011854A1
公开(公告)日:2024-01-11
申请号:US18350713
申请日:2023-07-11
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
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公开(公告)号:US11609136B2
公开(公告)日:2023-03-21
申请号:US17712095
申请日:2022-04-02
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
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公开(公告)号:US20220291065A1
公开(公告)日:2022-09-15
申请号:US17712095
申请日:2022-04-02
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
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公开(公告)号:US20180087984A1
公开(公告)日:2018-03-29
申请号:US15702717
申请日:2017-09-12
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
IPC: G01L9/00
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
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公开(公告)号:US12216016B2
公开(公告)日:2025-02-04
申请号:US18649771
申请日:2024-04-29
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
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公开(公告)号:US11747229B2
公开(公告)日:2023-09-05
申请号:US18080243
申请日:2022-12-13
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
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公开(公告)号:US20230184609A1
公开(公告)日:2023-06-15
申请号:US18080243
申请日:2022-12-13
Applicant: SiTime Corporation
Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
Abstract: Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
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