Invention Grant
- Patent Title: Frequency-modulating sensor array
-
Application No.: US18649771Application Date: 2024-04-29
-
Publication No.: US12216016B2Publication Date: 2025-02-04
- Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
- Applicant: SiTime Corporation
- Applicant Address: US CA Santa Clara
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01L5/16
- IPC: G01L5/16 ; G01L1/14 ; G01L1/20 ; G01L9/00
Abstract:
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
Public/Granted literature
- US20240353277A1 Frequency-modulating sensor array Public/Granted day:2024-10-24
Information query
