摘要:
A non-polished glass wafer, a thinning system, and a method for using the non-polished glass wafer to thin a semiconductor wafer are described herein. In one embodiment, the glass wafer has a body (e.g., circular body) including a non-polished first surface and a non-polished second surface substantially parallel to each other. In addition, the circular body has a wafer quality index which is equal to a total thickness variation in micrometers plus one-tenth of a warp in micrometers that is less than 6.0.
摘要:
A non-polished glass wafer, a thinning system, and a method for using the non-polished glass wafer to thin a semiconductor wafer are described herein. In one embodiment, the glass wafer has a body (e.g., circular body) including a non-polished first surface and a non-polished second surface substantially parallel to each other. In addition, the circular body has a wafer quality index which is equal to a total thickness variation in micrometers plus one-tenth of a warp in micrometers that is less than 6.0.
摘要:
Methods of fabricating glass sheets (13) are provided in which the sheets are cut from a glass ribbon (15) composed of a glass having a setting zone temperature range (SZTR). As the glass is drawn, it passes through the SZTR (31) and an across-the-ribbon temperature distribution is produced at least one longitudinal position along the ribbon to compensate for in-plane stress induced in the sheets (13) when flattened. Through such thermal compensation, glass sheets (13) are produced which exhibit controlled levels of distortion when cut into sub-pieces and thus are suitable for use as substrates in the manufacture of, for example, flat panel displays, e.g., LCD displays.
摘要:
Managing pressure within a thickness-control-zone (muffle door) housing (20) relative to pressures in a glass-making machine enclosure (60) and an upper chamber (40)—that is disposed outside the enclosure—so as to minimize or control undesired airflows that would adversely affect thickness (9) of glass ribbon (8). According to one pressure-management technique, the pressure at a location (25) in the housing (20) is managed so as to be less than the pressure at a location (65) that is within the enclosure (60) as well as both outside and adjacent to the housing. In the event of a leak, as by a crack or unintended opening in the housing, for example, this pressure difference reduces or prevents airflow toward the ribbon and, thereby, undesired thickness variation in the ribbon. According to a second pressure-management technique, the pressure at location (25) is managed so as to be greater than the pressure in the upper chamber.
摘要:
Disclosed is an apparatus for producing a glass sheet comprising lower thermal shields positioned below cooling doors for minimizing radiative heat loss from a forming body used to form a ribbon of molten glass from which a glass sheet is cut, and upper thermal shields positioned between the cooling doors and a root of the forming body for minimizing radiative heat loss from the forming body. The thermal shields are typically arranged as pairs and positioned on horizontally opposite sides of a flow of molten glass descending as a continuous ribbon from the forming body. Each thermal shield of the lower and upper thermal shield pairs may comprise a plurality of segments, including end segments and a central segment, wherein the end segments may be separately movable relative to the central segment, allowing an edge of the thermal shield adjacent the ribbon to be varied.
摘要:
Described herein are alkali-free, boroalumino silicate glasses exhibiting desirable physical and chemical properties for use as substrates in flat panel display devices, such as, active matrix liquid crystal displays (AMLCDs) and active matrix organic light emitting diode displays (AMOLEDs). In accordance with certain of its aspects, the glasses possess good dimensional stability as a function of temperature.
摘要:
Managing pressure within a thickness-control-zone (muffle door) housing (20) relative to pressures in a glass-making machine enclosure (60) and an upper chamber (40)—that is disposed outside the enclosure—so as to minimize or control undesired airflows that would adversely affect thickness (9) of glass ribbon (8). According to one pressure-management technique, the pressure at a location (25) in the housing (20) is managed so as to be less than the pressure at a location (65) that is within the enclosure (60) as well as both outside and adjacent to the housing. In the event of a leak, as by a crack or unintended opening in the housing, for example, this pressure difference reduces or prevents airflow toward the ribbon and, thereby, undesired thickness variation in the ribbon. According to a second pressure-management technique, the pressure at location (25) is managed so as to be greater than the pressure in the upper chamber.
摘要:
Methods of fabricating glass sheets (13) are provided in which the sheets are cut from a glass ribbon (15) composed of a glass having a setting zone temperature range (SZTR). As the glass is drawn, it passes through the SZTR (31) and an across-the-ribbon temperature distribution is produced at least one longitudinal position along the ribbon to compensate for in-plane stress induced in the sheets (13) when flattened. Through such thermal compensation, glass sheets (13) are produced which exhibit controlled levels of distortion when cut into sub-pieces and thus are suitable for use as substrates in the manufacture of, for example, flat panel displays, e.g., LCD displays.