Method for fabricating vertical light emitting diode (VLED) structure using a laser pulse to remove a carrier substrate
    4.
    发明授权
    Method for fabricating vertical light emitting diode (VLED) structure using a laser pulse to remove a carrier substrate 有权
    使用激光脉冲制造垂直发光二极管(VLED)结构以去除载体衬底的方法

    公开(公告)号:US08871547B2

    公开(公告)日:2014-10-28

    申请号:US14176292

    申请日:2014-02-10

    Abstract: A method for fabricating a vertical light-emitting diode (VLED) structure includes the steps of providing a carrier substrate, and forming a semiconductor structure on the carrier substrate having a p-type confinement layer, a multiple quantum well (MQW) layer in electrical contact with the p-type confinement layer configured to emit electromagnetic radiation, and an n-type confinement layer in electrical contact with the multiple quantum well (MQW) layer. The method also includes the steps of removing the carrier substrate using a laser pulse to expose an inverted surface of the n-type confinement layer, and forming a metal contact on the surface of the n-type confinement layer.

    Abstract translation: 一种用于制造垂直发光二极管(VLED)结构的方法包括以下步骤:提供载体衬底,并在载体衬底上形成具有p型限制层,多量子阱(MQW)层中的半导体结构 与被配置为发射电磁辐射的p型限制层接触,以及与多量子阱(MQW)层电接触的n型约束层。 该方法还包括以下步骤:使用激光脉冲去除载体衬底以暴露n型限制层的倒置表面,并在n型限制层的表面上形成金属接触。

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