公开(公告)号：US5652657A

公开(公告)日：1997-07-29

申请号：US467922

申请日：1995-06-06

申请人： Minoru Yoshii ,  Michio Kohno ,  Seiya Miura ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Minoru Yoshii ,  Michio Kohno ,  Seiya Miura ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G03F1/62 ,  G03F1/84 ,  H01L21/027 ,  G01B11/00

CPC分类号： G01N21/94

摘要： An inspection system inspecting an original with a pellicle, which system includes a light source for providing a light beam, a first detecting device for receiving light produced as a result of passage of the light beam through the pellicle, a second detecting device for receiving light produced as a result of non-passage of the light beam through the pellicle, and a processing system for determining information related to transmissivity of the pellicle, on the basis of outputs of the first and second detecting devices.

摘要翻译： 一种用防护薄膜组件检查原件的检查系统，该系统包括用于提供光束的光源，用于接收由于光束通过防护薄膜的结果而产生的光的第一检测装置，用于接收光的第二检测装置 由于不通过光束通过防护薄膜组件而产生的结果，以及用于根据第一和第二检测装置的输出确定与防护薄膜组件的透射率有关的信息的处理系统。

公开(公告)号：US5461474A

公开(公告)日：1995-10-24

申请号：US266512

申请日：1994-06-27

申请人： Minoru Yoshii ,  Noriyuki Nose ,  Masayuki Suzuki ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Minoru Yoshii ,  Noriyuki Nose ,  Masayuki Suzuki ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  H01L21/66

CPC分类号： G01N21/956 ,  G01N21/94

摘要： When inspecting the presence of foreign matter on a surface to be inspected by scanning the surface with a light beam from a light source utilizing a scanning system, and receiving scattered light from the surface by a detector, a correlation is utilized between a signal representing first scattered light obtained from the detector when the light beam scans a first line on the surface, and a signal representing second scattered light obtained from the detector when the light beam scans a second line displaced from the first line by a predetermined amount in a direction orthogonal to the direction of the first line.

摘要翻译： 当通过利用扫描系统的来自光源的光束扫描表面并通过检测器接收来自表面的散射光来检查要检查的表面上的异物的存在时，在表示第一 当光束扫描表面上的第一条线时，从检测器获得的散射光，以及当光束沿正交方向扫描从第一条线移位预定量的第二条线时，从检测器获得的第二散射光的信号 到第一行的方向。

公开(公告)号：US5861952A

公开(公告)日：1999-01-19

申请号：US984509

申请日：1992-12-02

申请人： Toshihiko Tsuji ,  Kyoichi Miyazaki ,  Seiji Takeuchi ,  Minoru Yoshii ,  Noriyuki Nose

发明人： Toshihiko Tsuji ,  Kyoichi Miyazaki ,  Seiji Takeuchi ,  Minoru Yoshii ,  Noriyuki Nose

IPC分类号： G01N21/94 ,  G01B9/02 ,  G01N21/88

CPC分类号： G01N21/94

摘要： A light source portion having an acousto-optic element produces a laser beam of two light components having a frequency difference .DELTA.w and having registered polarization directions. The laser beam is subsequently divided by a half mirror. One of the divided laser beams is detected by a photoelectric detector as reference light, and a corresponding signal is applied to a synchronism detector. The other laser beam is projected by a scanning optical system to the surface of, e.g., an original to be examined to scan the same. At the position on the surface irradiated by the scanning light spot, the laser beam is modulated at a beat frequency .DELTA.w on the basis of optical heterodyne interference. A synchronism detector detects a signal corresponding to the scattered light from a particle or defect on the surface being examined, in synchronism with the frequency of the reference light, whereby the particle or defect can be detected with a good signal-to-noise ratio.

摘要翻译： 具有声光元件的光源部分产生具有频差DELTA w并具有记录的偏振方向的两个光分量的激光束。 激光束随后被半反射镜分开。 其中一个激光束被光电检测器作为参考光检测，相应的信号被施加到同步检测器。 另一个激光束由扫描光学系统投影到例如要检查的原件的表面以扫描它。 在由扫描光点照射的表面上的位置处，基于光学外差干扰以激光束以拍频DELTA w进行调制。 同步检测器与参考光的频率同步地检测与被检查的表面上的颗粒或缺陷相对应的散射光的信号，从而可以以良好的信噪比检测颗粒或缺陷。

公开(公告)号：US5486919A

公开(公告)日：1996-01-23

申请号：US76951

申请日：1993-06-15

申请人： Toshihiko Tsuji ,  Seiji Takeuchi ,  Kyoichi Miyazaki ,  Minoru Yoshii ,  Noriyuki Nose ,  Tetsuzo Mori

发明人： Toshihiko Tsuji ,  Seiji Takeuchi ,  Kyoichi Miyazaki ,  Minoru Yoshii ,  Noriyuki Nose ,  Tetsuzo Mori

IPC分类号： G01J9/02 ,  G01J9/04 ,  G01N21/88 ,  G01N21/94 ,  G03F7/20 ,  G01B9/02

CPC分类号： G03F7/70616 ,  G01N21/88 ,  G01N21/94 ,  G03F7/7065 ,  G03F7/70916 ,  G01J2009/0261 ,  G01J9/04 ,  G01N2021/4792 ,  G01N21/8806

摘要： Disclosed is an inspection method and apparatus: wherein (i) first light having a first state of polarization and a first wavelength, and (ii) second light having a second state of polarization, different from the first state of polarization, and a second wavelength, different from the first wavelength are produced; at least the first light is projected to a position of inspection; and heterodyne interference light produced on the basis of the second light and light scattered at the inspection position and having its state of polarization changed, by the scattering, from the first state of polarization, is detected.

摘要翻译： 公开了一种检查方法和装置：其中（i）具有第一偏振状态和第一波长的第一光，以及（ii）具有与第一偏振态不同的第二极化状态的第二光，以及第二波长 ，与第一波长不同; 至少第一个光被投射到检查的位置; 并且检测基于第二光产生的外差干涉光和在检查位置上散射并且具有从第一极化状态通过散射改变其偏振状态的光。

公开(公告)号：US5742386A

公开(公告)日：1998-04-21

申请号：US799879

申请日：1997-02-13

申请人： Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01N21/47 ,  G01N21/94 ,  G01N21/956 ,  G03F7/20 ,  H01L21/027 ,  G01N21/00

CPC分类号： G01N21/4738 ,  G01N21/94 ,  G01N21/956

摘要： An apparatus for detecting foreign matter on a substrate includes an optical system for projecting a light beam onto a pellicle and a pattern surface, a first detector for detecting scattered light from foreign matter on the pattern surface, a second detector for detecting information relating to the reflectivity or the transmittance of the pellicle by detecting a light beam reflected by the pellicle, and a correction unit for correcting an output signal from the first detector using an output signal from the second detector.

摘要翻译： 用于检测基板上的异物的装置包括：用于将光束投射到防护薄膜组件和图案表面上的光学系统;用于检测来自图案表面上异物的散射光的第一检测器，用于检测与图案表面有关的信息的第二检测器; 通过检测由防护薄膜组件反射的光束来检测防护薄膜组件的反射率或透射率;以及校正单元，用于使用来自第二检测器的输出信号来校正来自第一检测器的输出信号。

公开(公告)号：US5767962A

公开(公告)日：1998-06-16

申请号：US755352

申请日：1996-11-25

申请人： Masayuki Suzuki ,  Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Masayuki Suzuki ,  Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01B11/30 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  H01L21/66 ,  G01N21/00

CPC分类号： G01N21/94

摘要： An inspection system includes a light source, a scanning device for scanning a surface to be inspected, with light from the light source, wherein the scanning device includes an optical member disposed with inclination with respect to a primary scan direction, the optical member being adapted to provide a convergent light being converged to form a spot at a distance changeable with the position of a scan, and a light receiving device for receiving scattered light from the surface.

摘要翻译： 检查系统包括光源，用于扫描来自光源的光的扫描装置，其中所述扫描装置包括相对于主扫描方向倾斜设置的光学构件，所述光学构件适于 以提供会聚的光会聚在一起形成与扫描位置可变的距离的光点，以及用于接收来自表面的散射光的光接收装置。

公开(公告)号：US5585918A

公开(公告)日：1996-12-17

申请号：US494539

申请日：1995-06-26

申请人： Seiji Takeuchi ,  Kyoichi Miyazaki ,  Toshihiko Tsuji

发明人： Seiji Takeuchi ,  Kyoichi Miyazaki ,  Toshihiko Tsuji

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  H01L21/00 ,  H01L21/027 ,  H05B37/00

CPC分类号： H01L21/67253 ,  G01N21/94 ,  G03F1/84 ,  G01N2021/95676

摘要： An inspecting system includes a light source, an irradiating optical system for irradiating a surface of an object such as a reticle or photomask with light from the light source, a detection optical system for detecting scattered light from the surface of the object, and a light blocking device provided substantially parallel to the surface of the object, the light blocking device having a first light transmitting portion for passing light coming from the light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward the detection optical system.

摘要翻译： 一种检查系统，包括光源，用于从光源的光照射诸如掩模版或光掩模的物体的表面的照射光学系统，用于检测来自物体的表面的散射光的检测光学系统，以及光 遮光装置设置成基本上平行于物体的表面，遮光装置具有用于使来自光源的光朝向物体的表面通过的第一透光部分和用于使来自照射位置的光通过的第二透光部分 在物体的表面上朝向检测光学系统。

公开(公告)号：US07324187B2

公开(公告)日：2008-01-29

申请号：US10956614

申请日：2004-10-01

申请人： Toshihiko Tsuji ,  Akira Yabuki

发明人： Toshihiko Tsuji ,  Akira Yabuki

IPC分类号： G03B27/74 ,  G03B27/42 ,  G03B27/54

CPC分类号： G03F7/7085 ,  G03B27/54 ,  G03F7/70066 ,  G03F7/70091

摘要： Disclosed is an illumination optical system and an exposure apparatus having the same, and specifically, as an aspect of the invention, an illumination optical system for illuminating a surface to be illuminated, that includes an aperture stop for defining an effective light source distribution upon a predetermined plane which is substantially in a Fourier transform relation with the surface to be illuminated, and a detector disposed adjacent an opening of the aperture stop.

摘要翻译： 本发明公开了一种照明光学系统和曝光装置，具体而言，作为本发明的一个方面，照明光学系统用于照亮被照射的表面，该照明光学系统包括用于限定有效光源分布的孔径光阑 与被照射的表面基本上是傅里叶变换关系的预定平面以及邻近孔径光阑的开口设置的检测器。

公开(公告)号：US06919951B2

公开(公告)日：2005-07-19

申请号：US10205348

申请日：2002-07-25

申请人： Toshihiko Tsuji

发明人： Toshihiko Tsuji

IPC分类号： H01L21/027 ,  G03F7/20 ,  G03B27/54 ,  G03B27/42

CPC分类号： G03F7/70075

摘要： Disclosed is an illumination system for illuminating an illumination region with uniform illuminance, wherein the light intensity gravity center of light impinging on the illumination region is registered with the center of light rays. The illumination system includes a first reflection type integrator, a first condensing mirror system for superposing light beams from the first reflection type integrator one upon another on the surface to be illuminated, a second reflection type integrator disposed between the light source and said first reflection type integrator, and a second condensing mirror system for superposing light beams from the second reflection type integrator one upon another on the first reflection type integrator. Also disclosed is an exposure apparatus having such illumination system, and a device manufacturing method using the same.

摘要翻译： 公开了一种用于照明具有均匀照度的照明区域的照明系统，其中照射在照明区域上的光的重心重心与光线的中心对准。 照明系统包括第一反射型积分器，第一聚光镜系统，用于将第一反射型积分器的光束在被照射的表面上叠加起来;第二反射型积分器，设置在光源和所述第一反射型之间 积分器和第二聚光镜系统，用于在第一反射型积分器上叠加来自第二反射型积分器的光束。 还公开了具有这种照明系统的曝光装置和使用该照明系统的装置制造方法。

公开(公告)号：US20050057738A1

公开(公告)日：2005-03-17

申请号：US10769373

申请日：2004-01-30

申请人： Toshihiko Tsuji

发明人： Toshihiko Tsuji

IPC分类号： G03B27/54 ,  G03F7/20 ,  G21K1/00 ,  H01L21/027

CPC分类号： G03F7/702 ,  G21K2201/06

摘要： Attempting to provide an illumination optical system and an exposure apparatus using the same, which provide a more uniform angular distribution of light for illuminating a mask than the prior art, an illumination optical system for illuminating an object surface includes an optical unit that converts light from a light source section into approximately parallel light, and includes first and second mirrors, wherein the first mirror has an opening, through which light reflected by the second mirror passes.

摘要翻译： 为了提供照明光学系统和使用该照明光学系统的曝光装置，其提供了比现有技术更光亮的用于照射掩模的光的角度分布，用于照射物体表面的照明光学系统包括：光学单元，其将来自 光源部分成近似平行的光，并且包括第一和第二反射镜，其中第一反射镜具有开口，第二反射镜反射的光穿过该开口。