Invention Grant
- Patent Title: Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same
- Patent Title (中): 用于检测被检查表面上的异物的检查装置，以及曝光装置及使用其的装置制造方法
-
Application No.: US266512Application Date: 1994-06-27
-
Publication No.: US5461474APublication Date: 1995-10-24
- Inventor: Minoru Yoshii , Noriyuki Nose , Masayuki Suzuki , Kyoichi Miyazaki , Toshihiko Tsuji , Seiji Takeuchi
- Applicant: Minoru Yoshii , Noriyuki Nose , Masayuki Suzuki , Kyoichi Miyazaki , Toshihiko Tsuji , Seiji Takeuchi
- Applicant Address: JPX Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JPX Tokyo
- Priority: JPX5-207078 19930729
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/94 ; G01N21/956 ; H01L21/66
Abstract:
When inspecting the presence of foreign matter on a surface to be inspected by scanning the surface with a light beam from a light source utilizing a scanning system, and receiving scattered light from the surface by a detector, a correlation is utilized between a signal representing first scattered light obtained from the detector when the light beam scans a first line on the surface, and a signal representing second scattered light obtained from the detector when the light beam scans a second line displaced from the first line by a predetermined amount in a direction orthogonal to the direction of the first line.
Public/Granted literature
- US4920680A Line setter method and apparatus Public/Granted day:1990-05-01
Information query
