公开(公告)号：US20240112881A1

公开(公告)日：2024-04-04

申请号：US18196499

申请日：2023-05-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jonghyeok PARK ,  Kwangrak KIM ,  Jiwoong KIM ,  Hyenok PARK ,  Jeonghyeon WANG ,  Myungjun LEE ,  Yunje CHO ,  Junghee CHO ,  Yun HWANG

IPC: H01J37/28 ,  G01B11/22 ,  H01J37/20 ,  H01J37/304 ,  H01J37/305

CPC classification number: H01J37/28 ,  G01B11/22 ,  H01J37/20 ,  H01J37/304 ,  H01J37/305 ,  H01J37/1472 ,  H01J2237/24578

Abstract: A substrate analysis system includes a load-lock module configured to load or unload a substrate on which a pattern layer is formed; a milling module configured to form a milling surface from which at least a portion of the pattern layer is removed; a depth measuring module configured to measure a milling depth of an analysis region formed on the milling surface; an imaging module configured to capture a two-dimensional image of the analysis region; and a control module controlling the substrate to circulate through the milling module, the depth measuring module, and the imaging module, when the milling depth is shallower than a set target depth, wherein the milling module adjusts a path of the ion beam so that the ion beam moves horizontally in the milling region according to a scanning profile received based on an intensity map of the ion beam.

公开(公告)号：US20230074302A1

公开(公告)日：2023-03-09

申请号：US17826320

申请日：2022-05-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yunje CHO ,  Subong SHON ,  Myungjun LEE ,  Taehyoung LEE ,  Yeny YIM

IPC: G06T7/00 ,  G06V10/77 ,  G06T7/73 ,  G06T1/20

Abstract: A scanning electron microscope (SEM) device includes: an electron beam source configured to emit an electron beam; a lens unit disposed between the electron beam source and a stage configured to seat an object including structures having a pattern is seated, and including a scanning coil, the scanning coil configured to generate an electromagnetic field to provide a lens, and an astigmatism adjuster; and a control unit. The control unit is configured to change a working distance between the lens unit and the object to obtain a plurality of original images, obtain a pattern image, in which the structures appear, and a plurality of kernel images, in which a distribution of the electron beam on the object appears, from the plurality of original images, and control the astigmatism adjuster to adjust the focus and the astigmatism of the lens unit using feature values extracted from the plurality of kernel images.

公开(公告)号：US20160171726A1

公开(公告)日：2016-06-16

申请号：US14967962

申请日：2015-12-14

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY ,  SAMSUNG ELECTRONICS CO., LTD.

Inventor： Woo-hyun NAM ,  Jong Beom RA ,  Yongjin CHANG ,  Yong-sup PARK ,  Jae-sung LEE ,  Yunje CHO

IPC: G06T11/00 ,  G06T7/20 ,  G06T7/00

CPC classification number: G06T11/006 ,  G06T2211/412

Abstract: A method of reconstructing a tomography image and a tomography apparatus configured to reconstruct a tomography image are provided. Tomography data corresponding to a moving object is acquired by performing a tomography scan on the object, and a tomography image is reconstructed using prior images obtained based on the acquired tomography data.

Abstract translation: 提供了重建断层摄影图像的方法和被配置为重建断层摄影图像的断层摄影装置。 通过对物体进行断层摄影扫描来获取对应于运动物体的层析成像数据，并且使用基于获取的断层摄影数据获得的先前图像来重建断层摄影图像。