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公开(公告)号：US09915623B2
公开(公告)日：2018-03-13
申请号：US15218584
申请日：2016-07-25
Applicant: Samsung Electronics Co., Ltd.
Inventor： Kwang Soo Kim , Taejoong Kim , Byeonghwan Jeon , Yongsuk Choi , Youngduk Kim , Taeseok Oh , SangYun Lee , Yong-Ho Choi
CPC classification number: G01N21/9501 , G01N21/95623 , G02B3/0006 , G02B13/0095 , G02B27/0988
Abstract: An optical inspection apparatus includes an inspection target unit on which an inspection target is loaded, an illumination optical unit configured to irradiate incident light to the inspection target, an objective lens unit disposed between the illumination optical unit and the inspection target unit, a detection optical unit configured to receive reflective light reflected from the inspection target to thereby detect a presence or absence of a defect on the inspection target, and a control unit configured to control the illumination optical unit and the detection optical unit. The illumination optical unit includes a light source part configured to irradiate the incident light, and a spatial filter array configured to modify a transmission region of the incident light irradiated from the light source part. The spatial filter array includes a spatial filter part, and a filter movement part configured to move the spatial filter part.
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公开(公告)号：US20170082552A1
公开(公告)日：2017-03-23
申请号：US15218584
申请日：2016-07-25
Applicant: Samsung Electronics Co., Ltd.
Inventor： Kwang Soo Kim , Taejoong Kim , Byeonghwan Jeon , Yongsuk Choi , Youngduk Kim , Taeseok Oh , SangYun Lee , Yong-Ho Choi
CPC classification number: G01N21/9501 , G01N21/95623 , G02B3/0006 , G02B13/0095 , G02B27/0988
Abstract: An optical inspection apparatus includes an inspection target unit on which an inspection target is loaded, an illumination optical unit configured to irradiate incident light to the inspection target, an objective lens unit disposed between the illumination optical unit and the inspection target unit, a detection optical unit configured to receive reflective light reflected from the inspection target to thereby detect a presence or absence of a defect on the inspection target, and a control unit configured to control the illumination optical unit and the detection optical unit. The illumination optical unit includes a light source part configured to irradiate the incident light, and a spatial filter array configured to modify a transmission region of the incident light irradiated from the light source part. The spatial filter array includes a spatial filter part, and a filter movement part configured to move the spatial filter part.
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