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公开(公告)号:US20230369212A1
公开(公告)日:2023-11-16
申请号:US18117623
申请日:2023-03-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jung Tae SUNG , Yun Sun Jang , Moo Rym Choi
IPC: H01L23/528 , H10B43/10 , H10B43/27 , H10B43/35 , H10B43/40 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/40
CPC classification number: H01L23/5283 , H10B43/10 , H10B43/27 , H10B43/35 , H10B43/40 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/40
Abstract: A nonvolatile memory device includes a plurality of metal lines extending in a first direction and stacked in a second direction crossing the first direction, a plurality of cell structures passing through the plurality of metal lines and extending in the second direction, a plurality of extension regions, a plate common source line contact connected with a common source line, extending in the first direction, and formed in least two of the plurality of extension regions that are not formed with the plurality of cell structures, and input/output metal contacts connected with an external connection pad, extending in the first direction, and formed with at least two of the plurality of extension regions that are not formed with the plate common source line contact.
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公开(公告)号:US20230292521A1
公开(公告)日:2023-09-14
申请号:US18153763
申请日:2023-01-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Woo Yong JEON , Eun-Ji Kim , Ji Young Kim , Moo Rym Choi
IPC: H10B43/40 , H10B43/10 , H10B43/27 , H10B43/35 , H01L23/522 , H01L23/528 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/40
CPC classification number: H10B43/40 , H10B43/10 , H10B43/27 , H10B43/35 , H01L23/5226 , H01L23/5283 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/40
Abstract: A semiconductor memory device includes a peripheral circuit structure including a peripheral circuit and a first bonding pad, the first bonding pad connected to the peripheral circuit, a cell structure on the peripheral circuit structure, the cell structure including a second bonding pad bonded to the first bonding pad, and a pad structure on the cell structure. The cell structure includes a cell substrate having a first face, a second face opposite to the first face, a first contact plug extending through the cell substrate and connected to an electrode layer, and a second contact plug extending through the cell substrate and connected to the cell substrate. Each of the first contact plug and the second contact plug is connected to the pad structure, and a bypass via is in contact with the pad structure on the second face.
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