公开(公告)号：US20230204493A1

公开(公告)日：2023-06-29

申请号：US18111229

申请日：2023-02-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaehwang JUNG ,  Yasuhiro HIDAKA ,  Mitsunori NUMATA ,  Wookrae KIM ,  Jinseob KIM ,  Myungjun LEE

IPC: G01N21/21 ,  G01N21/95 ,  G02B27/10

CPC classification number: G01N21/211 ,  G01N21/9501 ,  G02B27/10 ,  G01N2021/214

Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

公开(公告)号：US20190025226A1

公开(公告)日：2019-01-24

申请号：US16037088

申请日：2018-07-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Akio ISHIKAWA ,  Ken OZAWA ,  Kwang-Soo KIM ,  Sean PARK ,  Mitsunori NUMATA

IPC: G01N21/88 ,  G02B27/42 ,  G06T7/00

CPC classification number: G01N21/8806 ,  G01N21/956 ,  G01N2201/06 ,  G02B27/42 ,  G06T7/0002 ,  G06T2207/10152

Abstract: An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.

公开(公告)号：US20220074848A1

公开(公告)日：2022-03-10

申请号：US17204059

申请日：2021-03-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaehwang JUNG ,  Yasuhiro HIDAKA ,  Mitsunori NUMATA ,  Wookrae KIM ,  Jinseob KIM ,  Myungjun LEE

IPC: G01N21/21 ,  G02B27/10 ,  G01N21/95

Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

公开(公告)号：US20150160445A1

公开(公告)日：2015-06-11

申请号：US14559337

申请日：2014-12-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nobuyuki KIMURA ,  Mitsuhiro TOGASHI ,  Masaki TAKADA ,  Mitsunori NUMATA

IPC: G02B21/06 ,  F21V8/00 ,  G02B21/00 ,  G02B21/36

CPC classification number: G02B21/06 ,  G02B6/0008 ,  G02B6/03694 ,  G02B21/0016 ,  G02B21/082 ,  G02B27/0994

Abstract: Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.

Abstract translation: 提供了一种照明装置，以及使用该照明装置的光学检查装置和光学显微镜。 照明装置包括发光的光源，输出比预定的光线角度分布更均匀地强的光的光学装置; 具有多次反射光的多反射装置，具有光入射面的多反射装置和发射多重反射光的发光面，以及扩散装置，其将从发光面发射的光扩散到 多反射装置。 光源，光学器件，多反射器件和光扩散器件共享光路。