公开(公告)号：US20150160445A1

公开(公告)日：2015-06-11

申请号：US14559337

申请日：2014-12-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nobuyuki KIMURA ,  Mitsuhiro TOGASHI ,  Masaki TAKADA ,  Mitsunori NUMATA

IPC: G02B21/06 ,  F21V8/00 ,  G02B21/00 ,  G02B21/36

CPC classification number: G02B21/06 ,  G02B6/0008 ,  G02B6/03694 ,  G02B21/0016 ,  G02B21/082 ,  G02B27/0994

Abstract: Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.

Abstract translation: 提供了一种照明装置，以及使用该照明装置的光学检查装置和光学显微镜。 照明装置包括发光的光源，输出比预定的光线角度分布更均匀地强的光的光学装置; 具有多次反射光的多反射装置，具有光入射面的多反射装置和发射多重反射光的发光面，以及扩散装置，其将从发光面发射的光扩散到 多反射装置。 光源，光学器件，多反射器件和光扩散器件共享光路。