公开(公告)号：US20210341937A1

公开(公告)日：2021-11-04

申请号：US17367014

申请日：2021-07-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dongwoo PARK ,  Joonyoung Kim ,  Boseok Moon ,  Hyunjoong Lee

IPC: G05D1/02 ,  G01H13/00

Abstract: An electronic device and a method of driving the same are provided. The electronic device includes a container; a sensor; a driving unit; and a processor configured to: based on sensing data received through the sensor, measure, at a predetermined time interval, external forces exerted on the electronic apparatus from a ground on which the electronic apparatus is located, identify, based on frequency characteristics of the external forces and a natural vibration frequency of a liquid contained in the container, a frequency having frequency characteristics corresponding to the natural vibration frequency among frequencies of the external forces, and input a driving signal to the driving unit, based on a size of the identified frequency, the driving signal controlling a velocity of the electronic apparatus according to a natural vibration period of the liquid.

公开(公告)号：US20250079154A1

公开(公告)日：2025-03-06

申请号：US18652323

申请日：2024-05-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Joonyoung Kim ,  Dohyun Kim ,  Sechan Kim ,  Kijong Park ,  Yuri Park ,  Sunjoong Song ,  Eunjin Song ,  Seungmin Shin ,  Seungcheol Chae ,  Sangjoon Park ,  Hyunjin Jang

IPC: H01L21/02 ,  H01L21/311

Abstract: A method of manufacturing an integrated circuit device includes forming a hafnium oxide film on a substrate and partially etching the hafnium oxide film. Partially etching the hafnium oxide film includes performing a dry treatment that changes components of a surface region that extends from an exposed surface of the hafnium oxide film into the hafnium oxide film by as much as a predetermined thickness by isotropically exposing the hafnium oxide film to a gas mixture that includes a halogen element-containing gas and a catalytic gas that includes hydrogen atoms in an atmosphere in which no plasma is applied onto the substrate, performing a wet treatment with an acidic solution that at least partially removes the component-changed surface region from the hafnium oxide film, and repeating a sequence of the dry treatment and the wet treatment.

公开(公告)号：US11938637B2

公开(公告)日：2024-03-26

申请号：US17424247

申请日：2020-01-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Joonyoung Kim ,  Hyunjoong Lee

IPC: B25J9/16 ,  B25J13/00

CPC classification number: B25J9/1666 ,  B25J9/162 ,  B25J9/1633 ,  B25J9/1697 ,  B25J13/003

Abstract: Disclosed is a robot. The robot comprises: a driving unit including a motor, and a processor configured to: determine a driving level of the robot based on surrounding environment information of the robot based on receiving a command for performing a task of the robot, determine, based on information about a maximum allowable torque and information about a maximum allowable speed which are preset for each driving level, a maximum allowable torque and a maximum allowable speed corresponding to the driving level of the robot, calculate the maximum allowable acceleration of the robot based on the maximum allowable torque, control the driving unit to control the robot to control the moving speed of the robot to reach the maximum allowable speed based on the maximum allowable acceleration, and control the robot to perform tasks while the robot is moving at the maximum allowable speed.

公开(公告)号：US11886197B2

公开(公告)日：2024-01-30

申请号：US17367014

申请日：2021-07-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dongwoo Park ,  Joonyoung Kim ,  Boseok Moon ,  Hyunjoong Lee

IPC: G05D1/02 ,  G01H13/00

CPC classification number: G05D1/0223 ,  G01H13/00

Abstract: An electronic device and a method of driving the same are provided. The electronic device includes a container; a sensor; a driving unit; and a processor configured to: based on sensing data received through the sensor, measure, at a predetermined time interval, external forces exerted on the electronic apparatus from a ground on which the electronic apparatus is located, identify, based on frequency characteristics of the external forces and a natural vibration frequency of a liquid contained in the container, a frequency having frequency characteristics corresponding to the natural vibration frequency among frequencies of the external forces, and input a driving signal to the driving unit, based on a size of the identified frequency, the driving signal controlling a velocity of the electronic apparatus according to a natural vibration period of the liquid.

公开(公告)号：US20240030038A1

公开(公告)日：2024-01-25

申请号：US18139840

申请日：2023-04-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seungmin Shin ,  Joonyoung Kim ,  Kijong Park ,  Sunjoong Song ,  Seungcheol Chae

IPC: H01L21/311 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/31122 ,  H01L21/67069 ,  H01L21/6875 ,  H01L21/68785

Abstract: Provided is an atomic layer etching (ALE) method including operation (a) of loading a substrate having a first surface and a second surface facing each other onto a chuck, operation (b) of cooling the substrate to a first temperature through a cooling fluid, operation (c) of forming a modified layer on the substrate through a reaction between a first source gas and the first surface of the substrate by spraying the first source gas toward the substrate from a shower head positioned above the chuck, operation (d) of heating the substrate to a second temperature through a laser beam, and operation (e) of removing the modified layer of the substrate through a reaction between a second source gas and the modified layer of the substrate by spraying the second source gas from the shower head toward the first surface of the substrate.