SEMICONDUCTOR DEVICES
    3.
    发明申请

    公开(公告)号:US20220115377A1

    公开(公告)日:2022-04-14

    申请号:US17331725

    申请日:2021-05-27

    Abstract: A semiconductor device includes a substrate including an isolation layer pattern and an active pattern, a buffer insulation layer pattern on the substrate, a polysilicon structure on the active pattern and the buffer insulation layer pattern, the polysilicon structure contacting a portion of the active pattern, and the polysilicon structure extending in a direction parallel to an upper surface of the substrate, a first diffusion barrier layer pattern on an upper surface of the polysilicon structure, the first diffusion barrier layer pattern including polysilicon doped with at least carbon, a second diffusion barrier layer pattern on the first diffusion barrier layer pattern, the second diffusion barrier layer pattern including at least a metal, and a first metal pattern and a first capping layer pattern stacked on the second diffusion barrier layer pattern.

    SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

    公开(公告)号:US20240172416A1

    公开(公告)日:2024-05-23

    申请号:US18240512

    申请日:2023-08-31

    CPC classification number: H10B12/315 H10B12/482 H10B12/485 H10B12/488

    Abstract: A semiconductor device includes a substrate having a substrate groove extending in a first direction, a gate insulating layer conformally covering an inner wall of the substrate groove, a metal-containing pattern on the gate insulating layer and filling a lower portion of the substrate groove, a silicon pattern on the metal-containing pattern in the substrate groove, and a word line capping pattern on the silicon pattern in the substrate groove, wherein the silicon pattern includes a first silicon pattern covering an upper surface of the metal-containing pattern and a sidewall of the gate insulating layer and having a pattern groove formed thereon and a second silicon pattern filling the pattern groove, the first silicon pattern having a first impurity concentration, and the second silicon pattern having a second impurity concentration less than the first impurity concentration.

    POWER LINE ARRANGEMENT METHOD ANDMEMORY DEVICE

    公开(公告)号:US20240005079A1

    公开(公告)日:2024-01-04

    申请号:US18319049

    申请日:2023-05-17

    Inventor: Jonghyeok KIM

    CPC classification number: G06F30/394 G06F30/36 G06F2113/18

    Abstract: A method of arranging power lines to be applied to a memory device including a plurality of layers, wherein, in each of the plurality of layers, a plurality of power lines and a plurality of signal lines are arranged along a plurality of track lines arranged side by side to be separated from each other in a first direction or a second direction that is perpendicular to the first direction is provided. The method includes identifying a first track line on which a plurality of power lines are arranged, moving at least one of the plurality of power lines to a second track line adjacent to the first track line, and electrically connecting the moved at least one power line on the second track line.

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