Methods of manufacturing semiconductor devices and electronic devices
    2.
    发明授权
    Methods of manufacturing semiconductor devices and electronic devices 有权
    制造半导体器件和电子器件的方法

    公开(公告)号:US09373698B2

    公开(公告)日:2016-06-21

    申请号:US14505662

    申请日:2014-10-03

    Abstract: In a method of manufacturing a semiconductor device, an isolation layer pattern is formed on a substrate to define a field region covered by the isolation layer pattern and first and second active regions that is not covered by the isolation layer pattern and protrudes from the isolation layer pattern. A first anti-reflective layer is formed on the isolation layer pattern. A first photoresist layer is formed on the first and second active regions of the substrate and the first anti-reflective layer. The first photoresist layer is partially etched to form a first photoresist pattern covering the first active region. Impurities are implanted into the second active region to form a first impurity region.

    Abstract translation: 在制造半导体器件的方法中,在衬底上形成隔离层图案,以限定由隔离层图案覆盖的场区域和未被隔离层图案覆盖并从隔离层突出的第一和第二有源区域 模式。 第一抗反射层形成在隔离层图案上。 在基板的第一和第二有源区域和第一抗反射层上形成第一光致抗蚀剂层。 部分蚀刻第一光致抗蚀剂层以形成覆盖第一有源区的第一光致抗蚀剂图案。 将杂质注入到第二有源区中以形成第一杂质区。

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