DEFECT DETECTION DEVICE AND DEFECT DETECTION METHOD

    公开(公告)号:US20240255439A1

    公开(公告)日:2024-08-01

    申请号:US18367784

    申请日:2023-09-13

    IPC分类号: G01N21/95 G01N21/31 G06N20/00

    摘要: A defect detection method includes radiating light onto a substrate, obtaining a spectrum image, performing an electrical die sorting (EDS) test on the substrate, inspecting defects of each of a plurality of blocks of the substrate based on a result of the EDS test, generating a defect map, generating spectrum image information by matching the spectrum image with the defect map, training a defect detection model by using the defect grade as an output value and the spectrum image information as an input value, obtaining a target spectrum image with respect to a target substrate, extracting a feature vector from the target spectrum image by using the defect detection model, and detecting a target defect grade of the target spectrum image based on the feature vector, and generating a target defect map based on the target defect grade.