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公开(公告)号:US12243754B2
公开(公告)日:2025-03-04
申请号:US17517304
申请日:2021-11-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Do Young Choi , Sung Min Kim , Cheol Kim , Hyo Jin Kim , Dae Won Ha , Dong Woo Han
IPC: H01L21/3213 , H01L21/308 , H01L27/088 , H01L27/092
Abstract: Provided is a semiconductor device. The semiconductor device comprises a first active pattern extending in a first direction on a substrate, a second active pattern which extends in the first direction and is adjacent to the first active pattern in a second direction different from the first direction, a field insulating film placed between the first active pattern and the second active pattern, a first gate structure which crosses the first active pattern, extends in the second direction, and includes a first gate electrode and a first gate spacer, a second gate structure which crosses the second active pattern, extends in the second direction, and includes a second gate electrode and a second gate spacer, a gate separation structure placed on the field insulating film between the first gate structure and the second gate structure.