公开(公告)号：US09136342B2

公开(公告)日：2015-09-15

申请号：US14495835

申请日：2014-09-24

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Yeon Taek Jeong ,  Bo Sung Kim ,  Doo-Hyoung Lee ,  June Whan Choi ,  Tae-Young Choi ,  Kano Masataka

IPC: H01L29/76 ,  H01L29/423 ,  H01L29/51 ,  H01L29/49 ,  H01L29/786

CPC classification number: H01L29/42384 ,  H01L29/4908 ,  H01L29/51 ,  H01L29/512 ,  H01L29/786 ,  H01L2029/42388

Abstract: A thin film transistor is provided. A thin film transistor according to an exemplary embodiment of the present invention includes: a substrate; a gate line disposed on the substrate and including a gate electrode; a semiconductor layer disposed on the substrate and including at least a portion overlapping the gate electrode; a gate insulating layer disposed between the gate line and the semiconductor layer; and a source electrode and a drain electrode disposed on the substrate and facing each other over a channel region of the semiconductor layer. The gate insulating layer includes a first region and a second region, the first region corresponds to the channel region of the semiconductor layer, the first region is made of a first material, the second region is made of a second material, and the first material and the second material have different atomic number ratios of carbon and silicon.

Abstract translation: 提供薄膜晶体管。 根据本发明的示例性实施例的薄膜晶体管包括：基板; 栅极线，设置在所述基板上并且包括栅电极; 半导体层，设置在所述基板上，并且至少包括与所述栅电极重叠的部分; 设置在所述栅极线和所述半导体层之间的栅极绝缘层; 以及设置在所述基板上并且在所述半导体层的沟道区域上彼此面对的源电极和漏电极。 栅极绝缘层包括第一区域和第二区域，第一区域对应于半导体层的沟道区域，第一区域由第一材料制成，第二区域由第二材料制成，第一材料 并且第二材料具有不同的碳和硅原子数比。

公开(公告)号：US09406785B2

公开(公告)日：2016-08-02

申请号：US14521043

申请日：2014-10-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Doo Hyoung Lee ,  Bo Sung Kim ,  Chan Woo Yang ,  Seung-Ho Jung ,  Yeon Taek Jeong ,  June Whan Choi ,  Tae-Young Choi

IPC: H01L21/441 ,  H01L21/02 ,  H01L21/385 ,  H01L29/66 ,  H01L29/786 ,  H01L21/477

CPC classification number: H01L29/66969 ,  H01L21/02565 ,  H01L21/02614 ,  H01L21/385 ,  H01L21/441 ,  H01L21/477 ,  H01L29/7869

Abstract: A thin film transistor includes a substrate, an oxide semiconductor layer that is disposed on the substrate, a gate electrode that overlaps with the oxide semiconductor layer, a gate insulating layer that is disposed between the oxide semiconductor layer and the gate electrode, and a source electrode and a drain electrode that at least partially overlap with the oxide semiconductor layer and are spaced from each other. The gate insulating layer includes an oxide including a first material. The oxide semiconductor layer includes an oxide which includes a same material as the first material and a second material, and the source electrode and the drain electrode include an oxide that includes a same material as the second material and a third material, and a grain boundary is not formed on an interface between at least one of the gate insulating layer and the oxide semiconductor layer or between the oxide semiconductor layer, and the source electrode and the drain electrode.

Abstract translation: 薄膜晶体管包括衬底，设置在衬底上的氧化物半导体层，与氧化物半导体层重叠的栅电极，设置在氧化物半导体层和栅电极之间的栅极绝缘层，以及源极 电极和与氧化物半导体层至少部分重叠并且彼此间隔开的漏电极。 栅极绝缘层包括包含第一材料的氧化物。 氧化物半导体层包括与第一材料相同的材料和第二材料的氧化物，源电极和漏极包括包含与第二材料相同的材料的氧化物和第三材料，以及晶界 不形成在栅极绝缘层和氧化物半导体层中的至少一个之间或氧化物半导体层以及源电极和漏电极之间的界面上。

公开(公告)号：US08895977B2

公开(公告)日：2014-11-25

申请号：US13673195

申请日：2012-11-09

Applicant: Samsung Display Co., Ltd.

Inventor： Doo Hyoung Lee ,  Bo Sung Kim ,  Chan Woo Yang ,  Seung-Ho Jung ,  Yeon Taek Jeong ,  June Whan Choi ,  Tae-Young Choi

IPC: H01L21/786 ,  H01L29/786 ,  H01L21/385

CPC classification number: H01L29/66969 ,  H01L21/02565 ,  H01L21/02614 ,  H01L21/385 ,  H01L21/441 ,  H01L21/477 ,  H01L29/7869

Abstract: A thin film transistor includes a substrate, an oxide semiconductor layer that is disposed on the substrate, a gate electrode that overlaps with the oxide semiconductor layer, a gate insulating layer that is disposed between the oxide semiconductor layer and the gate electrode, and a source electrode and a drain electrode that at least partially overlap with the oxide semiconductor layer and are spaced from each other. The gate insulating layer includes an oxide including a first material. The oxide semiconductor layer includes an oxide which includes a same material as the first material and a second material, and the source electrode and the drain electrode include an oxide that includes a same material as the second material and a third material, and a grain boundary is not formed on an interface between at least one of the gate insulating layer and the oxide semiconductor layer or between the oxide semiconductor layer, and the source electrode and the drain electrode.

Abstract translation: 薄膜晶体管包括衬底，设置在衬底上的氧化物半导体层，与氧化物半导体层重叠的栅电极，设置在氧化物半导体层和栅电极之间的栅极绝缘层，以及源极 电极和与氧化物半导体层至少部分重叠并且彼此间隔开的漏电极。 栅极绝缘层包括包含第一材料的氧化物。 氧化物半导体层包括与第一材料相同的材料和第二材料的氧化物，源电极和漏极包括包含与第二材料相同的材料的氧化物和第三材料，以及晶界 不形成在栅极绝缘层和氧化物半导体层中的至少一个之间或氧化物半导体层以及源电极和漏电极之间的界面上。

公开(公告)号：US20130320327A1

公开(公告)日：2013-12-05

申请号：US13673195

申请日：2012-11-09

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Doo Hyoung LEE ,  Bo Sung Kim ,  Chan Woo Yang ,  Seung-Ho Jung ,  Yeon Taek Jeong ,  June Whan Choi ,  Tae-Young Choi

IPC: H01L29/786 ,  H01L21/385

CPC classification number: H01L29/66969 ,  H01L21/02565 ,  H01L21/02614 ,  H01L21/385 ,  H01L21/441 ,  H01L21/477 ,  H01L29/7869

Abstract: A thin film transistor includes a substrate, an oxide semiconductor layer that is disposed on the substrate, a gate electrode that overlaps with the oxide semiconductor layer, a gate insulating layer that is disposed between the oxide semiconductor layer and the gate electrode, and a source electrode and a drain electrode that at least partially overlap with the oxide semiconductor layer and are spaced from each other. The gate insulating layer includes an oxide including a first material. The oxide semiconductor layer includes an oxide which includes a same material as the first material and a second material, and the source electrode and the drain electrode include an oxide that includes a same material as the second material and a third material, and a grain boundary is not formed on an interface between at least one of the gate insulating layer and the oxide semiconductor layer or between the oxide semiconductor layer, and the source electrode and the drain electrode.

公开(公告)号：US09823531B2

公开(公告)日：2017-11-21

申请号：US14277526

申请日：2014-05-14

Applicant: Samsung Display Co., Ltd.

Inventor： Tae-Young Choi ,  Bo Sung Kim ,  Jae Woo Park ,  Hee Jun Byeon ,  Young-Wook Lee ,  Moon-Keun Choi

IPC: G02F1/1362 ,  H01L27/12 ,  H01L27/02

CPC classification number: G02F1/136286 ,  G02F1/136204 ,  H01L27/0288 ,  H01L27/124

Abstract: A thin film transistor array panel includes: gate lines; data lines insulated from and crossing the gate lines; and shorting bars disposed outside of a display area in which the gate lines cross the data lines. The shorting bars overlap portions of the data lines disposed outside of the display area. The shorting bar includes a semiconductor material.

公开(公告)号：US20150044817A1

公开(公告)日：2015-02-12

申请号：US14521043

申请日：2014-10-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Doo Hyoung Lee ,  Bo Sung Kim ,  Chan Wood Yang ,  Seung-Ho Jung ,  Yeon Taek Jeong ,  June Whan Choi ,  Tae-Young Choi

IPC: H01L29/66 ,  H01L21/477 ,  H01L21/441 ,  H01L21/02 ,  H01L21/385

CPC classification number: H01L29/66969 ,  H01L21/02565 ,  H01L21/02614 ,  H01L21/385 ,  H01L21/441 ,  H01L21/477 ,  H01L29/7869

Abstract: A thin film transistor includes a substrate, an oxide semiconductor layer that is disposed on the substrate, a gate electrode that overlaps with the oxide semiconductor layer, a gate insulating layer that is disposed between the oxide semiconductor layer and the gate electrode, and a source electrode and a drain electrode that at least partially overlap with the oxide semiconductor layer and are spaced from each other. The gate insulating layer includes an oxide including a first material. The oxide semiconductor layer includes an oxide which includes a same material as the first material and a second material, and the source electrode and the drain electrode include an oxide that includes a same material as the second material and a third material, and a grain boundary is not formed on an interface between at least one of the gate insulating layer and the oxide semiconductor layer or between the oxide semiconductor layer, and the source electrode and the drain electrode.

Abstract translation: 薄膜晶体管包括衬底，设置在衬底上的氧化物半导体层，与氧化物半导体层重叠的栅电极，设置在氧化物半导体层和栅电极之间的栅极绝缘层，以及源极 电极和与氧化物半导体层至少部分重叠并且彼此间隔开的漏电极。 栅极绝缘层包括包含第一材料的氧化物。 氧化物半导体层包括与第一材料相同的材料和第二材料的氧化物，源电极和漏极包括包含与第二材料相同的材料的氧化物和第三材料，以及晶界 不形成在栅极绝缘层和氧化物半导体层中的至少一个之间或氧化物半导体层以及源电极和漏电极之间的界面上。

公开(公告)号：US08785263B2

公开(公告)日：2014-07-22

申请号：US13652967

申请日：2012-10-16

Applicant: Samsung Display Co., Ltd.

Inventor： Tae-Young Choi ,  Bo-Sung Kim

IPC: H01L21/00

CPC classification number: H01L27/1292 ,  B82Y10/00 ,  H01L29/41733 ,  H01L29/66969 ,  H01L29/7869 ,  H01L51/0005 ,  H01L51/0023 ,  H01L51/0048 ,  H01L51/0545 ,  H01L51/102

Abstract: A thin-film transistor substrate includes a gate line, and a gate electrode connected to the gate line, on a base substrate; an insulating layer on the gate electrode, the insulating layer including a first part and a second part, the first part having a hydrophobic property and the second part having a hydrophilic property; a data line extended in a different direction from the gate line, and a source electrode connected to the data line and on the second part of the insulating layer; a drain electrode on the second part of the insulating layer, the drain electrode spaced apart from the source electrode; a semi-conductor pattern overlapping the source electrode, the drain electrode and a gap between the spaced apart source and drain electrodes, where the semi-conductor pattern exposes the first part of the insulating layer; and a pixel electrode in contact with the drain electrode.

Abstract translation: 薄膜晶体管基板包括在基底基板上的栅极线和连接到栅极线的栅电极; 在所述栅电极上的绝缘层，所述绝缘层包括第一部分和第二部分，所述第一部分具有疏水性，所述第二部分具有亲水性; 沿着与栅极线不同的方向延伸的数据线，以及连接到数据线和绝缘层的第二部分的源电极; 绝缘层的第二部分上的漏电极，与电极间隔开的漏电极; 半导体图案与源电极，漏电极和间隔开的源极和漏极之间的间隙重叠，其中半导体图案暴露绝缘层的第一部分; 以及与漏电极接触的像素电极。