IMPRINT LITHOGRAPHY METHOD, METHOD FOR MANUFACTURING MASTER TEMPLATE USING THE METHOD AND MASTER TEMPLATE MANUFACTURED BY THE METHOD
    3.
    发明申请
    IMPRINT LITHOGRAPHY METHOD, METHOD FOR MANUFACTURING MASTER TEMPLATE USING THE METHOD AND MASTER TEMPLATE MANUFACTURED BY THE METHOD 有权
    IMPRINT LITHOGRAPHY方法,使用该方法制造的方法和主模板制造主模板的方法

    公开(公告)号:US20160306275A1

    公开(公告)日:2016-10-20

    申请号:US14991828

    申请日:2016-01-08

    CPC classification number: G03F7/0002 B81C2201/015

    Abstract: An exemplary embodiment discloses an imprint lithography method including: forming a first imprint pattern on a base substrate in a first area; forming a first resist pattern on the base substrate in a second area, the second area partially overlapping the first area; etching a third area using the first imprint pattern and the first resist pattern as an etch barrier, wherein the third area is a portion of the first area that is not overlapped with the second area; removing the first imprint pattern and the first resist pattern; forming a second imprint pattern on the base substrate in a fourth area which overlaps the second area and partially overlaps the third area; forming a second resist pattern on the base substrate in the third area; and etching the second area using the second imprint pattern and the second resist pattern as an etch barrier.

    Abstract translation: 一个示例性实施例公开了一种压印光刻方法,包括:在第一区域中的基底基板上形成第一印记图案; 在第二区域中在基底基板上形成第一抗蚀剂图案,第二区域部分地与第一区域重叠; 使用所述第一印记图案和所述第一抗蚀剂图案蚀刻第三区域作为蚀刻阻挡层,其中所述第三区域是所述第一区域的与所述第二区域不重叠的部分; 去除所述第一印记图案和所述第一抗蚀剂图案; 在与所述第二区域重叠并与所述第三区域部分重叠的第四区域中的所述基底基板上形成第二印记图案; 在所述第三区域中的所述基底基板上形成第二抗蚀剂图案; 以及使用所述第二印记图案和所述第二抗蚀剂图案作为蚀刻屏障来蚀刻所述第二区域。

    POLARIZING LIQUID CRYSTAL PANEL AND DISPLAY APPARATUS INCLUDING THE SAME
    4.
    发明申请
    POLARIZING LIQUID CRYSTAL PANEL AND DISPLAY APPARATUS INCLUDING THE SAME 有权
    极化液晶面板和显示装置,包括它们

    公开(公告)号:US20130148046A1

    公开(公告)日:2013-06-13

    申请号:US13706790

    申请日:2012-12-06

    Abstract: In a polarizing liquid crystal panel and a display apparatus including the polarizing liquid crystal panel, the polarizing liquid crystal panel includes a first substrate, a second substrate and a liquid crystal layer. The first substrate includes a plastic substrate, a first electrode on the plastic substrate, and a first alignment layer on the first electrode. The second substrate includes a base substrate which opposes the first substrate, a second electrode on the base substrate, and a second alignment layer on the second electrode. The liquid crystal layer is between the first and second substrates and polarizes a light using an electric field between the first and second electrodes.

    Abstract translation: 在偏振液晶面板和包括偏振液晶面板的显示装置中,偏振液晶面板包括第一基板,第二基板和液晶层。 第一基板包括塑料基板,塑料基板上的第一电极和第一电极上的第一对准层。 第二基板包括与第一基板相对的基底基板,基底基板上的第二电极和第二电极上的第二取向层。 液晶层位于第一和第二基板之间,并且使用第一和第二电极之间的电场使光偏振。

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