公开(公告)号：US20240242980A1

公开(公告)日：2024-07-18

申请号：US18390323

申请日：2023-12-20

Applicant: Samsung Display Co., LTD.

Inventor： Yonghyun KIM ,  Kyu-Bum KIM ,  Seung Ho MYOUNG ,  Yeongmin KIM ,  Ju Yeong YUN ,  Jungwoo CHOI

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67069 ,  H01L21/6719 ,  H01L21/67706 ,  H01L21/68764

Abstract: A substrate etching apparatus includes: a stage moving part for supporting a substrate carrier to which a substrate is attached in a vertical direction and for moving the substrate carrier to which the substrate is attached in a horizontal direction; a substrate carrier loading part positioned in a first region in the horizontal direction and for loading the substrate carrier to which the substrate is attached to the stage moving part; and an etching part positioned in a second region adjacent to the first region in the horizontal direction and for etching the substrate attached to the substrate carrier supported on the stage moving part in the vertical direction.

公开(公告)号：US20230294209A1

公开(公告)日：2023-09-21

申请号：US18097122

申请日：2023-01-13

Applicant: Samsung Display Co., Ltd.

Inventor： Heungyeol NA ,  Yoonchul KIM ,  Seong Jin YEON ,  Jungwoo CHOI

IPC: B23K26/362

CPC classification number: B23K26/362

Abstract: A laser etching method include performing a first emission process by emitting a laser beam from a laser module toward a substrate fastened to a chuck in a laser etching chamber, moving a protection window between the chuck and the laser module in a first direction by a first distance after the performing the first emission process, performing a second emission process by emitting a laser beam from the laser module after the moving the protection window in the first direction by the first distance, moving the protection window in an opposite direction of the first direction by a second distance after the performing the second emission process, and performing a third emission process by emitting a laser beam from the laser module after the moving the protection window in the opposite direction of the first direction by the second distance.

公开(公告)号：US20230249286A1

公开(公告)日：2023-08-10

申请号：US18163327

申请日：2023-02-02

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Heungyeol NA ,  Jungwoo CHOI ,  Yonghyun KIM

IPC: B23K26/08 ,  H10K59/12 ,  B23K26/12

CPC classification number: B23K26/0838 ,  H10K59/1201 ,  B23K26/127

Abstract: An apparatus for manufacturing a display device include: a tray on which a window is seated, a belt on which the tray is seated, where the tray is moved by the belt, a first pulley which rotatably supports the belt, a second pulley arranged to be spaced apart from the first pulley, where the second pulley rotatably supports the belt, and a driving portion connected to the second pulley, where the driving portion rotates the second pulley.