公开(公告)号：US20140084263A1

公开(公告)日：2014-03-27

申请号：US13797836

申请日：2013-03-12

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Yong-Hyun Jin ,  Jae-Ha Lim

IPC: H01L21/67 ,  H01L27/32

CPC classification number: H01L21/67011 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  C23C14/568 ,  H01L21/67709 ,  H01L21/6776 ,  H01L27/3244 ,  H01L27/3258 ,  H01L51/0011

Abstract: An organic layer deposition apparatus includes a transfer unit; a first conveyer unit including a guide member having accommodation grooves, a first accommodation part, a second accommodation part, and a connection part that connects the first accommodation part to the second accommodation part; a second conveyer unit for moving the transfer unit without the substrate; a loading unit for fixing the substrate on the transfer unit; a deposition unit including a chamber and an organic layer deposition assembly; and an unloading unit for separating the substrate, wherein the first accommodation part of the guide member is located close to ground compared to the second accommodation part, and includes a lower member, an upper member, elastic members located between the lower and upper members. The substrate fixed on the transfer unit is spaced from the organic layer deposition assembly while being transferred by the first conveyer unit.

Abstract translation: 有机层沉积设备包括转印单元; 包括具有容纳槽的引导构件的第一输送单元，第一容纳部，第二容纳部以及将第一容纳部连接到第二容纳部的连接部; 第二输送单元，用于移动没有基板的转印单元; 用于将所述基板固定在所述转印单元上的装载单元; 沉积单元，其包括室和有机层沉积组件; 以及用于分离所述基板的卸载单元，其中所述引导构件的所述第一容纳部分与所述第二容纳部分相比位于靠近地面，并且包括下部构件，上部构件，位于所述下部构件和上部构件之间的弹性构件。 固定在转印单元上的基板与有机层沉积组件间隔开，同时被第一输送单元转印。

公开(公告)号：US20150096489A1

公开(公告)日：2015-04-09

申请号：US14552269

申请日：2014-11-24

Applicant: Samsung Display Co., Ltd.

Inventor： Byung-Chul Lee ,  Jae-Seok Park ,  Jae-Ha Lim ,  Jin-Han Park ,  Dong-Sul Kim

IPC: B05C1/08

CPC classification number: B05C1/0834 ,  B05C1/0813 ,  H01L51/56

Abstract: An apparatus for fabricating an organic light emitting display panel is disclosed. In one embodiment, the apparatus includes i) a first roll around which a film is wound to be continuously drawn, ii) a second roll arranged to face the first roll and around which the film is continuously wound, iii) a plurality of chambers disposed between the first and second rolls and through which the film passes, and in which laser induced thermal imaging (LITI) is performed on a substrate by forming a transfer layer on the film, and iv) a gate unit installed at least one of the chambers and disposed at at least one of a film inlet and a film output of the chambers that are installed, to maintain a substantially vacuum state in the chambers during passing of the film.

Abstract translation: 公开了一种用于制造有机发光显示面板的装置。 在一个实施例中，该设备包括：i）围绕其卷绕连续拉伸的膜的第一辊，ii）布置成面对第一辊并且膜周围连续缠绕的第二辊，iii）设置的多个室 在所述第一和第二辊之间并且所述膜通过其中，并且其中通过在所述膜上形成转移层在衬底上进行激光诱导热成像（LITI），以及iv）安装至少一个所述室的栅极单元 并且设置在安装的室的膜入口和膜输出中的至少一个上，以在膜通过期间在室中保持基本上真空状态。

公开(公告)号：US08900976B2

公开(公告)日：2014-12-02

申请号：US13797836

申请日：2013-03-12

Applicant: Samsung Display Co., Ltd.

Inventor： Yong-Hyun Jin ,  Jae-Ha Lim

IPC: H01L21/335 ,  H01L21/677 ,  C23C14/04 ,  C23C14/50 ,  C23C14/56 ,  H01L27/32 ,  C23C14/24 ,  H01L21/67 ,  H01L51/00

CPC classification number: H01L21/67011 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  C23C14/568 ,  H01L21/67709 ,  H01L21/6776 ,  H01L27/3244 ,  H01L27/3258 ,  H01L51/0011

Abstract: An organic layer deposition apparatus includes a transfer unit; a first conveyer unit including a guide member having accommodation grooves, a first accommodation part, a second accommodation part, and a connection part that connects the first accommodation part to the second accommodation part; a second conveyer unit for moving the transfer unit without the substrate; a loading unit for fixing the substrate on the transfer unit; a deposition unit including a chamber and an organic layer deposition assembly; and an unloading unit for separating the substrate, wherein the first accommodation part of the guide member is located close to ground compared to the second accommodation part, and includes a lower member, an upper member, elastic members located between the lower and upper members. The substrate fixed on the transfer unit is spaced from the organic layer deposition assembly while being transferred by the first conveyer unit.

Abstract translation: 有机层沉积设备包括转印单元; 包括具有容纳槽的引导构件的第一输送单元，第一容纳部，第二容纳部以及将第一容纳部连接到第二容纳部的连接部; 第二输送单元，用于移动没有基板的转印单元; 用于将所述基板固定在所述转印单元上的装载单元; 沉积单元，其包括室和有机层沉积组件; 以及用于分离所述基板的卸载单元，其中所述引导构件的所述第一容纳部分与所述第二容纳部分相比位于靠近地面，并且包括下部构件，上部构件，位于所述下部构件和上部构件之间的弹性构件。 固定在转印单元上的基板与有机层沉积组件间隔开，同时被第一输送单元转印。