公开(公告)号：US20140084263A1

公开(公告)日：2014-03-27

申请号：US13797836

申请日：2013-03-12

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Yong-Hyun Jin ,  Jae-Ha Lim

IPC: H01L21/67 ,  H01L27/32

CPC classification number: H01L21/67011 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  C23C14/568 ,  H01L21/67709 ,  H01L21/6776 ,  H01L27/3244 ,  H01L27/3258 ,  H01L51/0011

Abstract: An organic layer deposition apparatus includes a transfer unit; a first conveyer unit including a guide member having accommodation grooves, a first accommodation part, a second accommodation part, and a connection part that connects the first accommodation part to the second accommodation part; a second conveyer unit for moving the transfer unit without the substrate; a loading unit for fixing the substrate on the transfer unit; a deposition unit including a chamber and an organic layer deposition assembly; and an unloading unit for separating the substrate, wherein the first accommodation part of the guide member is located close to ground compared to the second accommodation part, and includes a lower member, an upper member, elastic members located between the lower and upper members. The substrate fixed on the transfer unit is spaced from the organic layer deposition assembly while being transferred by the first conveyer unit.

Abstract translation: 有机层沉积设备包括转印单元; 包括具有容纳槽的引导构件的第一输送单元，第一容纳部，第二容纳部以及将第一容纳部连接到第二容纳部的连接部; 第二输送单元，用于移动没有基板的转印单元; 用于将所述基板固定在所述转印单元上的装载单元; 沉积单元，其包括室和有机层沉积组件; 以及用于分离所述基板的卸载单元，其中所述引导构件的所述第一容纳部分与所述第二容纳部分相比位于靠近地面，并且包括下部构件，上部构件，位于所述下部构件和上部构件之间的弹性构件。 固定在转印单元上的基板与有机层沉积组件间隔开，同时被第一输送单元转印。

公开(公告)号：US08900976B2

公开(公告)日：2014-12-02

申请号：US13797836

申请日：2013-03-12

Applicant: Samsung Display Co., Ltd.

Inventor： Yong-Hyun Jin ,  Jae-Ha Lim

IPC: H01L21/335 ,  H01L21/677 ,  C23C14/04 ,  C23C14/50 ,  C23C14/56 ,  H01L27/32 ,  C23C14/24 ,  H01L21/67 ,  H01L51/00

CPC classification number: H01L21/67011 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  C23C14/568 ,  H01L21/67709 ,  H01L21/6776 ,  H01L27/3244 ,  H01L27/3258 ,  H01L51/0011

Abstract: An organic layer deposition apparatus includes a transfer unit; a first conveyer unit including a guide member having accommodation grooves, a first accommodation part, a second accommodation part, and a connection part that connects the first accommodation part to the second accommodation part; a second conveyer unit for moving the transfer unit without the substrate; a loading unit for fixing the substrate on the transfer unit; a deposition unit including a chamber and an organic layer deposition assembly; and an unloading unit for separating the substrate, wherein the first accommodation part of the guide member is located close to ground compared to the second accommodation part, and includes a lower member, an upper member, elastic members located between the lower and upper members. The substrate fixed on the transfer unit is spaced from the organic layer deposition assembly while being transferred by the first conveyer unit.

Abstract translation: 有机层沉积设备包括转印单元; 包括具有容纳槽的引导构件的第一输送单元，第一容纳部，第二容纳部以及将第一容纳部连接到第二容纳部的连接部; 第二输送单元，用于移动没有基板的转印单元; 用于将所述基板固定在所述转印单元上的装载单元; 沉积单元，其包括室和有机层沉积组件; 以及用于分离所述基板的卸载单元，其中所述引导构件的所述第一容纳部分与所述第二容纳部分相比位于靠近地面，并且包括下部构件，上部构件，位于所述下部构件和上部构件之间的弹性构件。 固定在转印单元上的基板与有机层沉积组件间隔开，同时被第一输送单元转印。

公开(公告)号：US09123915B2

公开(公告)日：2015-09-01

申请号：US13651963

申请日：2012-10-15

Applicant: Samsung Display Co., Ltd.

Inventor： Yong-Hyun Jin

IPC: B25B11/00 ,  H01L51/56 ,  B41F16/00

CPC classification number: H01L51/56 ,  B41F16/006 ,  B65H5/04 ,  B65H2405/57 ,  B65H2701/1752 ,  H01L51/0013

Abstract: A donor film tray that supplies a donor film includes: a tray main body disposed in correspondence with an edge of the donor film, and including an opening that exposes a center area of the donor film; and a clamp disposed in an area of the tray main body for clamping the edge of the donor film, and for pulling the edge of the donor film in a direction away from the tray main body using the repulsive force of a magnet.

Abstract translation: 供体供体膜的供体膜托盘包括：与供体膜的边缘相对应地设置的托盘主体，并且包括暴露供体膜的中心区域的开口; 以及夹具，其设置在托盘主体的区域中，用于夹持施主膜的边缘，并且使用磁体的排斥力沿远离托盘主体的方向拉出施体膜的边缘。

公开(公告)号：US20130241126A1

公开(公告)日：2013-09-19

申请号：US13651963

申请日：2012-10-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Yong-Hyun Jin

IPC: B25B11/00

CPC classification number: H01L51/56 ,  B41F16/006 ,  B65H5/04 ,  B65H2405/57 ,  B65H2701/1752 ,  H01L51/0013

Abstract: A donor film tray that supplies a donor film includes: a tray main body disposed in correspondence with an edge of the donor film, and including an opening that exposes a center area of the donor film; and a clamp disposed in an area of the tray main body for clamping the edge of the donor film, and for pulling the edge of the donor film in a direction away from the tray main body using the repulsive force of a magnet.

Abstract translation: 供体供体膜的供体膜托盘包括：与供体膜的边缘相对应地设置的托盘主体，并且包括暴露供体膜的中心区域的开口; 以及夹具，其设置在托盘主体的区域中，用于夹持供体膜的边缘，并且使用磁体的排斥力沿远离托盘主体的方向拉出供体膜的边缘。