公开(公告)号：US20200238323A1

公开(公告)日：2020-07-30

申请号：US16699796

申请日：2019-12-02

Applicant: Samsung Display Co. Ltd.

Inventor： Jun Ho JO ,  Min Ho MOON ,  Young Ho PARK ,  Young Suck CHOI

IPC: B05B12/20 ,  C23C16/04

Abstract: A deposition mask unit includes a deposition mask sheet including a plurality of openings, and a deposition mask frame including a raised portion at which the deposition mask sheet is attachable to the deposition mask frame. The raised portion includes a support portion, and a bonding portion protruding from an upper surface of the support portion, an upper surface of the bonding portion being curved.

公开(公告)号：US20140291306A1

公开(公告)日：2014-10-02

申请号：US14021700

申请日：2013-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Doh-Hyoung LEE ,  Jun Ho JO

IPC: B23K26/00 ,  C23C16/04

CPC classification number: B23K26/0093 ,  B23K26/0648 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/127 ,  B23K26/364 ,  B23K26/40 ,  B23K2101/18 ,  B23K2103/04 ,  B23K2103/05 ,  B23K2103/50 ,  C23C14/042 ,  C23C16/042

Abstract: A mask substrate that includes a first area and a second area surrounding the first area is provided. Then, a laser beam is irradiated on the mask substrate to at least partly remove a material of the second area. After that, a physical force is applied to the mask substrate to separate the first area from the mask substrate thereby forming an opening through the mask substrate.

Abstract translation: 提供了包括第一区域和围绕第一区域的第二区域的掩模基板。 然后，将激光束照射在掩模基板上，以至少部分地去除第二区域的材料。 之后，对掩模基板施加物理力以将第一区域与掩模基板分离，从而形成通过掩模基板的开口。

公开(公告)号：US20250075305A1

公开(公告)日：2025-03-06

申请号：US18642578

申请日：2024-04-22

Applicant: Samsung Display Co., LTD.

Inventor： Jin Woo LEE ,  Jeong Kuk KIM ,  Duck Jung LEE ,  Sug Woo JUNG ,  Sung Won CHO ,  Jun Ho JO

IPC: C23C14/04 ,  H10K71/16

Abstract: A method for manufacturing a deposition mask includes depositing a seed metal layer on a front surface of a silicon substrate, forming a first photoresist pattern defining first openings on the seed metal layer, growing a plating layer in the first openings of the first photoresist pattern, forming a mask membrane by removing the first photoresist pattern and leaving the plating layer, depositing a protection layer to cover a front surface of the mask membrane, forming a second photoresist pattern defining cell opening corresponding to unit masks, respectively, on a back surface of the silicon substrate, exposing the seed metal layer by etching the back surface of the silicon substrate using the second photoresist pattern as a mask, exposing a back surface of the mask membrane by etching the seed metal layer using the second photoresist pattern as a mask, and removing the protection layer.

公开(公告)号：US20140238963A1

公开(公告)日：2014-08-28

申请号：US14021420

申请日：2013-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Jun Ho JO ,  Doh-Hyoung LEE

IPC: B23K26/067 ,  B23K26/30 ,  B23K26/12

CPC classification number: B23K26/127 ,  B23K26/0652 ,  B23K26/0676 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/359 ,  B23K26/361 ,  B23K26/703

Abstract: A mask manufacturing apparatus includes a chamber, a laser beam irradiator, a stage, a cooling system, and a fan. The chamber provides an interior space therein. At least an upper wall of the chamber comprises a glass. The laser beam irradiator is disposed outside the chamber and configured to divide a laser beam into a plurality of sub-laser beams to irradiate the sub-laser beams onto a shadow mask material. The stage is disposed in the chamber and the shadow mask material is placed on the stage. The cooling system is configured cool the interior space. The fan configured to discharge heat generated in the interior space of the chamber to the outside of the chamber. Therefore, the shadow mask may be protected from overheating.

Abstract translation: 掩模制造装置包括室，激光束照射器，台，冷却系统和风扇。 该室在其中提供内部空间。 至少室的上壁包括玻璃。 激光束照射器设置在室外，并被配置为将激光束分成多个子激光束，以将子激光束照射到荫罩材料上。 将该台设置在该室中，并将该荫罩材料放置在该台上。 冷却系统配置冷却内部空间。 风扇构造成将在室的内部空间中产生的热量排出到室的外部。 因此，可以防止荫罩过热。

公开(公告)号：US20250101567A1

公开(公告)日：2025-03-27

申请号：US18734300

申请日：2024-06-05

Applicant: Samsung Display Co., LTD.

Inventor： Jeong Kuk KIM ,  Young Min MOON ,  Jun Ho JO

IPC: C23C14/04 ,  C25D5/02 ,  C25D5/54 ,  H10K59/12

Abstract: A method of fabricating a mask includes defining cell areas and a mask frame area on a silicon substrate, the mask frame area excluding the cell areas, the mask frame area may include a mask rib region partitioning the cell areas and an outer frame region disposed at an outermost position of the silicon substrate, forming a groove in the mask rib region, forming a metal mask rib by forming a metal in the groove, forming a photoresist pattern including openings in each of the cell areas, growing a plating film in each of the cell areas, forming a mask membrane formed of the plating film by removing the photoresist pattern, and etching a rear surface of the silicon substrate to form cell openings associated with the cell areas, respectively.

公开(公告)号：US20250059637A1

公开(公告)日：2025-02-20

申请号：US18636359

申请日：2024-04-16

Applicant: Samsung Display Co., LTD.

Inventor： Jun Ho JO ,  Sung Woon KIM ,  Jeong Kuk KIM ,  Duck Jung LEE ,  Il Soo LEE ,  Jin Woo LEE ,  Sug Woo JUNG ,  Sung Won CHO

IPC: C23C14/04 ,  H10K59/12

Abstract: A deposition mask includes a mask body including a silicon substrate, where a plurality of holes is defined through the mask body, and the mask body further includes mask grids extending to define the holes. A cross section of each mask grid has a reverse tapered shape having a width increasing from a back surface to an upper surface of the deposition mask, and each side surface of each mask grid defining a hole includes a first concave curved surface.

公开(公告)号：US20140217646A1

公开(公告)日：2014-08-07

申请号：US14021489

申请日：2013-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Doh-Hyoung LEE ,  Jun Ho JO

IPC: G03F7/20

CPC classification number: G03F1/76 ,  B23K26/067 ,  G03F7/2053 ,  G03F7/70383 ,  G03F7/70875

Abstract: A mask manufacturing apparatus includes a laser irradiator, a stage, a frame, and a heat spreader sheet. The laser irradiator divides a laser beam into a plurality of sub-laser beams and irradiates the sub-laser beams to a shadow mask material which is placed over a stage. The frame is disposed over the stage to support the shadow mask material. The heat spreader sheet makes contact with the shadow mask material, absorbs heat generated from the shadow mask material, and dissipates the heat to surroundings of the shadow mask material. Accordingly, the shadow mask material is protected from overheating.

Abstract translation: 掩模制造装置包括激光照射器，台架，框架和散热片。 激光照射器将激光束分割成多个子激光束，并将副激光束照射到放置在台上的荫罩材料。 框架设置在舞台上以支撑荫罩材料。 散热片与荫罩材料接触，吸收由荫罩材料产生的热量，并将热量散发到荫罩材料的周围。 因此，防止荫罩材料过热。