公开(公告)号：US20250059637A1

公开(公告)日：2025-02-20

申请号：US18636359

申请日：2024-04-16

Applicant: Samsung Display Co., LTD.

Inventor： Jun Ho JO ,  Sung Woon KIM ,  Jeong Kuk KIM ,  Duck Jung LEE ,  Il Soo LEE ,  Jin Woo LEE ,  Sug Woo JUNG ,  Sung Won CHO

IPC: C23C14/04 ,  H10K59/12

Abstract: A deposition mask includes a mask body including a silicon substrate, where a plurality of holes is defined through the mask body, and the mask body further includes mask grids extending to define the holes. A cross section of each mask grid has a reverse tapered shape having a width increasing from a back surface to an upper surface of the deposition mask, and each side surface of each mask grid defining a hole includes a first concave curved surface.