公开(公告)号：US20240118221A1

公开(公告)日：2024-04-11

申请号：US18347817

申请日：2023-07-06

Applicant: Samsung Display Co., LTD.

Inventor： JI-HWAN KIM

IPC: G01N21/95 ,  H01L21/02 ,  H01L21/66

CPC classification number: G01N21/95 ,  H01L21/02675 ,  H01L22/20 ,  G01N2201/0636 ,  G01N2201/0638

Abstract: A laser crystallization monitoring device includes a stage that supports a substrate, a laser beam generator that emits a laser beam to the substrate, a mirror that reflects the laser beam emitted from the laser beam generator and that rotates around a rotation axis, a first telecentric f-theta lens located on the laser beam path between the mirror and the substrate, a second telecentric f-theta lens through which the laser beam reflected from the substrate passes, and a monitor that inspects the laser beam passing through the second telecentric f-theta lens.

公开(公告)号：US20240355830A1

公开(公告)日：2024-10-24

申请号：US18759397

申请日：2024-06-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JONGHOON CHOI ,  JONGOH SEO ,  JI-HWAN KIM ,  JONGJUN BAEK ,  BYUNG SOO SO

IPC: H01L27/12 ,  H01L29/66

CPC classification number: H01L27/1237 ,  H01L27/1222 ,  H01L27/127 ,  H01L29/6675

Abstract: A display device may include a substrate, a buffer layer on the substrate, a first active pattern on the buffer layer, the first active pattern having a first thickness, a second active pattern on the buffer layer spaced from the first active pattern and having a second thickness smaller than the first thickness, a first gate insulating layer on the first active pattern and the second active pattern, a first gate electrode on the first gate insulating layer, the first gate electrode overlapping the first active pattern, and a second gate electrode on the first gate insulating layer, the second gate electrode overlapping the second active pattern.

公开(公告)号：US20220063015A1

公开(公告)日：2022-03-03

申请号：US17314559

申请日：2021-05-07

Applicant: Samsung Display Co., Ltd.

Inventor： JI-HWAN KIM ,  BYUNG SOO SO ,  JONGHOON CHOI

IPC: B23K26/064 ,  B23K26/00

Abstract: A laser irradiation apparatus includes a laser beam generator that generates a first laser beam, a beam expander that expands the first laser beam and outputs the expanded first laser beam as a second laser beam, a beam splitter that splits the second laser beam into third laser beams and outputs the third laser beams, and a beam condenser that condenses the third laser beams and outputs condensed third laser beams. The beam expander includes a first lens having a first focal length and a second lens having a second focal length. The first lens is disposed between the laser beam generator and the second lens, the second lens is disposed between the first lens and the beam splitter, and the laser beam generator is spaced apart from the first lens by the first focal length.

公开(公告)号：US20240280794A1

公开(公告)日：2024-08-22

申请号：US18379545

申请日：2023-10-12

Applicant: Samsung Display Co., Ltd.

Inventor： JONGOH SEO ,  JI-HWAN KIM

IPC: G02B19/00 ,  H01S5/00

CPC classification number: G02B19/0028 ,  H01S5/0071 ,  G02B5/10

Abstract: An optical system includes a first lens including a first surface and a second surface opposite to the first surface and having a first focal length, a second lens including a third surface and a fourth surface opposite to the third surface and having a second focal length, and a curved mirror disposed on a traveling path of a first laser beam passing through the first lens and changing the traveling path of the first laser beam to enter the second lens by reflecting the first laser beam.

公开(公告)号：US20240019707A1

公开(公告)日：2024-01-18

申请号：US18347447

申请日：2023-07-05

Applicant: Samsung Display Co., LTD.

Inventor： JONGOH SEO ,  JI-HWAN KIM ,  JONGHOON CHOI

IPC: G02B27/09

CPC classification number: G02B27/0916 ,  G02B27/0977 ,  G02B27/0955

Abstract: An optical system includes: a splitter reflecting a portion of a laser beam to form a reflected laser beam, and transmitting a portion of the laser beam to form a transmitted laser beam; a reflection module reflecting the laser beam from the splitter; an inversion module including a first lens having a first focal length and a first incident surface and a first exit surface opposite to the first incident surface, and a second lens having a second focal length and including a second incident surface and a second exit surface opposite to the second incident surface, in which the laser beam sequentially passes through the first lens and the second lens so that the transmitted laser beam is converted into an inverted laser beam; and a combiner reflecting the laser beam reflected from the reflection module and transmitting the inverted laser beam emitted from the inversion module.

公开(公告)号：US20240210720A1

公开(公告)日：2024-06-27

申请号：US18471643

申请日：2023-09-21

Applicant: Samsung Display Co., LTD.

Inventor： JONGOH SEO ,  JI-HWAN KIM

IPC: G02B27/64 ,  G02B19/00

CPC classification number: G02B27/646 ,  G02B19/0047

Abstract: An optical system and a laser device including an optical system are provided. An optical system includes a first lens including a first surface and a second surface opposite to the first surface, the first lens having a first focal length, a second lens including a third surface and a fourth surface opposite to the third surface, the second lens having a second focal length, and a third lens between the first lens and the second lens and spaced apart from the first lens by twice the first focal length.

公开(公告)号：US20230215871A1

公开(公告)日：2023-07-06

申请号：US18184639

申请日：2023-03-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JONGHOON CHOI ,  JONGOH SEO ,  JI-HWAN KIM ,  JONGJUN BAEK ,  BYUNG SOO SO

IPC: H01L29/66

CPC classification number: H01L29/6675

Abstract: A display device may include a substrate, a buffer layer on the substrate, a first active pattern on the buffer layer, the first active pattern having a first thickness, a second active pattern on the buffer layer spaced from the first active pattern and having a second thickness smaller than the first thickness, a first gate insulating layer on the first active pattern and the second active pattern, a first gate electrode on the first gate insulating layer, the first gate electrode overlapping the first active pattern, and a second gate electrode on the first gate insulating layer, the second gate electrode overlapping the second active pattern.