公开(公告)号：US20150255705A1

公开(公告)日：2015-09-10

申请号：US14634454

申请日：2015-02-27

Applicant: STMicroelectronics SA ,  STMicroelectronics (Crolles 2) SAS

Inventor： Emilie Trioux ,  Pascal Ancey ,  Stephane Monfray ,  Thomas Skotnicki ,  Skandar Basrour ,  Paul Muralt

IPC: H01L41/27 ,  C23C4/10 ,  C23C4/12 ,  H01L41/08 ,  F03G7/06

CPC classification number: H01L41/27 ,  B32B15/01 ,  C22F1/00 ,  C23C4/10 ,  C23C4/134 ,  C23C10/12 ,  F03G7/06 ,  H01L41/0805 ,  H01L41/0815 ,  H01L41/33 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49124

Abstract: A method of manufacturing bistable strips having different curvatures, each strip including a plurality of portion of layers of materials, wherein at least one specific layer portion is deposited by a plasma spraying method in conditions different for each of the strips.

Abstract translation: 制造具有不同曲率的双稳态条带的方法，每条条带包括多个材料层，其中至少一个特定层部分通过等离子体喷涂方法在对每个条带不同的条件下进行沉积。

公开(公告)号：US10312431B2

公开(公告)日：2019-06-04

申请号：US14634454

申请日：2015-02-27

Applicant: STMicroelectronics SA ,  STMicroelectronics (Crolles 2) SAS

Inventor： Emilie Trioux ,  Pascal Ancey ,  Stephane Monfray ,  Thomas Skotnicki ,  Skandar Basrour ,  Paul Muralt

IPC: H01L41/27 ,  C23C4/134 ,  H01L41/08 ,  F03G7/06 ,  C23C4/10 ,  C23C10/12 ,  H01L41/33 ,  C22F1/00 ,  B32B15/01

Abstract: A method of manufacturing bistable strips having different curvatures, each strip including a plurality of portion of layers of materials, wherein at least one specific layer portion is deposited by a plasma spraying method in conditions different for each of the strips.

公开(公告)号：US10532379B2

公开(公告)日：2020-01-14

申请号：US15515856

申请日：2015-09-30

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES ,  STMicroelectronics (Crolles 2) SAS ,  UNIVERSITE GRENOBLE ALPES

Inventor： Fabrice Casset ,  Skandar Basrour ,  Cédrick Chappaz ,  Jean-Sébastien Danel

IPC: H01L41/09 ,  B06B3/00 ,  B81B3/00 ,  B06B1/04 ,  B06B1/06 ,  H01L41/18 ,  H01L41/25

Abstract: A mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at the active substrate, the stack comprises an elementary structure for amplifying the vibrations: positioned between the actuator and the active substrate, the structure designed to transmit and amplify the vibrations; and comprising at least one trench, located between the actuator and the active substrate. A method for manufacturing the structure comprising the use of a temporary substrate is provided.