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    INFRARED CAMERA SENSOR
    1.
    发明申请
    INFRARED CAMERA SENSOR 有权
    红外相机传感器

    公开(公告)号：US20150001659A1

    公开(公告)日：2015-01-01

    申请号：US13929610

    申请日：2013-06-27

    Applicant: STMICROELECTRONICS PTE LTD

    Inventor： Olivier Le Neel ,  Ravi Shankar ,  Tien Choy Loh

    IPC: H01L27/146

    CPC classification number: H01L27/14629 ,  H01L27/14634 ,  H01L27/1467 ,  H01L27/14685 ,  H01L27/1469 ,  H01L2924/1461

    Abstract: The present disclosure is directed to an infrared sensor that includes a plurality of pairs of support structures positioned on the substrate, each pair including a first support structure adjacent to a second support structure. The sensor includes plurality of pixels, where each pixel is associated with one of the pairs of support structures. Each pixel includes a first infrared reflector layer on the substrate between the first and the second support structures, a membrane formed on the first and second support structures, a thermally conductive resistive layer on the membrane and positioned above the first infrared reflector layer, a second infrared reflector layer on the resistive layer, and an infrared absorption layer on the second infrared reflector layer.

    Abstract translation: 本公开涉及一种红外传感器，其包括定位在基板上的多对支撑结构，每对包括邻近第二支撑结构的第一支撑结构。 传感器包括多个像素，其中每个像素与一对支撑结构中的一个相关联。 每个像素包括在第一和第二支撑结构之间的衬底上的第一红外反射器层，形成在第一和第二支撑结构上的膜，膜上的导热电阻层并且位于第一红外反射层之上，第二 电阻层上的红外线反射层，以及第二红外线反射层上的红外线吸收层。

    INTEGRATED AIR QUALITY SENSOR
    2.
    发明申请
    INTEGRATED AIR QUALITY SENSOR 审中-公开

    公开(公告)号：US20180017536A1

    公开(公告)日：2018-01-18

    申请号：US15213100

    申请日：2016-07-18

    Applicant: STMicroelectronics Pte Ltd

    Inventor： Olivier Le Neel ,  Tien Choy Loh ,  Shian Yeu Kam ,  Ravi Shankar

    IPC: G01N33/00 ,  G01N25/00

    CPC classification number: G01N33/004 ,  G01N25/22 ,  G01N33/0047

    Abstract: A microelectronic device capable of detecting multiple gas constituents in ambient air can be used to monitor air quality. The microelectronic air quality monitor includes a plurality of temperature-sensitive gas sensors tuned to detect different gas species. Each gas sensor is tuned by programming an adjacent heater. An insulating air pocket formed below the sensor helps to maintain the sensor at a desired temperature. A temperature sensor may also be integrated with each gas sensor to provide additional feedback control. The heater, temperature sensor, and gas sensors are in the form of patternable thin films integrated on a single microchip. The device can be incorporated into computer workstations, smart phones, clothing, or other wearable accessories to function as a personal air quality monitor that is smaller, more accurate, and less expensive than existing air quality sensors.

    MINIATURE GAS ANALYZER
    3.
    发明申请
    MINIATURE GAS ANALYZER 审中-公开

    公开(公告)号：US20180017513A1

    公开(公告)日：2018-01-18

    申请号：US15213230

    申请日：2016-07-18

    Applicant: STMicroelectronics Pte Ltd

    Inventor： Olivier Le Neel ,  Ravi Shankar ,  Shian Yeu Kam ,  Tien Choy Loh

    IPC: G01N27/12 ,  G01N25/56

    CPC classification number: G01N27/128 ,  G01N33/0047

    Abstract: A miniature gas analyzer capable of detecting VOC gases in ambient air as well as sensing relative humidity and ambient temperature can be used to monitor indoor air quality. The VOC gas sensor is thermally controlled and can be tuned to detect a certain gas by programming an adjacent heater. An insulating air pocket formed below the sensor helps to maintain the VOC gas sensor at a desired temperature. A local temperature sensor may be integrated with each gas sensor to provide feedback control. The heater, local temperature sensor, gas sensor(s), relative humidity sensor, and ambient temperature sensor are in the form of patternable thin films integrated on a single microchip, e.g., an ASIC. The device can be incorporated into computer workstations, smart phones, clothing, or other wearable accessories to function as a personal air quality monitor that is smaller, more accurate, and less expensive than existing air quality sensors.

    MEMS THIN MEMBRANE WITH STRESS STRUCTURE
    5.
    发明申请
    MEMS THIN MEMBRANE WITH STRESS STRUCTURE 有权

    公开(公告)号：US20210214211A1

    公开(公告)日：2021-07-15

    申请号：US17115137

    申请日：2020-12-08

    Applicant: STMicroelectronics Pte Ltd

    Inventor： Ravi Shankar ,  Tien Choy Loh ,  Ananya Venkatesan

    IPC: B81B3/00 ,  G01L1/18 ,  G01L9/00

    Abstract: A blind opening is formed in a bottom surface of a semiconductor substrate to define a thin membrane suspended from a substrate frame. The thin membrane has a topside surface and a bottomside surface. A stress structure is mounted to one of the topside surface or bottomside surface of the thin membrane. The stress structure induces a bending of the thin membrane which defines a normal state for the thin membrane. Piezoresistors are supported by the thin membrane. In response to an applied pressure, the thin membrane is bent away from the normal state and a change in resistance of the piezoresistors is indicative of the applied pressure.

    Suspended membrane device
    6.
    发明授权
    Suspended membrane device 有权
    悬浮膜装置

    公开(公告)号：US09000542B2

    公开(公告)日：2015-04-07

    申请号：US13907708

    申请日：2013-05-31

    Applicant: STMicroelectronics Pte Ltd.

    Inventor： Tien Choy Loh ,  Olivier Le Neel

    IPC: H01L27/14 ,  H01L29/84 ,  H01L31/058 ,  B81B3/00 ,  B81C1/00

    CPC classification number: B81C1/00158 ,  B81B3/0021 ,  B81B2203/0127

    Abstract: The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities.

    Abstract translation: 本公开涉及一种包括基板和形成在基板上的传感器的装置。 所述传感器包括由多个集成腔体形成的室，在所述衬底上方的膜，所述膜具有多个开口，每个开口位于所述空腔中的一个上方，以及多个位于所述膜和所述衬底之间的菱形锚定件 ，定位在每个空腔之间的锚固件。 每个开口的中心也是其中一个空腔的中心。

    SELF-SEALING MEMBRANE FOR MEMS DEVICES
    7.
    发明申请
    SELF-SEALING MEMBRANE FOR MEMS DEVICES 有权
    用于MEMS器件的自密封膜

    公开(公告)号：US20140252507A1

    公开(公告)日：2014-09-11

    申请号：US13785938

    申请日：2013-03-05

    Applicant: STMICROELECTRONICS PTE LTD.

    Inventor： Ravi Shankar ,  Olivier Le Neel ,  Shian Yeu Kam ,  Tien Choy Loh

    IPC: B81C1/00 ,  B81B7/00

    CPC classification number: B81C1/00293 ,  B81B7/0041 ,  B81C2203/0136

    Abstract: Embodiments of the present disclosure are related to MEMS devices having a suspended membrane that are secured to and spaced apart from a substrate with a sealed cavity therebetween. The membrane includes openings with sidewalls that are closed by a dielectric material. In various embodiments, the cavity between the membrane and the substrate is formed by removing a sacrificial layer through the openings. In one or more embodiments, the openings in the membrane are closed by depositing the dielectric material on the sidewalls of the openings and the upper surface of the membrane.

    Abstract translation: 本公开的实施例涉及具有悬置膜的MEMS器件，其被固定到衬底上并与衬底间隔开密封腔。 膜包括具有由介电材料封闭的侧壁的开口。 在各种实施例中，通过从开口去除牺牲层来形成膜与衬底之间的空腔。 在一个或多个实施例中，通过将介电材料沉积在开口的侧壁和膜的上表面上来封闭膜中的开口。

    Gas analyzer that detects gases, humidity, and temperature
    8.
    发明授权
    Gas analyzer that detects gases, humidity, and temperature 有权

    公开(公告)号：US10429330B2

    公开(公告)日：2019-10-01

    申请号：US15213230

    申请日：2016-07-18

    Applicant: STMicroelectronics Pte Ltd

    Inventor： Olivier Le Neel ,  Ravi Shankar ,  Shian Yeu Kam ,  Tien Choy Loh

    IPC: G01N27/12 ,  G01N33/00

    Abstract: A miniature gas analyzer capable of detecting VOC gases in ambient air as well as sensing relative humidity and ambient temperature can be used to monitor indoor air quality. The VOC gas sensor is thermally controlled and can be tuned to detect a certain gas by programming an adjacent heater. An insulating air pocket formed below the sensor helps to maintain the VOC gas sensor at a desired temperature. A local temperature sensor may be integrated with each gas sensor to provide feedback control. The heater, local temperature sensor, gas sensor(s), relative humidity sensor, and ambient temperature sensor are in the form of patternable thin films integrated on a single microchip, e.g., an ASIC. The device can be incorporated into computer workstations, smart phones, clothing, or other wearable accessories to function as a personal air quality monitor that is smaller, more accurate, and less expensive than existing air quality sensors.

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