公开(公告)号：US20140187054A1

公开(公告)日：2014-07-03

申请号：US14139986

申请日：2013-12-24

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Youn Jung PARK ,  Haeng Deog KOH ,  Mi-Jeong KIM ,  Seong-Jun JEONG

IPC分类号： H01L21/02

CPC分类号： H01L21/02118 ,  B81C1/00031 ,  B81C2201/0149 ,  H01L21/02356 ,  H01L21/027 ,  H01L21/0271 ,  H01L21/3081

摘要： A method of patterning a block copolymer layer includes: providing a guide pattern on a surface of a substrate, the guide pattern including sidewalls each elongated in a longitudinal direction and spaced apart from each other, a trench defined by a bottom surface and facing surfaces of the sidewalls, and having a uniform width over an entire length thereof in the longitudinal direction, and a latitudinal wall perpendicular to the longitudinal direction of the trench; providing a block copolymer layer on the surface of the substrate; and annealing the block copolymer to cause self-assembly of the block copolymer and to direct the same in the trench. The block copolymer has a microphase-separation into anisotropic discrete domains aligned with a period λo in the trench by the annealing.

摘要翻译： 图案化嵌段共聚物层的方法包括：在基材的表面上提供引导图案，所述引导图案包括各自在纵向方向上延伸并且彼此间隔开的侧壁，所述沟槽由底表面限定并且面向 侧壁，并且在其纵向方向上在其整个长度上具有均匀的宽度，以及垂直于沟槽的纵向方向的纬向壁; 在基材的表面上提供嵌段共聚物层; 并且使嵌段共聚物退火以使嵌段共聚物自组装并将其引导到沟槽中。 嵌段共聚物通过退火将微相分离成与沟槽中的周期λo对准的各向异性离散畴。

公开(公告)号：US20140193614A1

公开(公告)日：2014-07-10

申请号：US14078921

申请日：2013-11-13

申请人： Yonsei University, University - Industry Foundation(UIF) ,  SAMSUNG ELECTRONICS CO., LTD.

发明人： Mi-Jeong KIM ,  In Taek HAN ,  June HUH ,  Seong-Jun Jeong ,  Haeng Deog KOH ,  Youn Jung PARK

IPC分类号： G03F7/00

CPC分类号： G03F7/0002 ,  B82B3/00 ,  B82B3/0066 ,  B82Y30/00 ,  B82Y40/00 ,  Y10T428/24802

摘要： A method of patterning a block copolymer layer, the method including: providing a substrate with a guide pattern formed on a surface thereof; forming a block copolymer layer on the substrate with the guide pattern, the block copolymer layer including a block copolymer; and directing self-assembly of the block copolymer on the substrate according to the guide pattern to form n/2 discrete domains, wherein the guide pattern includes a block copolymer patterning area having a 90-degree bending portion, and an outer apex and an inner apex of the 90-degree bending portion are each rounded, the outer apex having a first curvature radius r1and the inner apex having a second curvature radius r2, respectively, and the width of the patterning area W, the first curvature radius r1 and the second curvature radius r2, satisfy Inequation 1: 2 + 2 - ( 1 + 2 ) [ ( n + 2 ) 2 n  ( n + 1 ) ] 1 3 ≤ r 1 - r 2 W ≤ 2 + 2 - ( 1 + 2 ) [ ( n - 2 ) 2 n  ( n - 1 ) ] 1 3 . Inequation   1

摘要翻译： 一种图案化嵌段共聚物层的方法，所述方法包括：在其表面上提供具有引导图案的基材; 在引导图案的基板上形成嵌段共聚物层，嵌段共聚物层包括嵌段共聚物; 并且根据引导图案将嵌段共聚物自组装在基板上以形成n / 2个离散区域，其中引导图案包括具有90度弯曲部分的嵌段共聚物图案化区域，以及外部顶点和内部 90度弯曲部的顶点分别成圆形，外顶点分别具有第一曲率半径r1和内顶点，第二曲率半径r2，图案形成区域W的宽度，第一曲率半径r1和第二曲率半径 曲率半径r2满足等式1：2 + 2 - （1 + 2）[（n + 2）2 n（n + 1）] 1 3≤r 1 - r 2 W≤2 + 2 - （1 + 2 ）[（n-2）2 n（n-1）] 1 3。 不等式1