SEMICONDUCTOR DEVICES
    2.
    发明公开

    公开(公告)号:US20230402454A1

    公开(公告)日:2023-12-14

    申请号:US18133977

    申请日:2023-04-12

    Abstract: A semiconductor device includes a first isolation structure extending through an upper portion of a substrate and defining a first active region, a first gate structure on the substrate, and first source/drain regions at upper portions of the first active region adjacent to the first gate structure. The first isolation structure includes an upper isolation pattern structure and a lower isolation pattern. The upper isolation pattern structure includes a first isolation pattern and a second isolation pattern covering a sidewall of the first isolation pattern. The lower isolation pattern is formed under and contacting the upper isolation pattern structure, and a width of the lower isolation pattern is greater than a width of the upper isolation pattern structure.

Patent Agency Ranking